IP Library Granted Patent US 9,362,374
Granted Patent B2
US 9,362,374 · App. 14/253,878 · Granted Jun 7, 2016

Simple and cost-free MTP structure

Inventors: Shyue Seng Tan (Singapore, SG); Eng Huat Toh (Singapore, SG); Jeoung Mo Koo (Singapore, SG); Danny Shum (Poughkeepsie, NY); Elgin Kiok Boone Quek (Singapore, SG)
Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
H01L29/42324G11C16/0425H01L27/11558H01L29/7881H01L29/7883H01L29/7885
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Quick Facts
Patent No.
US 9,362,374
App. No.
14/253,878
Granted
Jun 7, 2016
Kind
B2
Abstract

Embodiments of a simple and cost-free multi-time programmable (MTP) structure for non-volatile memory cells are presented. A non-volatile MTP memory cell includes a substrate, first and second wells disposed in the substrate, a first transistor having a select gate and a second transistor having a floating gate adjacent one another and disposed over the second well and sharing a diffusion region. The memory cell further includes a control gate disposed over the first well. The control gate is coupled to the floating gate and the control and floating gates include the same gate layer extending across the first and the second wells.

Claims (46)

1. A non-volatile (NV) multi-time programmable (MTP) memory cell comprising:

a substrate;

first and second wells disposed in the substrate;

a first transistor having a select gate and a second transistor having a floating gate adjacent one another and disposed over the second well, wherein the first and second transistors are coupled in series and share a common diffusion region; and

a control gate disposed over the first well, wherein the control gate is coupled to the floating gate and the control and floating gates comprise the same gate layer extending across the first and the second wells; and

at least one well contact region disposed in the first well and adjacent to the control gate, wherein the well contact region couples the first well to a control gate line (CGL) and is biased at a bias potential during various operations of the memory cell.

2. The memory cell of claim 1 wherein the first well is of a first polarity type and the second well is of a second polarity type different from the first polarity type.

3. The memory cell of claim 2 , wherein the first well is an n-type well and the second well is a p-type well, wherein each of the floating gate and the select gate comprises an n-type metal-oxide-semiconductor (NMOS), and wherein the control gate comprises an n-type capacitor.

4. The memory cell of claim 3 , wherein the memory cell is programmable by Fowler-Nordheim (FN) tunneling effect.

5. The memory cell of claim 3 , wherein the memory cell is erasable by FN tunneling effect.

6. A non-volatile (NV) multi-time programmable (MTP) memory cell comprising:

a substrate;

first and second wells disposed in the substrate, wherein the first well is an n-type well and the second well is a p-type well;

a first transistor having a select gate and a second transistor having a floating gate adjacent one another and disposed over the second well and sharing a common diffusion region; and

a control gate disposed over the first well, wherein the control gate is coupled to the floating gate and the control and floating gates comprise the same gate layer extending across the first and the second wells, and wherein

each of the floating gate and the select gate comprises an n-type metal-oxide-semiconductor (NMOS), and the control gate comprises an n-type capacitor,

an area ratio between the control gate and the floating gate is 0.8:0.2, a ratio of width and length of the floating gate is 0.4:0.28, and a ratio of width and length of the control gate is 1.6:0.84.

7. The memory cell of claim 3 comprising a plurality of contacts surrounding the control gate, wherein the plurality of contacts are coupled to the first well of the control gate.

8. The memory cell of claim 1 wherein the first and second wells comprise the same polarity type.

9. The memory cell of claim 8 , wherein the first well is an n-type well and the second well is an n-type well, wherein each of the floating gate and the select gate comprises a p-type metal-oxide-semiconductor (PMOS), and wherein the control gate comprises a p-type capacitor.

10. The memory cell of claim 9 , wherein the floating gate is doped with p-type dopants.

11. The memory cell of claim 9 , wherein the memory cell is programmable by band-to-band tunneling induced hot electron (BTBTHE) injection.

12. The memory cell of claim 9 , wherein the memory cell is erasable by FN tunneling effect.

13. The memory cell of claim 8 , wherein the first well is an n-type well and the second well is an n-type well, wherein each of the floating gate and the select gate comprises a p-type metal-oxide-semiconductor (PMOS), and wherein the control gate comprises an n-type capacitor.

14. The memory cell of claim 13 , wherein the floating gate is doped with n-type dopants.

15. The memory cell of claim 1 comprising:

a third well disposed in the substrate; and

an erase gate disposed over the third well, wherein the control, floating and erase gates are commonly coupled and the control, floating and erase gates comprise the same gate layer extending across the first, second and third wells.

16. The memory cell of claim 15 , wherein each of the first and the third wells is a p-type well and wherein the second well is an n-type well.

17. The memory cell of claim 16 , wherein each of the floating gate and the select gate comprises a p-type metal-oxide-semiconductor (PMOS).

18. The memory cell of claim 17 , wherein each of the control gate and the erase gate comprises a p-type capacitor.

19. A non-volatile (NV) multi-time programmable (MTP) memory cell comprising:

a substrate;

first and second wells disposed in the substrate;

a first transistor having a select gate and a second transistor having a floating gate adjacent one another and disposed over the second well; and

a control gate disposed over the first well, wherein the control gate is coupled to the floating gate and the control and floating gates comprise the same gate layer extending across the first and second wells, and

wherein a ratio of width and length of the floating gate is 0.4:0.28, and wherein a ratio of width and length of the control gate is 1.6:0.84.

20. The memory cell of claim 19 comprising:

a third well disposed in the substrate; and

an erase gate disposed over the third well, wherein the control, floating and erase gates are commonly coupled.

21. The memory cell of claim 1 wherein the memory cell is configured to operate in two types of programming modes or two types of erase modes.

22. The memory cell of claim 1 wherein:

the first transistor comprises first and second diffusion regions and the second transistor comprises first and second diffusion regions;

the second diffusion regions of the first and second transistors correspond to the common diffusion region;

the first diffusion region of the first transistor is coupled to a bitline while the first diffusion region of the second transistor is coupled to a source line of the memory cell; and

the well contact region coupled to the CGL is biased at a positive programming potential (+V prog ) during programming of the memory cell.

Assignments (3)
RELEASE OF SECURITY INTEREST Recorded Nov 19, 2020
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
Reel/Frame 054481/0673 →
SECURITY AGREEMENT Recorded Nov 27, 2018
From: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
To: WILMINGTON TRUST, NATIONAL ASSOCIATION
Reel/Frame 047660/0203 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 16, 2014
From: TAN, SHYUE SENG; TOH, ENG HUAT; KOO, JEOUNG MO; SHUM, DANNY; QUEK, ELGIN KIOK BOONE
To: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
Reel/Frame 032681/0554 →
Continuity (2)
Provisional Application 61839879 · Jun 27, 2013
Related Publication 20150001608A1 · Jan 1, 2015