Lead frame support plate and window clamp for wire bonding machines
A lead frame support plate 200 and a window clamp 400 for wire bonding machines are disclosed herein. In a described embodiment, the lead frame support plate 200 includes a network of suction grooves 218 provided on a support surface 212 , each suction groove 218 being arranged to be in fluid communication with at least a vacuum hole 216 to enable a suction force to be created, in response to a vacuum force, along the network of suction grooves for holding a lead frame against the support surface. A window clamp 400 having slots for compensating deformation of the window clamp and a method of fabricating the lead frame support plate are also disclosed.
1. A window clamp for a wire bonding machine, the window clamp comprising:
an array of wire bonding windows having corresponding apertures configured to register with respective semiconductor dies, the array of wire bonding windows having two furthermost windows along a longitudinal axis; and
a pair of slots disposed on each side of the array, each slot having an elongate portion defined by a first end and a second end, the first and the second ends extending at least between the apertures of the two furthermost windows,
wherein each slot further comprises arm portions extending respectively from the first and second ends, and the arm portions are generally orthogonal to the elongate portion.
2. A window clamp according to claim 1 , wherein the first and second ends extend to farthest edges of the apertures of the two furthermost windows.
3. A window clamp according to claim 1 , wherein the array of wire bonding windows includes a plurality of rows of windows, and wherein a first row and a last row of the plurality of rows respectively includes the two furthermost windows.
4. A window clamp according to claim 1 , wherein the apertures and the corresponding wire bonding windows are the same size.
5. A window clamp according to claim 1 , wherein the size of the wire bonding windows is greater than the corresponding apertures.
6. A wire bonding machine comprising a window clamp of claim 1 .
7. A window clamp for a wire bonding machine, comprising
an array of wire bonding windows having corresponding apertures configured to register with respective semiconductor dies, the array of wire bonding windows comprising two furthermost windows along a longitudinal axis; and
a pair of slots disposed on each side of the array, each slot having an elongate portion defined by a first end and a second end, the first and the second ends extending at least between the apertures of the two furthermost windows,
wherein each slot is generally C-shaped with arm portions extending respectively from the first and second ends and generally orthogonal to the elongate portion.