IP Library Granted Patent US 9,305,624
Granted Patent B2
US 9,305,624 · App. 14/282,444 · Granted Apr 5, 2016

Vertical switch three-dimensional memory array

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Quick Facts
Patent No.
US 9,305,624
App. No.
14/282,444
Granted
Apr 5, 2016
Kind
B2
Abstract

A memory device includes a substrate, and, disposed thereover, an array of vertical memory switches. Each switch has at least three terminals and a cross-sectional area less than 6F 2 .

Claims (70)

1. An addressable storage matrix comprising:

a plurality or rows;

a plurality of columns intersecting the plurality of rows;

a plurality of memory cells each disposed proximate an intersection of a row and a column, wherein (i) each memory cell comprises a storage element and a switching device, (ii) each storage element comprises a programmable material, and (iii) each switching device comprises a three-terminal or four-terminal non-linear device (a) having a first contact, a second contact, and a third contact disposed between the first and second contacts, (b) having an avalanche switching voltage threshold controlled via voltage applied to the third contact, and (c) exhibiting a first current level or a second current level, different from the first current level, in response to a voltage, applied between the first and second contacts, greater than the avalanche switching voltage threshold;

a gate control decoder comprising (i) a plurality of gate control inputs, the plurality of gate control inputs configured to accept gate control signals for applying a voltage to third contacts of a plurality of switching devices simultaneously to alter the avalanche switching voltage threshold, (ii) a plurality of gate control lines each connected to third terminals of the switching devices within one or more rows or columns, and (iii) an array of non-linear devices for selecting of a gate control line based on the gate control signals; and

a row decoder comprising (i) a plurality of row inputs configured to accept row address signals, (ii) a plurality of row decode lines each connected to first terminals of the switching devices within a row, and (iii) an array of non-linear devices for selecting of a row decode line based on the row address signals.

2. The storage matrix of claim 1 , wherein the gate control signals comprise only a subset of the row address signals.

3. An addressable storage matrix comprising:

a plurality or rows;

a plurality of columns intersecting the plurality of rows;

a plurality of memory cells each disposed proximate an intersection of a row and a column, wherein (i) each memory cell comprises a storage element and a switching device, (ii) each storage element comprises a programmable material, and (iii) each switching device comprises a three-terminal or four-terminal non-linear device (a) having a first contact, a second contact, and a third contact disposed between the first and second contacts, (b) having an avalanche switching voltage threshold controlled via voltage applied to the third contact, and (c) exhibiting a first current level or a second current level, different from the first current level, in response to a voltage, applied between the first and second contacts, greater than the avalanche switching voltage threshold;

a gate control decoder comprising (i) a plurality of gate control inputs, the plurality of gate control inputs configured to accept gate control signals for applying a voltage to third contacts of a plurality of switching devices simultaneously to alter the avalanche switching voltage threshold, (ii) a plurality of gate control lines each connected to third terminals of the switching devices within one or more rows or columns, and (iii) an array of non-linear devices for selecting of a gate control line based on the gate control signals; and

a column decoder comprising (i) a plurality of column inputs configured to accept column address signals, (ii) a plurality of column decode lines each connected to second terminals of the switching devices within a column, and (iii) an array of non-linear devices for selection of a column decode line based on the column address signals.

4. The storage matrix of claim 3 , wherein the gate control signals comprise only a subset of the column address signals.

5. The storage matrix of claim 3 , further comprising a row decoder comprising (i) a plurality of row inputs configured to accept row address signals, (ii) a plurality of row decode lines each connected to first terminals of the switching devices within a row, and (iii) an array of non-linear devices for selection of a row decode line based on the row address signals.

6. The storage matrix of claim 5 , wherein the gate control signals comprise only a subset of the row address signals.

7. An addressable storage matrix comprising:

a plurality or rows;

a plurality of columns intersecting the plurality of rows;

a plurality of memory cells each disposed proximate an intersection of a row and a column, wherein (i) each memory cell comprises a storage element and a switching device, (ii) each storage element comprises a programmable material, and (iii) each switching device comprises a three-terminal or four-terminal non-linear device (a) having a first contact, a second contact, and a third contact disposed between the first and second contacts, (b) having an avalanche switching voltage threshold controlled via voltage applied to the third contact, and (c) exhibiting a first current level or a second current level, different from the first current level, in response to a voltage, applied between the first and second contacts, greater than the avalanche switching voltage threshold; and

a gate control decoder comprising (i) a plurality of gate control inputs, the plurality of gate control inputs configured to accept gate control signals for applying a voltage to third contacts of a plurality of switching devices simultaneously to alter the avalanche switching voltage threshold, (ii) a plurality of gate control lines each connected to third terminals of the switching devices within one or more rows or columns, and (iii) an array of non-linear devices for selecting of a gate control line based on the gate control signals, wherein an area of each memory cell is 4F 2 or less.

