Replacement conductive hard mask for multi-step magnetic tunnel junction (MTJ) etch
A multi-step etch technique for fabricating a magnetic tunnel junction (MTJ) apparatus includes forming a first conductive hard mask on a first electrode of the MTJ apparatus for etching the first electrode during a first etching step. The method also includes forming a second conductive hard mask on the first conductive hard mask for etching magnetic layers of the MTJ apparatus during a second etching step. A spacer layer is conformally deposited on sidewalls of the first conductive hard mask. The second conductive hard mask is deposited on the first conductive hard mask and aligned with the spacer layer on the sidewalls of the first conductive hard mask.
1. An MTJ apparatus, comprising:
a first conductive hard mask on a second electrode layer, the second electrode layer on a stack of MTJ layers and electrically coupled to the stack of MTJ layers;
a first spacer on sidewalls of the first conductive hard mask, sidewalls of the second electrode layer, and a surface of the stack of MTJ layers; and
a second conductive hard mask aligned with sidewalls of the first spacer, the second conductive hard mask on the first conductive hard mask, and the first spacer, in which the second conductive hard mask is arranged to overlap the first conductive hard mask and the second electrode layer and in which lateral dimensions of the stack of MTJ layers are aligned with lateral dimensions of the second conductive hard mask.
2. The MTJ apparatus of claim 1 , in which the second conductive hard mask is electrically coupled to the first conductive hard mask.
3. The MTJ apparatus of claim 1 , in which the second conductive hard mask is a material in the group consisting of tantalum, hafnium, and platinum.
4. The MTJ apparatus of claim 1 , in which the first spacer is between 10 nanometers and 50 nanometers in thickness.
5. The MTJ apparatus of claim 1 , in which a first dielectric layer on the first spacer is a SiNx material.
6. The MTJ apparatus of claim 1 , further comprising a first electrode layer electrically coupled to the stack of MTJ layers.
7. The MTJ apparatus of claim 6 , further comprising a second spacer on the first electrode layer and on the second conductive hard mask.
8. The MTJ apparatus of claim 7 , further comprising the second spacer on sidewalls of the stack of MTJ layers, on sidewalls of the first spacer and on sidewalls of the second conductive hard mask.
9. The MTJ apparatus of claim 7 , further comprising a second dielectric layer on the second spacer.
10. The MTJ apparatus of claim 9 , further comprising a conductive interconnect extending through the second spacer and the second dielectric layer and electrically coupled to the second conductive hard mask.
11. The MTJ apparatus of claim 1 integrated into a mobile phone, a set top box, a music player, a video player, an entertainment unit, a navigation device, a computer, a hand-held personal communication systems (PCS) unit, a portable data unit, and/or a fixed location data unit.
12. An MTJ apparatus, comprising:
first means for masking a first electrode layer that is coupled to a stack of MTJ layers and for providing a conductive path to the first electrode layer, the first masking means abutting the first electrode layer;
means for protecting sidewalls of the first means, the protecting means abutting the sidewalls of first means, sidewalls of the first electrode layer, and a surface of the stack of MTJ layers; and
second means for masking the stack of MTJ magnetic layers and for electrically coupling to the first conductive path, the second means aligned with sidewalls of the first means and abutting a surface of the first means, in which the second means is arranged to overlap the first means and the second electrode layer and in which lateral dimensions of the stack of MTJ layers are aligned with lateral dimensions of the second means.
13. The MTJ apparatus of claim 12 integrated into a mobile phone, a set top box, a music player, a video player, an entertainment unit, a navigation device, a computer, a hand-held personal communication systems (PCS) unit, a portable data unit, and/or a fixed location data unit.