METHOD FOR PRODUCING FILM MEMBER
A film member includes a substrate formed of a resin film and an aluminium oxynitride film arranged on either, front or back sides of the substrate, in which the aluminium oxynitride film is composed of 39 at % to 55 at % of Al, 7 at % to 60 at % of O, and 1 at % to 50 at % of N. A method for producing the film member includes a pressure reduction step of arranging a substrate in a chamber of a sputtering deposition system such that the substrate faces a target made of aluminium and a deposition step of introducing a source gas including nitrogen and a carrier gas into the chamber and forming the aluminium oxynitride film on a deposition surface of the substrate in an atmosphere in which a ratio of an oxygen gas pressure to a nitrogen gas pressure in the chamber is not more than 20%.
1 . A method for producing a film member including: a substrate formed of a resin film; and an aluminium oxynitride (AlON) film arranged on at least one of a front side and a back side of the substrate, the method characterized by comprising:
a pressure reduction step of arranging the substrate in a chamber of a sputtering deposition system such that the substrate faces a target made of aluminium and exhausting gas in the chamber to maintain a predetermined vacuum level in the chamber; and
a deposition step of introducing a source gas including nitrogen and a carrier gas into the chamber and sputtering the target with plasma generated by ionization of the carrier gas at a predetermined vacuum level in an atmosphere in which a ratio of an oxygen gas pressure to a nitrogen gas pressure in the chamber is not more than 20%, to form the aluminium oxynitride film which is composed of 39 at % to 55 at % of Al, 7 at % to 60 at % of O, and 1 at % to 50 at % of N on a deposition surface of the substrate.
2 . The method for producing the film member according to claim 1 , wherein
the sputtering deposition system includes the target and magnetic field forming means for forming a magnetic field on a surface of the target, and generates the plasma by magnetron discharge.
3 . The method for producing the film member according to claim 2 , wherein
the sputtering deposition system further includes an ECR plasma generator,
the ECR plasma generator includes:
a rectangular waveguide that transmits microwaves;
a slot antenna arranged on one surface of the rectangular waveguide and having a slot through which the microwaves pass;
a dielectric section arranged so as to cover the slot of the slot antenna and having a front surface on a plasma generation region side parallel to an incident direction of the microwaves from the slot;
a support plate arranged on a back surface of the dielectric section for supporting the dielectric section; and
a permanent magnet arranged on a back surface of the support plate for forming a magnetic field in the plasma generation region,
plasma is generated while electron cyclotron resonance (ECR) is produced with the microwaves propagating from the dielectric section into the magnetic field, and
in the deposition step, sputtering is performed with ECR plasma applied between the substrate and the target.
4 . The method for producing the film member according to claim 1 , wherein
a particle diameter of aluminium oxynitride constituting the aluminium oxynitride film is not more than 150 nm.
5 . The method for producing the film member according to claim 1 , wherein
the aluminium oxynitride film has a surface roughness in which an arithmetic mean roughness (Ra) is not more than 3 nm and the maximum height (Rz) is not more than 30 nm.