IP Library Granted Patent US 10,418,222
Granted Patent B2
US 10,418,222 · App. 14/204,810 · Granted Sep 17, 2019

Transmission type target, radiation generating tube including the same, radiation generating apparatus, and radiography system

Inventors: Shuji Yamada (Atsugi, JP); Tatsuya Suzuki (Kawasaki, JP); Takeo Tsukamoto (Kawasaki, JP); Yoichi Ikarashi (Fujisawa, JP); Tadayuki Yoshitake (Tokyo, JP); Takao Ogura (Yokohama, JP)
Assignee: Canon Kabushiki Kaisha
H01J35/18H01J35/08H01J2235/084H01J2235/087
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Quick Facts
Patent No.
US 10,418,222
App. No.
14/204,810
Granted
Sep 17, 2019
Kind
B2
Abstract

A radiation emitting target, a radiation generating device, and a radiography system are provided in which adhesion between a target layer and a diamond substrate is improved and stable radiation emitting properties are exhibited. A transmission type target includes a target layer, a carbon-containing region including sp2 bonds, and a diamond substrate that supports the target layer. The carbon-containing region is positioned between the target layer and the diamond substrate.

Claims (9)

1. A method for producing a transmission type target, the method comprising:

a target layer formation step of forming a target layer configured to generate an X-ray upon irradiation with electrons; and

a sp2 bond formation step of forming a carbon-containing region comprising sp2 bonds in a diamond substrate, wherein the carbon-containing region is formed from a part of diamond in the diamond substrate, wherein the carbon-containing region is between the target layer and regions of the diamond substrate that are not the carbon-containing region,

wherein the target layer formation step includes a step of forming a metal layer on one surface of the diamond substrate, the metal layer comprising a target metal, and

the sp2 bond formation step includes a heating step of heating at least the diamond substrate so as to convert at least some of sp3 bonds contained in the surface of the diamond substrate into sp2 bonds, and

wherein the heating step is performed before the step of forming a metal layer.

2. The method according to claim 1 , wherein the heating step is performed under a vacuum environment or an inert gas atmosphere.

3. The method according to claim 1 , wherein the heating step is performed at a temperature of 650° C. or higher and 2000° C. or lower.

4. The method according to claim 1 , wherein the sp2 bond formation step is performed by forming a carbon-containing layer comprising sp2 bonds on one surface of the diamond substrate.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 8, 2014
From: YAMADA, SHUJI; SUZUKI, TATSUYA; TSUKAMOTO, TAKEO; IKARASHI, YOICHI; YOSHITAKE, TADAYUKI; OGURA, TAKAO
To: CANON KABUSHIKI KAISHA
Reel/Frame 033053/0051 →
Priority Claims (1)
JP 2013-049350 · Mar 12, 2013 · national
Continuity (1)
Related Publication 20190252150A1 · Aug 15, 2019
Cited By (2)
US 12,288,662 US 12,488,956