Charged particle beam apparatus
View Patent ↗A charged particle beam apparatus is provided with a parameter adjustment practice function for allowing any user to easily learn manual focus adjustment and stigma adjustment. Control conditions of the focus arrangement of an objective lens, an X-stigmator and a Y-stigmator are set according to the user's operation. According to a group of the focus adjustment, an X-stigma adjustment and a Y-stigma adjustment which are set, a practice-purpose image corresponding to the control conditions is read out from a storage device and is displayed on a screen.
1. A charged particle beam apparatus which requires a focus adjustment and a stigma adjustment when observing a sample, comprising:
a lens system that focuses a charged particle beam on the sample;
an X-stigmator that adjusts an X-stigma;
a Y-stigmator that adjusts a Y-stigma;
a control unit that controls a focus adjustment of the lens system, an X-stigma adjustment of the X-stigmator and a Y-stigma adjustment of the Y-stigmator;
a storage unit that stores a practice-purpose image corresponding to each group of the focus adjustment, the X-stigma adjustment and the Y-stigma adjustment which are determined in advance;
an operation unit that sets the focus adjustment, the X-stigma adjustment and the Y-stigma adjustment according to a user's operation;
a display unit that displays the practice-purpose image read out from the storage unit corresponding to the group of the focus adjustment, the X-stigma adjustment and the Y-stigma adjustment which are set by the operation unit; and
an evaluation unit that evaluates deviation from an optimum condition by comparing a predetermined set of optimum parameters with the focus adjustment, the X-stigma adjustment and the Y-stigma adjustment which are set by the user's operation.
2. The charged particle beam apparatus according to claim 1 ,
wherein with regard to the focus adjustment, the X-stigma adjustment and the Y-stigma adjustment, a sequence of the adjustments is designated.
3. The charged particle beam apparatus according to claim 2 ,
wherein the sequence of the adjustments is designated such that the focus adjustment is performed prior to the X-stigma adjustment and the Y-stigma adjustment.
4. The charged particle beam apparatus according to claim 1 , further comprising:
a memory that can read an image faster than the storage unit,
wherein the memory reads a plurality of the practice-purpose images out from the storage unit, and
wherein the practice-purpose image displayed by the display unit is read out via the memory.
5. The charged particle beam apparatus according to claim 1 ,
wherein a practice-purpose image in an initial state which is displayed on the display unit before a user's adjustment is selected according to a degree of adjustment difficulty in the focus adjustment, the X-stigma adjustment and the Y-stigma adjustment.
6. The charged particle beam apparatus according to claim 1 ,
wherein the practice-purpose image displayed when a user determines that the adjustment is completed is displayed in comparison with an image having optimum values of the focus adjustment, the X-stigma adjustment and the Y-stigma adjustment which are determined in advance.
7. A charged particle beam apparatus which requires a focus adjustment and a stigma adjustment when observing a sample, comprising:
a lens system that focuses a charged particle beam on the sample;
an X-stigmator that adjusts an X-stigma;
a Y-stigmator that adjusts a Y-stigma;
a control unit that controls a focus adjustment of the lens system, an X-stigma adjustment of the X-stigmator and a Y-stigma adjustment of the Y-stigmator;
a storage unit that stores a practice-purpose image corresponding to each group of the focus adjustment, the X-stigma adjustment and the Y-stigma adjustment which are determined in advance;
an operation unit that sets the focus adjustment, the X-stigma adjustment and the Y-stigma adjustment according to a user's operation;
a display unit that displays the practice-purpose image read out from the storage unit corresponding to the group of the focus adjustment, the X-stigma adjustment and the Y-stigma adjustment which are set by the operation unit; and
a memory that can read an image faster than the storage unit,
wherein the memory reads a plurality of the practice-purpose images out from the storage unit, and
wherein the practice-purpose image displayed by the display unit is read out via the memory.
8. A charged particle beam apparatus which requires a focus adjustment and a stigma adjustment when observing a sample, comprising:
a lens system that focuses a charged particle beam on the sample;
an X-stigmator that adjusts an X-stigma;
a Y-stigmator that adjusts a Y-stigma;
a control unit that controls the focus adjustment of the lens system, an X-stigma adjustment of the X-stigmator and a Y-stigma adjustment of the Y-stigmator;
a storage unit that stores a practice-purpose image corresponding to each group of the focus adjustment, the X-stigma adjustment and the Y-stigma adjustment which are determined in advance;
an operation unit that sets the focus adjustment, the X-stigma adjustment and the Y-stigma adjustment according to a user's operation; and
a display unit that displays the practice-purpose image read out from the storage unit corresponding to the group of the focus adjustment, the X-stigma adjustment and the Y-stigma adjustment which are set by the operation unit,
wherein the practice-purpose image displayed when a user determines that the adjustment is completed is displayed in comparison with an image having optimum values of the focus adjustment, the X-stigma adjustment and the Y-stigma adjustment which are determined in advance.