IP Library › Granted Patent US 9,583,460
Granted Patent B2
US 9,583,460 · App. 14/181,371 · Granted Feb 28, 2017

Integrated device comprising stacked dies on redistribution layers

Inventors: Urmi Ray (Ramona, CA); Shiqun Gu (San Diego, CA)
Assignee: QUALCOMM Incorporated
H01L25/0652H01L23/481H01L25/50H01L21/486H01L2225/06524H01L2225/06541
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Quick Facts
Patent No.
US 9,583,460
App. No.
14/181,371
Granted
Feb 28, 2017
Kind
B2
Abstract

Some features pertain to an integrated device that includes a dielectric layer configured as a base for the integrated device, several redistribution metal layers in the dielectric layer, a first wafer level die coupled to a first surface of the dielectric layer, and a second wafer level die coupled to the first wafer level die. The dielectric layer includes several dielectric layers. In some implementations, the first wafer level die is coupled to the redistribution metal layers through a first set of interconnects. In some implementations, the first wafer level die includes several through substrate vias (TSVs). In some implementations, the second wafer level die is coupled to the redistribution metal layers through a first set of interconnects, the TSVs, a second set of interconnects, and a set of solder balls. In some implementations, the integrated device includes an encapsulation layer that encapsulates the first and second wafer level dies.

Claims (24)

1. An integrated device comprising:

a dielectric layer configured as a base for the integrated device;

a plurality of redistribution metal layers in the dielectric layer;

a first wafer level die coupled to a first surface of the dielectric layer, wherein the first wafer level die comprises at least one through substrate vias (TSVs);

a second wafer level die coupled to the first wafer level die, wherein the second wafer level die is coupled to the plurality of redistribution metal layers through a first set of interconnects adjacent to the dielectric layer and further wherein the first set of interconnects are metal pillars, wherein the second wafer level die is further coupled to the plurality of redistribution metal layers through the at least one through substrate vias of the first wafer level die, a second set of interconnects, and a set of solder balls, wherein the second set of interconnects are metal pillars; and

a third wafer level die coupled to the first surface of dielectric layer through a third set of interconnects wherein third set of interconnects are metal pillars and the third set of interconnects are vertically longer than the first set of interconnects.

2. The integrated device of claim 1 , wherein the dielectric layer comprises several dielectric layers.

3. The integrated device of claim 1 , wherein the first wafer level die is coupled to the plurality of redistribution metal layers through the first set of interconnects.

4. The integrated device of claim 1 , wherein the second wafer level die is vertically coupled to the first wafer level die through the second set of interconnects, and the set of solder balls.

5. The integrated device of claim 1 , further comprising an encapsulation layer that encapsulates the first wafer level die and the second wafer level die.

6. The integrated device of claim 1 , wherein the first wafer level die is a processor and the second wafer level die is a memory die.

7. The integrated device of claim 1 , wherein the integrated device is incorporated into at least one of a music player, a video player, an entertainment unit, a navigation device, a communications device, a mobile device, a mobile phone, a smartphone, a personal digital assistant, a fixed location terminal, a tablet computer, and/or a laptop computer.

8. The apparatus of claim 1 , wherein the first wafer level die is a processor and the second wafer level die is a memory die.

9. An apparatus comprising:

a dielectric layer configured as a base for the integrated device;

a redistribution interconnect means in the dielectric layer;

a first wafer level die coupled to a first surface of the dielectric layer, wherein the first wafer level die comprises at least one through substrate vias (TSVs);

a second wafer level die coupled to the first wafer level die, wherein the second wafer level die is coupled to the redistribution interconnect means through a first set of interconnects adjacent to the dielectric layer and further wherein the first set of interconnects are metal pillars, wherein the second wafer level die is further coupled to the plurality of redistribution metal layers through the at least one through substrate via of the first wafer level die, a second set of interconnects, and a set of solder balls, wherein the second set of interconnects are metal pillars; and

a third wafer level die coupled to the first surface of dielectric layer through a third set of interconnects wherein third set of interconnects are metal pillars and the third set of interconnects are vertically longer than the first set of interconnects.

10. The apparatus of claim 9 , wherein the dielectric layer comprises several dielectric layers.

11. The apparatus of claim 9 , wherein the first wafer level die is coupled to the redistribution interconnect means through the first set of interconnects.

12. The apparatus of claim 9 , wherein the second wafer level die is vertically coupled to first wafer level die through the second set of interconnects, and the set of solder balls.

13. The apparatus of claim 9 , further comprising an encapsulation means that encapsulates the first wafer level die and the second wafer level die.

14. The apparatus of claim 9 , wherein the apparatus is incorporated into at least one of a music player, a video player, an entertainment unit, a navigation device, a communications device, a mobile device, a mobile phone, a smartphone, a personal digital assistant, a fixed location terminal, a tablet computer, and/or a laptop computer.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 28, 2014
From: RAY, URMI; GU, SHIQUN
To: QUALCOMM INCORPORATED
Reel/Frame 032321/0221 →
Continuity (1)
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