IP Library Granted Patent US 9,490,156
Granted Patent B2
US 9,490,156 · App. 14/279,699 · Granted Nov 8, 2016

Transfer device for holding an object using a gas flow

Inventors: Sathish Kumar Balakrishnan (Singapore, SG); Kumaresh Govindan Radhakrishnan (Singapore, SG); Wen Ge Tu (Singapore, SG); HongLiang Lu (Singapore, SG); Lian Hok Tan (Singapore, SG)
Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
H01L21/6838B25B11/005B25J15/0023B65G47/911
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Quick Facts
Patent No.
US 9,490,156
App. No.
14/279,699
Granted
Nov 8, 2016
Kind
B2
Abstract

A transfer device for holding an object comprises: i) a housing; ii) at least one inlet conduit having an inlet for gas; iii) a plurality of sets of outlet conduits, each set of outlet conduits being in fluid communication with the at least one inlet conduit and having a plurality of outlets for directing the gas out of the outlet conduits. The respective outlets of the sets of outlet conduits are arranged in a direction along the housing surface and away from a center region relative to the respective sets of outlet conduits, so that a laminar gas flow that flows along the housing surface generates a pressure differential which creates a force towards the center region to hold the object against the housing surface.

Claims (17)

1. A transfer device for holding an object, the transfer device comprising:

a housing having a housing surface;

at least one inlet conduit having an inlet for introducing a gas into the at least one inlet conduit;

a plurality of secondary inlet conduits connected to the at least one inlet conduit;

a plurality of sets of outlet conduits being in fluid communication with the at least one inlet conduit, wherein each set of outlet conduits comprises:

a plurality of outlet conduits that branches out radially from a respective secondary inlet conduit away from a single center region relative to the plurality of sets of outlet conduits,

wherein axes of the plurality of outlet conduits, that branches out radially from the respective secondary inlet conduit, diverge from a single point located within the housing; and

a plurality of outlets for directing the gas out of the outlet conduits and away from the single center region relative to the plurality of sets of outlet conduits,

wherein the respective outlets of the sets of outlet conduits are arranged in a direction along the housing surface and away from the single center region relative to the plurality of sets of outlet conduits, so that a laminar gas flow, comprising a sheet of gas, that flows out from the outlets and away from the single center region flows parallel to the housing surface such that a pressure differential is generated which creates a force towards the single center region to hold the object against the housing surface, the plurality of sets of outlet conduits are arranged parallel to the single center region, and all of the plurality of outlets direct the gas out of the outlet conduit away from the single center region.

2. The transfer device of claim 1 , wherein the outlets of the respective sets of outlet conduits are circumferentially arranged with respect to the center region.

3. The transfer device of claim 1 , wherein the at least one inlet conduit branches into a plurality of secondary inlet conduits, and each secondary inlet conduit further branches into a respective set of outlet conduits.

4. The transfer device of claim 3 , wherein each secondary inlet conduit comprises an internal volume that is larger than each of the outlet conduits.

5. The transfer device of claim 1 , wherein the outlet conduits of each set of outlet conduits are radially arranged in a direction along the housing surface.

6. The transfer device of claim 5 , wherein the respective outlets of each set of outlet conduits are arranged along an arc of 90 degrees.

7. The transfer device of claim 1 , wherein the single center region is bounded by parallel sides of the housing.

8. The transfer device of claim 1 , wherein each of the secondary inlet conduits branches out radially from the single center region.

9. The transfer device of claim 1 , further comprising a stopper mounted to the housing surface, the object being placed against the stopper, wherein the stopper defines a separation distance from the housing surface, so that the pressure differential is generated in the separation distance between the housing surface and an opposing surface of the object.

Assignments (3)
CHANGE OF NAME Recorded Jan 20, 2023
From: ASM TECHNOLOGY SINGAPORE PTE LTD
To: ASMPT SINGAPORE PTE. LTD.
Reel/Frame 062444/0830 →
CORRECTIVE ASSIGNMENT TO CORRECT THE TITLE INSIDE THE ORIGINAL ASSIGNMENT PREVIOUSLY RECORDED AT REEL: 032912 FRAME: 0805. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Sep 17, 2014
From: BALAKRISHNAN, SATHISH KUMAR; GOVINDAN RADHAKRISHNAN, KUMARESH; TU, WEN GE; LU, HONGLIANG; TAN, LIAN HOK
To: ASM TECHNOLOGY SINGAPORE PTE LTD
Reel/Frame 033812/0096 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 16, 2014
From: BALAKRISHNAN, SATHISH KUMAR; GOVINDAN RADHAKRISHNAN, KUMARESH; TU, WEN GE; LU, HONGLIANG; TAN, LIAN HOK
To: ASM TECHNOLOGY SINGAPORE PTE LTD
Reel/Frame 032912/0805 →
Continuity (2)
Provisional Application 61826719 · May 23, 2013
Related Publication 20140348624A1 · Nov 27, 2014