Semiconductor device including cooler
A semiconductor device includes a package and a cooler. The semiconductor package includes a semiconductor element, a metal member, and a molding member for encapsulating the semiconductor element and the metal member. The metal member has a metal portion thermally connected to the semiconductor element, an insulating layer on the metal portion, and a conducting layer on the insulating layer. The conducting layer is at least partially exposed outside the molding member and serves as a radiation surface for radiating heat of the semiconductor element. The cooler has a coolant passage through which a coolant circulates to cool the conducting layer. The conducting layer and the cooler are electrically connected together.
1. A semiconductor device comprising:
a semiconductor package including a semiconductor element, a metal member, and a molding member for encapsulating the semiconductor element and the metal member therein, the metal member having a metal portion thermally connected to the semiconductor element, an electrically insulating layer on the metal portion, and an electrically conducting layer on the insulating layer, the conducting layer at least partially exposed outside the molding member and serving as a radiation surface for radiating heat of the semiconductor element;
a viscous member having both a heat conductivity and a viscosity; and
a cooler having a coolant passage through which a coolant circulates, wherein
the coolant cools the conducting layer and absorbs the heat of the semiconductor element,
the conducting layer and the cooler are electrically connected together, and
a clearance between the radiation surface of the semiconductor package and the cooler is filled with the viscous member so that the radiation surface is in contact with the cooler through the viscous member, wherein
the viscous member includes an electrically insulating grease and an electrically conducting grease,
the conducting grease is surrounded by the insulating grease,
the conducting layer and the cooler are in contact with each other through both the insulating grease and the conducting grease, and
the conducting layer and the cooler are electrically connected together through the conducting grease.
2. The semiconductor device according to claim 1 , wherein
at least one of the semiconductor package and the cooler has a groove surrounding the periphery of the conducting grease, and
the groove prevents or reduces a spread of the conducting grease over the groove.