8. The storage matrix of claim 7 , wherein an area of each memory cell is 2F ×2F.

9. An addressable storage matrix comprising:

a plurality or rows;

a plurality of columns intersecting the plurality of rows;

a plurality of memory cells each disposed proximate an intersection of a row and a column, wherein (i) each memory cell comprises a storage element and a switching device, (ii) each storage element comprises a programmable material, and (iii) each switching device comprises a three-terminal or four-terminal non-linear device (a) having a first contact, a second contact, and a third contact disposed between the first and second contacts, (b) having an avalanche switching voltage threshold controlled via voltage applied to the third contact, and (c) exhibiting a first current level or a second current level, different from the first current level, in response to a voltage, applied between the first and second contacts, greater than the avalanche switching voltage threshold; and

a gate control decoder comprising (i) a plurality of gate control inputs, the plurality of gate control inputs configured to accept gate control signals for applying a voltage to third contacts of a plurality of switching devices simultaneously to alter the avalanche switching voltage threshold, (ii) a plurality of gate control lines each connected to third terminals of the switching devices within one or more rows or columns, and (iii) an array of non-linear devices for selecting of a gate control line based on the gate control signals, wherein each gate control line is connected to third terminals of the switching devices within a plurality of rows or a plurality of columns.

10. The storage matrix of claim 9 , wherein each gate control line is connected to third terminals of the switching devices within (a) a plurality of consecutive rows or (b) a plurality of consecutive columns.

11. An addressable storage matrix comprising:

a plurality or rows;

a plurality of columns intersecting the plurality of rows;

a plurality of memory cells each disposed proximate an intersection of a row and a column, wherein (i) each memory cell comprises a storage element and a switching device, (ii) each storage element comprises a programmable material, and (iii) each switching device comprises a three-terminal or four-terminal non-linear device (a) having a first contact, a second contact, and a third contact disposed between the first and second contacts, (b) having an avalanche switching voltage threshold controlled via voltage applied to the third contact, and (c) exhibiting a first current level or a second current level, different from the first current level, in response to a voltage, applied between the first and second contacts, greater than the avalanche switching voltage threshold; and

a gate control decoder comprising (i) a plurality of gate control inputs, the plurality of gate control inputs configured to accept gate control signals for applying a voltage to third contacts of a plurality of switching devices simultaneously to alter the avalanche switching voltage threshold, (ii) a plurality of gate control lines each connected to third terminals of the switching devices within one or more rows or columns, and (iii) an array of non-linear devices for selecting of a gate control line based on the gate control signals, wherein each three-terminal or four-terminal non-linear device comprises a four-layer diode.

12. An addressable storage matrix comprising:

a plurality or rows;

a plurality of columns intersecting the plurality of rows;

a plurality of memory cells each disposed proximate an intersection of a row and a column, wherein (i) each memory cell comprises a storage element and a switching device, (ii) each storage element comprises a programmable material, and (iii) each switching device comprises a three-terminal or four-terminal non-linear device (a) having a first contact, a second contact, and a third contact disposed between the first and second contacts, (b) having an avalanche switching voltage threshold controlled via voltage applied to the third contact, and (c) exhibiting a first current level or a second current level, different from the first current level, in response to a voltage, applied between the first and second contacts, greater than the avalanche switching voltage threshold; and

a gate control decoder comprising (i) a plurality of gate control inputs, the plurality of gate control inputs configured to accept gate control signals for applying a voltage to third contacts of a plurality of switching devices simultaneously to alter the avalanche switching voltage threshold, (ii) a plurality of gate control lines each connected to third terminals of the switching devices within one or more rows or columns, and (iii) an array of non-linear devices for selecting of a gate control line based on the gate control signals, wherein the plurality of rows and the plurality of columns are disposed within a first memory layer, the storage matrix further comprising one or more additional memory layers disposed above or below the first memory layer.

