MEMS apparatus
A MEMS apparatus includes a pillar, a supporter, and a solder. The pillar has a first side and a second side opposite to the first side. The supporter supports the pillar. The supporter is adjacent to the pillar, but the supporter is not connected to the pillar. The supporter has a third side and a fourth side opposite to the third side. The supporter includes a plurality of first confined layers and a plurality of second confined layers. These first confined layers and these second confined layers are overlapped with each other. The second side and the third side are adjacent to each other. The solder is located between the second side and the third side. The solder is also located at the first side and the fourth side. The solder is utilized to combine the pillar and the supporter. The solder also isolates the pillar and the supporter.
1. A micro-electromechanical system (MEMS) apparatus, comprising:
a pillar, having a first side and a second side opposite to the first side;
a supporter, having a third side and a fourth side opposite to the third side adjacent to the second side, comprising a plurality of first binding layers and a plurality of second binding layers respectively overlapping the first binding layers, and configured to support the pillar which is adjacent to but does not connect to the supporter; and
a solder, located between the second side and the third side and between the first side and the fourth side, and configured to contact with and separate the pillar and the supporter.
2. The MEMS apparatus according to claim 1 , wherein the pillar comprises a plurality of metal layers and a plurality of oxide layers respectively overlapping the plurality of metal layers.
3. The MEMS apparatus according to claim 1 , wherein the plurality of first binding layers is metallic, and the plurality of second binding layers is made of tungsten.
4. The MEMS apparatus according to claim 1 , wherein the solder is oxide.
5. The MEMS apparatus according to claim 2 , wherein the pillar is a fork-shaped electrode or a spring beam.