Semiconductor device and fabricating method thereof
A semiconductor device and a method of fabricating the semiconductor device are provided. The semiconductor device includes a substrate; a source/drain region having a first dopant in the substrate; a barrier layer having a second dopant formed around the source/drain region in the substrate. When a semiconductor device is scaled down, the doped profile in source/drain regions might affect the threshold voltage uniformity, the provided semiconductor device may improve the threshold voltage uniformity by the barrier layer to control the doped profile.
1. A semiconductor device comprising:
a substrate having a top surface;
a gate structure disposed on the top surface of the substrate, wherein the gate structure includes spacers flanking from both sides;
a pair of source/drain regions disposed respectively next to the spacers in the substrate and each having a first dopant, wherein a channel region is defined between the source/drain regions, and wherein the first dopant is boron, phosphorous or arsenic, and a dosage of the first dopant is in a range from about 1×10 20 cm −3 to about 9×10 20 cm −3 ;
a pair of diamond-shaped epitaxial barrier layers each having SiGe and a second dopant in the substrate, wherein each of the epitaxial barrier layers is formed around one of the source/drain regions, each of the epitaxial barrier layers comprising:
a bottom facet;
a pair of lower sidewall facets extending outwardly from the bottom facet; and
a pair of upper sidewall facets extending inwardly from the pair of the lower sidewall facets,
wherein an innermost one of the upper sidewall facets, an adjacent one of the spacers and the corresponding source/drain region form a vertex at the top surface, the second dopant is carbon or nitrogen, and a carbon concentration of the epitaxial barrier layer is in a range from about 10 11 cm −3 to about 10 14 cm −3 and a nitrogen concentration of the epitaxial barrier layer is in a range from about 10 15 cm −3 to about 10 19 cm −3 ; and
a pair of contact layers each having a third dopant, wherein the contact layers are disposed on top portions of the source/drain regions, respectively, wherein the third dopant is boron or phosphorous or arsenic.
2. The semiconductor device of claim 1 , wherein each of the epitaxial barrier layers forms a diamond shape immediately surrounding the corresponding source/drain region.
3. The semiconductor device of claim 1 , wherein the contact layers conform to the top portions of the source/drain regions, respectively.
4. The semiconductor device of claim 1 , wherein the top portions of the source/drain regions are higher than the top surface of the substrate.