Magnetic memory and method of manufacturing the same
View Patent ↗A magnetic memory according to an embodiment includes: at least one memory cell comprising a magnetoresistive element as a memory element, and first and second electrodes that energize the magnetoresistive element. The magnetoresistive element includes: a first magnetic layer having a variable magnetization direction perpendicular to a film plane; a tunnel barrier layer on the first magnetic layer; and a second magnetic layer on the tunnel barrier layer, and having a fixed magnetization direction perpendicular to the film plane. The first magnetic layer including: a first region; and a second region outside the first region so as to surround the first region, and having a smaller perpendicular magnetic anisotropy energy than that of the first region. The second magnetic layer including: a third region; and a fourth region outside the third region, and having a smaller perpendicular magnetic anisotropy energy than that of the third region.
1. A method of manufacturing a magnetic memory, comprising:
forming a stack film on a substrate, the stack film comprising: a first magnetic layer; an insulating layer formed on the first magnetic layer; and a second magnetic layer formed on the insulating layer;
forming a conductive layer on the stack film;
performing a patterning of an area that is not covered by the conductive layer; and
performing an implantation of an impurity into the area after the patterning,
wherein the first magnetic layer has a size of a magnetically- and electrically-active area smaller than a size of a magnetically- and electrically-active area of the second magnetic layer in a first direction perpendicular to a second direction in which the first magnetic layer, the insulating layer and the second magnetic layer are stacked, after the implantation.
2. The method of claim 1 , wherein the patterning is performed by using an ion beam etching.
3. The method of claim 1 , wherein the impurity is at least one of N, He, F, O, Si, B, C, Zr, Tb, and Ti.
4. The method of claim 1 , wherein the first magnetic layer has a mean size larger than a mean size of the second magnetic layer in the first direction, after the patterning and before the implantation.
5. The method of claim 1 , wherein the patterning and the implantation are performed as different processes.