Fabrication method for organic EL device
The fabrication method for an organic EL device according to the invention includes: forming a third insulating layer on a first insulating layer; removing the third insulating layer in a first pixel region by etching the third insulating layer; forming a second insulating layer that has different thicknesses in a first pixel and a second pixel and has a flat first surface by forming a precursor insulating layer to continuously cover a first reflection film and a second reflection film and then planarizing an upper surface of the precursor insulating layer; and forming a first pixel electrode and a second pixel electrode on the first surface of the second insulating layer. The first insulating layer is slower in the rate at which the layer is removed by etching than the third insulating layer.
1. A fabrication method for an organic EL device including
a first pixel having a first insulating layer, a first reflection film provided on the first insulating layer, a second insulating layer provided on the first reflection film, a first pixel electrode provided on the second insulating layer, a first light-emitting layer provided on the first pixel electrode, and a first counter electrode provided on the first light-emitting layer, first-color light being resonated between the first reflection film and the first counter electrode, and
a second pixel having the first insulating layer, a third insulating layer provided on the first insulating layer, a second reflection film provided on the third insulating layer, the second insulating layer provided on the second reflection film, a second pixel electrode provided on the second insulating layer, a second light-emitting layer provided on the second pixel electrode, and a second counter electrode provided on the second light-emitting layer, second-color light being resonated between the second reflection film and the second counter electrode,
the method comprising:
forming the third insulating layer on the first insulating layer;
removing the third insulating layer in a first pixel region by etching the third insulating layer;
forming the second insulating layer that has different thicknesses in the first pixel and the second pixel and has a flat first surface by forming a precursor insulating layer to continuously cover the first reflection film and the second reflection film and then planarizing an upper surface of the precursor insulating layer; and
forming the first pixel electrode and the second pixel electrode on the first surface of the second insulating layer,
wherein the first insulating layer is slower in the rate at which the layer is removed by the etching than the third insulating layer.
2. The fabrication method according to claim 1 , wherein the first reflection film and the second reflection film are formed integrally.
3. The fabrication method according to claim 1 , wherein, in forming the second insulating layer,
forming a precursor insulating layer includes forming a fourth insulating layer on the first reflection film and the second reflection film and forming a fifth insulating layer on the fourth insulating layer,
planarizing the upper surface includes removing the fifth insulating layer in a second pixel region by subjecting the fifth insulating layer to chemical mechanical polishing processing, and
the fourth insulating layer is slower in the rate at which the layer is removed by the chemical mechanical polishing processing than the fifth insulating layer.
4. The fabrication method according to claim 3 , wherein the fourth insulating layer is made of silicon nitride, and the fifth insulating layer is made of silicon oxide.
5. The fabrication method according to claim 1 , wherein the first insulating layer is made of silicon nitride, and the third insulating layer is made of silicon oxide.