Electric field discharge-type electron source
View Patent ↗Increasing the volume or weight of zirconia which is a diffusion and supply source, to extend the life of a field-emission type electron source causes a problem that the diffusion and supply source itself or a tungsten needle is easily subjected to damage. As another problem, although it is considered to form the diffusion and supply source using a thin film to avoid the above-described problem, it is difficult to stably obtain practical life exceeding 8,000 hours. It has been found that practical life exceeding 8,000 hours is stably obtained by providing a field-emission type electron source that has no chips or cracks in a diffusion and supply source and that can extend life with a little bit of an increase in the amount of the diffusion and supply source.
1. A field-emission type electron source comprising: a needle obtained by sharpening one of tips of a rod-like single-crystal tungsten, and having zirconia formed to a predetermined thickness and a predetermined length on a side outer portion thereof as a diffusion and supply source, the one of the tips having a crystal plane (100); heating means for the needle; and a suppressor electrode, wherein
in the field-emission type electron source that allows electrons to be emitted by heating the needle to apply an electric field to the tip of the needle, when a length of the diffusion and supply source is L and a maximum thickness of the diffusion and supply source is t, t/L<3/50, and the thickness of the diffusion and supply source is in a range greater than or equal to 10 μm.
2. The field-emission type electron source according to claim 1 , comprising one or a plurality of diffusion and supply sources with a length L of 500 μm or more.
3. The field-emission type electron source according to claim 1 , wherein the maximum thickness t of the diffusion and supply source is 40 μm or less.
4. The field-emission type electron source according to claim 1 , wherein the diffusion and supply source is formed in a direction going toward an other tip of the needle, from a position 300 μm away from the tip of the needle.
5. The field-emission type electron source according to claim 1 , wherein a plurality of diffusion and supply sources with a length of less than 500 μm are connected to each other, and space between the connected diffusion and supply sources is 50 μm or less, a cross-sectional form of the diffusion and supply sources being a projection-like form with a maximum thickness t of 40 μm or less.
6. The field-emission type electron source according to claim 1 , wherein a plurality of diffusion and supply sources are connected to each other, and a minimum thickness of the diffusion and supply sources at the connected portion is 10 μm or more, a cross-sectional form of the diffusion and supply sources being projection-like and having a maximum thickness t of 40 μm or less.
7. The field-emission type electron source according to claim 1 , wherein a plurality of diffusion and supply sources are wound around the side outer portion of the needle in spiral form, and space between the adjacent wound diffusion and supply sources is 50 μm or less, a cross-sectional form of the diffusion and supply sources being projection-like and having a maximum thickness t of 40 μm or less.
8. The field-emission type electron source according to claim 1 , wherein a plurality of diffusion and supply sources having a linear form with a length of 500 μm or more are disposed on the side outer portion of the needle, and space between the adjacent diffusion and supply sources is 50 μm or less, a cross-sectional form of the diffusion and supply sources being projection-like and having a maximum thickness of 40 μm or less.
9. The field-emission type electron source according to claim 1 , wherein a plurality of diffusion and supply sources having a linear form with a length of 500 μm or more are disposed on the side outer portion of the needle, and a minimum thickness of the adjacent diffusion and supply sources is 10 μm or more, a cross-sectional form of the diffusion and supply sources being projection-like and having a maximum thickness of 40 μm or less.
10. The field-emission type electron source according to claim 1 , wherein a plurality of diffusion and supply sources are disposed on the side outer portion of the needle, and space between the plurality of dense diffusion and supply sources is 50 μm or less, a cross-sectional form of the diffusion and supply sources being projection-like and mountain-shaped and having a maximum thickness of 40 μm or less.