SURFACE DEFECT INSPECTION METHOD AND APPARATUS
A surface defect inspection apparatus and method is provided which illuminates a plurality of beams set to different intensity values to a sample. Scattered light from the plurality of beams is detected and processed to analyze the surface defects.
1 . A defect inspection apparatus comprising:
An illumination optical system configured to illuminate a plurality of beams set to different intensity values to a sample;
a detection optical system configured to detect a scattered light from the sample; and
a processing system configured to process a signal from the scattered light.
2 . A defect inspection apparatus according to claim 1 ,
wherein the illumination optical is configured to illuminate the plurality of beams to the sample simultaneously.
3 . A defect inspection apparatus according to claim 1 ,
wherein the illumination optical system is configured to illuminate the plurality of beams to different regions of the sample.
4 . A defect inspection apparatus according to claim 1 ,
wherein the plurality of beams are arrayed on a surface of the sample.
5 . A defect inspection apparatus according to claim 1 ,
wherein the illumination optical system having a polarizer, and wherein the polarizer is configured to divide at least one of the beams into linearly polarized beams which are orthogonal with each other.
6 . A defect inspection apparatus according to claim 5 ,
wherein the polarizer comprises a Wallaston prism.
7 . A defect inspection apparatus according to claim 1 ,
wherein the illumination optical system is configured to enable adjusting a distance between the plurality of beams.
8 . A defect inspection apparatus according to claim 1 ,
wherein the illumination optical system is configured to illuminate the plurality of beams from a same direction.
9 . A defect inspection apparatus according to claim 1 ,
wherein the illumination optical system is configured to illuminate the plurality of beams from different directions.
10 . A defect inspection apparatus according to claim 1 ,
wherein the illumination optical system includes a first optical system and a second optical system which have different elevation angles to a surface of the sample.
11 . A defect inspection method comprising:
illuminating a plurality of beams set to different intensity values to a sample; detecting a scattered light from the sample; and
processing a signal from the scattered light.
12 . A defect inspection method according to claim 11 ,
further comprising illuminating the plurality of beams simultaneously.
13 . A defect inspection method according to claim 11 ,
further comprising illuminating the plurality of beams to different regions of the sample.
14 . A defect inspection method according to claim 11 ,
further comprising illuminating an arrayed plurality of beams.
15 . A defect inspection method according to claim 11 ,
further comprising dividing at least one of the beams into linearly polarized beams which are orthogonal with each other.
16 . A defect inspection method according to claim 15 ,
wherein the polarizer comprises a Wallaston prism.
17 . A defect inspection method according to claim 11 ,
further comprising adjusting a distance between the plurality of beams.
18 . A defect inspection method according to claim 11 ,
further comprising illuminating the plurality of beams from a same direction.
19 . A defect inspection method according to claim 11 ,
further comprising illuminating the plurality of beams from different directions.