Cleaning composition and method of manufacturing metal wiring using the same
A cleaning composition includes about 0.01 to about 5 wt % of a chelating agent; about 0.01 to about 0.5 wt % of an organic acid; about 0.01 to about 1.0 wt % of an inorganic acid; about 0.01 to about 5 wt % of an alkali compound; and deionized water.
1. A cleaning composition consisting of:
about 0.01 to about 5 wt % of a chelating agent, wherein the chelating agent comprises an amino acid compound;
about 0.01 to about 0.5 wt % of an organic acid;
about 0.01 to about 1.0 wt % of an inorganic acid;
about 0.01 to about 5 wt % of an alkali compound;
optionally, a corrosion inhibitor; and
deionized water.
2. The cleaning composition according to claim 1 , wherein the amino acid compound comprises at least one of glycine, ethylenediaminetetraacetic acid, and cyclohexanediaminetetraacetic acid.
3. The cleaning composition according to claim 1 , wherein the organic acid comprises at least one of lactic acid, lactic acid alkyl ester, acetic acid, and acetic acid alkyl ester.
4. The cleaning composition according to claim 1 , wherein the inorganic acid comprises at least one of hydrochloric acid, phosphoric acid, nitric acid, sulfuric acid, hydrofluoric acid, bromic acid, and iodic acid.
5. The cleaning composition according to claim 1 , wherein the alkali compound comprises at least one of tetramethylammonium hydroxide, tetrabutylammonium hydroxide, tetraethylammonium hydroxide, and trimethylammonium chloride.
6. The cleaning composition according to claim 1 , wherein the cleaning composition has a pH of about 1 to about 6.
7. The cleaning composition according to claim 1 , wherein the cleaning composition has a pH of about 8 to about 13.
8. The cleaning composition according to claim 1 , wherein the corrosion inhibitor is in an amount of about 0.01 to about 3 wt %.
9. The cleaning composition according to claim 8 , wherein the corrosion inhibitor comprises a benzene carboxylic acid-based material or a benzotriazole-based material.
10. A cleaning composition comprising:
about 0.01 to about 3 wt % of a corrosion inhibitor, wherein the corrosion inhibitor comprises 6-chloro-1-methoxy-benzotriazole
about 0.01 to about 0.5 wt % of an organic acid;
about 0.01 to about 1.0 wt % of an inorganic acid;
about 0.01 to about 5 wt % of an alkali compound; and
deionized water.
11. A method of manufacturing a metal wiring, the method comprising:
forming a first conductive layer on a substrate;
forming a second conductive layer on the first conductive layer;
cleaning the second conductive layer using a cleaning composition;
forming a photoresist layer pattern on the second conductive layer, and
etching the first conductive layer and the second conductive layer,
wherein the cleaning composition consists of:
about 0.01 to about 5 wt % of a chelating agent, wherein the chelating agent is an amino acid compound;
about 0.01 to about 0.5 wt % of an organic acid;
about 0.01 to about 1.0 wt % of an inorganic acid;
about 0.01 to about 5 wt % of an alkali compound;
optionally, a corrosion inhibitor; and
deionized water.
12. The method according to claim 11 , wherein the amino acid compound comprises at least one of glycine, ethylenediaminetetraacetic acid, and cyclohexanediaminetetraacetic acid.
13. The method according to claim 11 , wherein the organic acid is at least one selected from lactic acid, lactic acid alkyl ester, acetic acid, and acetic acid alkyl ester.
14. The method according to claim 11 , wherein the inorganic acid comprises at least one of hydrochloric acid, phosphoric acid, nitric acid, sulfuric acid, hydrofluoric acid, bromic acid, and iodic acid.
15. The method according to claim 11 , wherein the alkali compound acid comprises at least one of tetramethylammonium hydroxide, tetrabutylammonium hydroxide, tetraethylammonium hydroxide, and trimethylammonium chloride.
16. The method according to claim 11 , wherein the corrosion inhibitor is present in an amount of about 0.01 to about 3 wt % of a corrosion inhibitor.
17. The method according to claim 11 , wherein the corrosion inhibitor comprises a benzene carboxylic acid-based material or a benzotriazole-based material.
18. The method according to claim 11 , wherein the substrate is formed of glass, the first conductive layer is formed of titanium (Ti), and the second conductive layer is formed of copper (Cu).