Nanopore-based analysis device

1. A biological polymer analyzing apparatus to measure tunneling current comprising:

a chamber having a sample introduction section and a sample outflow section separated by a substrate;

a first electrode disposed in the sample introduction section;

a second electrode disposed in the sample outflow section;

a membrane disposed on the substrate;

a nanopore disposed in the membrane of the substrate to communicate between the sample introduction section and the sample outflow section;

a third electrode disposed over the membrane and which completely surrounds a circumference of the nanopore;

an insulating layer disposed on the third electrode and facing a side of the sample introduction section and which defines a space which exposes an upper surface of the third electrode around the nanopore to the sample introduction section; and

a pair of tunneling current measuring electrodes disposed on sides of the nanopore between the third electrode and the substrate; and

wherein the pair of tunneling current measuring electrodes are disposed facing each other with the nanopore sandwiched therebetween,

wherein the third electrode is separated from the first electrode and the second electrode, and

wherein the third electrode is separated from the pair of tunneling current measuring electrodes.

2. The biological polymer analyzing apparatus according to claim 1 , further comprising:

an ammeter configured to measure a current between the pair of tunneling current measuring electrodes.

3. The biological polymer analyzing apparatus according to claim 2 , wherein the pair of tunneling current measuring electrodes are provided near an opening of the nanopore or in the membrane.

4. The biological polymer analyzing apparatus according to claim 1 , wherein the nanopore has a diameter of 1 nm to 100 nm at the minimum diameter part.

5. The biological polymer analyzing apparatus according to claim 1 , wherein a voltage applied between the third electrode and the second electrode is switched between plural values.

6. The biological polymer analyzing apparatus according to claim 1 , wherein the third electrode is disposed to completely surround the circumference of the nanopore on a side of the sample introduction section,

wherein the exposed upper surface of the third electrode includes a plurality of concentric rings, and

wherein the space which exposes the upper surface of the third electrode is larger than an opening of the nanopore in a plan view.

7. The biological polymer analyzing apparatus according to claim 1 , wherein the third electrode covers a whole surface of the membrane except for an opening of the nanopore.

8. The biological polymer analyzing apparatus according to claim 1 , wherein the third electrode comprises two or more electrodes disposed in a multiple array and/or a multilayer, and

wherein the two or more electrodes of the third electrode are disposed at positions facing each other with the nanopore therebetween.

9. A biological polymer analyzing apparatus to measure tunneling current comprising:

a plurality of chambers, where each of the chambers respectively includes:

a substrate separating the respective chamber into a sample introduction section and a sample outflow section;

a first electrode disposed in the sample introduction section;

a second electrode disposed in the sample outflow section;

a membrane disposed on the substrate;

a nanopore disposed in the membrane of the substrate to communicate between the sample introduction section and the sample outflow section;

a third electrode disposed over the membrane and which completely surrounds a circumference of the nanopore;

an insulating layer disposed on the third electrode and facing a side of the sample introduction section and which defines a space which exposes an upper surface of the third electrode around the nanopore to the sample introduction section;

a pair of tunneling current measuring electrodes disposed on sides of the nanopore between the third electrode and the substrate;

wherein the pair of tunneling current measuring electrodes are disposed facing each other with the nanopore sandwiched therebetween,

wherein the third electrode is separated from the first electrode and the second electrode in the respective chamber, and

wherein the third electrode is separated from the pair of tunneling current measuring electrodes.

10. The biological polymer analyzing apparatus according to claim 9 , further comprising:

an ammeter configured to measure a current between the pair of tunneling current measuring electrodes.

11. The biological polymer analyzing apparatus according to claim 9 , wherein the nanopore has a diameter of 1 nm to 100 nm at the minimum diameter part.

12. The biological polymer analyzing apparatus according to claim 9 , wherein a voltage applied between the third electrode and the second electrode is switched between plural values.

13. The biological polymer analyzing apparatus according to claim 9 , wherein the third electrode is disposed to completely surround the circumference of the nanopore on a side of the sample introduction section,

wherein the exposed upper surface of the third electrode includes a plurality of concentric rings, and

wherein the space which exposes the upper surface of the third electrode is larger than an opening of the nanopore in a plan view.

14. The biological polymer analyzing apparatus according to claim 9 , wherein the third electrode covers a whole surface of the membrane except for an opening of the nanopore, and

wherein the space which exposes the upper surface of the third electrode is larger than the opening of the nanopore in a plan view.