Image sensor device and method for forming the same
Embodiments of the disclosure provide an image sensor device. The image sensor device includes a semiconductor substrate including a front surface, a back surface opposite to the front surface, a light-sensing region close to the front surface, and a trench adjacent to the light-sensing region. The image sensor device includes a light-blocking structure positioned in the trench to absorb or reflect incident light.
1. An image sensor device, comprising:
a semiconductor substrate comprising a front surface, a back surface opposite to the front surface, at least one light-sensing region extending from the front surface into the semiconductor substrate, and at least one trench adjacent to the at least one light-sensing region;
at least one light-blocking structure positioned in the at least one trench to absorb or reflect incident light, wherein the at least one light-blocking structure comprises a conductive light reflection structure and a light absorption structure; and
an insulating layer covering the back surface and continuously extending into the at least one trench, wherein the insulating layer in the at least one trench is between the semiconductor substrate and the conductive light reflection structure to electrically isolate the conductive light reflection structure from the semiconductor substrate, a top surface of the conductive light reflection structure is below a topmost surface of the insulating layer covering the back surface, the insulating layer, the light absorption structure and the conductive light reflection structure are respectively made of different materials, and a topmost surface of the light absorption structure and the topmost surface of the insulating layer covering the back surface are substantially coplanar.
2. The image sensor device as claimed in claim 1 , wherein the light absorption structure has a light absorptivity ranging from about 60% to about 100% and is positioned above the conductive light reflection structure.
3. The image sensor device as claimed in claim 2 , wherein the light absorption structure comprises a black silicon material, and the insulating layer is disposed in the at least one trench and between the semiconductor substrate and the light absorption structure to electrically isolate the light absorption structure from the semiconductor substrate.
4. The image sensor device as claimed in claim 2 , wherein the light absorption structure comprises a non-visible light filter.
5. An image sensor device, comprising:
a semiconductor substrate comprising a front surface, a back surface opposite to the front surface, at least one light-sensing region extending from the front surface into the semiconductor substrate, and at least one trench adjacent to the at least one light-sensing region;
at least one light-blocking structure positioned in the at least one trench, wherein the at least one light-blocking structure comprises:
a conductive light reflection structure; and
a light absorption structure positioned above the conductive light reflection structure; and
an insulating layer covering the back surface and continuously extending into the at least one trench to electrically isolate the conductive light reflection structure and the light absorption structure from the semiconductor substrate, wherein the insulating layer, the light absorption structure and the conductive light reflection structure are respectively made of different materials, and a topmost surface of the light absorption structure and a topmost surface of the insulating layer covering the back surface are substantially coplanar.
6. The image sensor device as claimed in claim 5 , wherein the at least one light-blocking structure comprises a dielectric material with a refractive index lower than that of the semiconductor substrate.
7. The image sensor device as claimed in claim 5 , wherein the conductive light reflection structure comprises a metal material or an alloy material.
8. The image sensor device as claimed in claim 5 , wherein the light absorption structure has a light absorptivity ranging from about 60% to about 100%.
9. The image sensor device as claimed in claim 5 , wherein the at least one trench extends from the back surface.
10. The image sensor device as claimed in claim 5 , wherein the light absorption structure is positioned closer to the back surface than to the front surface, and the conductive light reflection structure is positioned closer to the front surface than to the back surface.
11. The image sensor device as claimed in claim 5 , wherein the light absorption structure comprises a black silicon material.
12. The image sensor device as claimed in claim 5 , wherein the light absorption structure comprises a non-visible light filter.
13. The image sensor device as claimed in claim 1 , further comprising an isolation structure formed adjacent to or near the front surface of the semiconductor substrate.
14. The image sensor device as claimed in claim 1 , further comprising:
an anti-reflection coating layer formed over the back surface of the semiconductor substrate;
a buffer layer formed over the anti-reflection coating layer; and
a reflective grid formed over the buffer layer, wherein the reflective grid includes at least one reflective element, and a first width of the reflective element is greater than both of a second width of the conductive light reflection structure and a third width of the light absorption structure.
15. The image sensor device as claimed in claim 14 , further comprising:
a dielectric layer formed over the buffer layer to cover the reflective grid, wherein the dielectric layer has at least one recess;
at least one color filter formed in the at least one recess; and
at least one lens formed over the at least one color filter.
16. The image sensor device as claimed in claim 1 , further comprising an isolation structure formed adjacent to the front surface of the semiconductor substrate, wherein the at least one light-blocking structure is adjacent to the back surface, and the isolation structure is directly below the conductive light reflection structure.
17. The image sensor device of claim 16 , wherein a portion of the semiconductor substrate is between the isolation structure and the conductive light reflection structure, and the conductive light reflection structure is thicker than the isolation structure.
18. An image sensor device, comprising:
a semiconductor substrate comprising a front surface, a back surface opposite to the front surface, at least one light-sensing region close to the front surface, and at least one trench adjacent to the at least one light-sensing region, wherein the at least one trench has a depth;
at least one light-blocking structure positioned in the at least one trench, wherein the at least one light-blocking structure comprises:
a conductive light reflection structure, wherein a first ratio of a thickness of the conductive light reflection structure to the depth ranges from about 70% to about 90%; and
a light absorption structure positioned above the conductive light reflection structure, wherein a second ratio of a thickness of the light absorption structure to the depth ranges from about 10% to about 30%;
an insulating layer covering the back surface and continuously extending into the at least one trench to electrically isolate the conductive light reflection structure and the light absorption structure from the semiconductor substrate, wherein the insulating layer, the light absorption structure and the conductive light reflection structure are respectively made of different materials, and a surface of the light absorption structure and a topmost surface of the insulating layer covering the back surface are substantially coplanar; and
an isolation structure formed adjacent to the front surface of the semiconductor substrate, wherein the at least one light-blocking structure is adjacent to the back surface, the isolation structure is directly below the conductive light reflection structure, and a first maximum thickness of the conductive light reflection structure is greater than a second maximum thickness of the isolation structure.
19. The image sensor device as claimed in claim 1 , further comprising:
an anti-reflection coating layer over and in direct contact with the topmost surface of the light absorption structure and the topmost surface of the insulating layer covering the back surface.
20. The image sensor device as claimed in claim 17 , further comprising:
a reflective grid formed over the at least one light-blocking structure, wherein the reflective grid includes at least one reflective element, and the at least one reflective element, the light absorption structure, the conductive light reflection structure, and the isolation structure are aligned with each other and arranged along a straight line.