Merged legs and semi-flexible anchoring having cantilevers for MEMS device
The present invention generally relates to a MEMS device having a plurality of cantilevers that are coupled together in an anchor region and/or by legs that are coupled in a center area of the cantilever. The legs ensure that each cantilever can move/release from above the RF electrode at the same voltage. The anchor region coupling matches the mechanical stiffness in all sections of the cantilever so that all of the cantilevers move together.
1. A MEMS device, comprising:
a first cantilever having a first end and a second end opposite the first end, the first end and the second end defining a length of the first cantilever;
a second cantilever having a first end and a second end opposite the first end, the first end and the second end defining a length of the second cantilever; and
one or more legs coupled to both the first cantilever and the second cantilever, the one or more legs also coupled to a first anchor area that is spaced from both the first cantilever and the second cantilever,
wherein both the first cantilever and the second cantilever are disposed over a radio frequency (RF) electrode, a second electrode, and a third electrode,
wherein the first end of the first cantilever and the first end of the second cantilever are disposed over the second electrode and the second end of the first cantilever and the second end of the second cantilever are disposed over the third electrode,
wherein at least one of the one or more legs extend perpendicular to the RF electrode,
wherein the one or more legs comprise a first leg and a second leg extending between the first cantilever and the second cantilever,
wherein the first leg is parallel to and spaced from the second leg, and a third leg extending from the first leg to the first anchor area,
wherein the first leg and the second leg are parallel to the RF electrode and the third leg is perpendicular to the RF electrode, and
wherein a fourth leg extends perpendicular from the second leg to a second anchor area, the second anchor area being spaced from the first anchor area by a distance greater than the length of the first cantilever.
2. The MEMS device of claim 1 , wherein the first anchor area and the second anchor area have a plurality of slots extending therethrough.
3. The MEMS device of claim 2 , wherein the first anchor area and the second anchor area each comprise one or more links adjacent a corresponding slot.
4. The MEMS device of claim 3 , wherein the first anchor area and the second anchor area each further comprise one or more end stiffening stubs.
5. The MEMS device of claim 4 , wherein the end stiffening stubs extend parallel to the first leg and have a length that is greater than the links.
6. The MEMS device of claim 5 , wherein the links have a first length extending in a direction parallel to the third leg and wherein the first anchor area and the second anchor area each further comprise one or more extended links that extend in the direction parallel to the third leg and have a second length greater than the first length.
7. The MEMS device of claim 6 , wherein a slot is present between adjacent end stiffening stubs.
8. The MEMS device of claim 7 , wherein the first leg is disposed over the RF electrode.
9. The MEMS device of claim 7 , wherein the first leg is disposed above the second electrode.