Resistive RAM devices and methods
View Patent ↗The present disclosure includes a high density resistive random access memory (RRAM) device, as well as methods of fabricating a high density RRAM device. One method of forming an RRAM device includes forming a resistive element having a metal-metal oxide interface. Forming the resistive element includes forming an insulative material over the first electrode, and forming a via in the insulative material. The via is conformally filled with a metal material, and the metal material is planarized to within the via. A portion of the metal material within the via is selectively treated to create a metal-metal oxide interface within the via. A second electrode is formed over the resistive element.
1. A resistive random access memory (RRAM) device, comprising:
a first electrode formed over a portion of a nitride material;
an insulative material formed over a portion of the first electrode
a metal material, including a metal-metal oxide interface, formed over the portion of the first electrode in a via through the insulative material, wherein the metal material conformally fills the via, and wherein a portion of the metal material is oxidized; and
a second electrode formed over the selectively treated portion of the metal material.
2. The RRAM device of claim 1 , wherein the first electrode is formed over the portion of a silicon nitride material.
3. The RRAM device of claim 1 , wherein:
the metal material is a copper material; and
the metal material is patterned by damascene processing.
4. The RRAM device of claim 1 , wherein:
the metal material is a copper material; and
the metal material is patterned using single damascene processing.
5. The RRAM device of claim 1 , wherein:
the metal material is a copper material; and
the metal material is patterned using dual damascene processing.
6. The RRAM device of claim 1 , wherein the first electrode includes:
a functional metal material formed over the portion of a nitride material; and
a conducting metallic material formed over the functional metal material,
wherein the functional metal material is implemented for adhesion and stress relief.
7. A resistive random access memory (RRAM) device, comprising:
a first electrode formed over a portion of a nitride material;
a resistive element formed over the first electrode, the resistive element including:
an insulative material formed over the first electrode;
a via formed in the insulative material; and
a conducting material conformally filling the via, a portion that is less than all of the conducting material having been oxidized at a temperature below which thermal oxidation occurs; and
a second electrode formed over the resistive element.
8. A resistive random access memory (RRAM) device, comprising:
an oxide material formed over a portion of a nitride material;
a first electrode formed over a different portion of the nitride material; and
a resistive element formed over the first electrode, the resistive element including:
an insulative material formed over the oxide material and the first electrode;
a via formed in the insulative material over the first electrode;
a metal material filling the via, the metal material including a metal-metal oxide interface within the via.
9. The RRAM device of claim 8 , further comprising a second electrode formed over the resistive element and the insulative material, wherein the metal-metal oxide interface is a TiN—TiON interface.
10. A resistive random access memory (RRAM) device, comprising:
a first electrode formed over a portion of a nitride material;
an insulative material formed over a portion of the first electrode;
a metal material, including a metal-metal oxide interface, formed over the portion of the first electrode in a via through the insulative material, wherein the metal material conformally fills the via, and wherein the metal-metal oxide interface resulted from a portion of the metal material being oxidized at a temperature below which thermal oxidation occurs; and
a second electrode formed over the selectively treated portion of the metal material.
11. The RRAM device of claim 10 , wherein the metal-metal oxide interface resulted from a portion of the metal material being oxidized using plasma oxidation.
12. The RRAM device of claim 10 , wherein the metal-metal oxide interface resulted from a portion of the metal material being oxidized using a slot-plane-antenna (SPA) plasma oxidation process.
13. The RRAM device of claim 10 , wherein the metal-metal oxide interface resulted from a portion of the metal material being oxidized by exposure to a gas cluster ion beam (GCIB).
14. A resistive random access memory (RRAM) device, comprising:
a first electrode formed over a portion of a nitride material;
a metal material, including a metal-metal oxide interface, formed over the first electrode, wherein the metal-metal oxide interface includes one of: a TiN—TiON interface and a Cu—CuOx interface; and
a second electrode formed over the selectively treated portion of the metal material.
15. The RRAM device of claim 14 , wherein the metal material includes the TiN—TiON interface and a second TiN—TiON interface.
16. A resistive random access memory (RRAM) device, comprising:
a first electrode formed over a portion of a nitride material, wherein the first electrode includes:
an electrode metal material formed over the portion of the nitride material; and
a tungsten material formed over the electrode metal material;
a metal material, including a metal-metal oxide interface, formed over the first electrode; and
a second electrode formed over the selectively treated portion of the metal material.