13. An addressable storage matrix comprising:

a plurality or rows;

a plurality of columns intersecting the plurality of rows;

a plurality of memory cells each disposed proximate an intersection of a row and a column, wherein (i) each memory cell comprises a storage element and a switching device, (ii) each storage element comprises a programmable material, and (iii) each switching device comprises a three-terminal or four-terminal non-linear device (a) having a first contact, a second contact, and a third contact disposed between the first and second contacts, (b) having an avalanche switching voltage threshold controlled via voltage applied to the third contact, and (c) exhibiting a first current level or a second current level, different from the first current level, in response to a voltage, applied between the first and second contacts, greater than the avalanche switching voltage threshold; and

a gate control decoder comprising (i) a plurality of gate control inputs, the plurality of gate control inputs configured to accept gate control signals for applying a voltage to third contacts of a plurality of switching devices simultaneously to alter the avalanche switching voltage threshold, (ii) a plurality of gate control lines each connected to third terminals of the switching devices within one or more rows or columns, and (iii) an array of non-linear devices for selecting of a gate control line based on the gate control signals, wherein the programmable material comprises a resistive-change material.

14. An addressable storage matrix comprising:

a plurality or rows;

a plurality of columns intersecting the plurality of rows;

a plurality of memory cells each disposed proximate an intersection of a row and a column, wherein (i) each memory cell comprises a storage element and a switching device, (ii) each storage element comprises a programmable material, and (iii) each switching device comprises a three-terminal or four-terminal non-linear device (a) having a first contact, a second contact, and a third contact disposed between the first and second contacts, (b) having an avalanche switching voltage threshold controlled via voltage applied to the third contact, and (c) exhibiting a first current level or a second current level, different from the first current level, in response to a voltage, applied between the first and second contacts, greater than the avalanche switching voltage threshold; and

a gate control decoder comprising (i) a plurality of gate control inputs, the plurality of gate control inputs configured to accept gate control signals for applying a voltage to third contacts of a plurality of switching devices simultaneously to alter the avalanche switching voltage threshold, (ii) a plurality of gate control lines each connected to third terminals of the switching devices within one or more rows or columns, and (iii) an array of non-linear devices for selecting of a gate control line based on the gate control signals, wherein the programmable material comprises a phase-change material.

15. The storage matrix of claim 14 , wherein the phase-change material comprises a chalcogenide material.

16. The storage matrix of claim 15 , wherein the chalcogenide material comprises a germanium-antimony-tellurium alloy.

17. An addressable storage matrix comprising:

a plurality or rows;

a plurality of columns intersecting the plurality of rows;

a plurality of memory cells each disposed proximate an intersection of a row and a column, wherein (i) each memory cell comprises a storage element and a switching device, (ii) each storage element comprises a programmable material, and (iii) each switching device comprises a three-terminal or four-terminal non-linear device (a) having a first contact, a second contact, and a third contact disposed between the first and second contacts, (b) having an avalanche switching voltage threshold controlled via voltage applied to the third contact, and (c) exhibiting a first current level or a second current level, different from the first current level, in response to a voltage, applied between the first and second contacts, greater than the avalanche switching voltage threshold; and

a gate control decoder comprising (i) a plurality of gate control inputs, the plurality of gate control inputs configured to accept gate control signals for applying a voltage to third contacts of a plurality of switching devices simultaneously to alter the avalanche switching voltage threshold, (ii) a plurality of gate control lines each connected to third terminals of the switching devices within one or more rows or columns, and (iii) an array of non-linear devices for selecting of a gate control line based on the gate control signals, wherein the programmable material comprises a one-time-programmable material.

18. An addressable storage matrix comprising:

a plurality or rows;

a plurality of columns intersecting the plurality of rows;

a plurality of memory cells each disposed proximate an intersection of a row and a column, wherein (i) each memory cell comprises a storage element and a switching device, (ii) each storage element comprises a programmable material, and (iii) each switching device comprises a three-terminal or four-terminal non-linear device (a) having a first contact, a second contact, and a third contact disposed between the first and second contacts, (b) having an avalanche switching voltage threshold controlled via voltage applied to the third contact, and (c) exhibiting a first current level or a second current level, different from the first current level, in response to a voltage, applied between the first and second contacts, greater than the avalanche switching voltage threshold; and

a gate control decoder comprising (i) a plurality of gate control inputs, the plurality of gate control inputs configured to accept gate control signals for applying a voltage to third contacts of a plurality of switching devices simultaneously to alter the avalanche switching voltage threshold, (ii) a plurality of gate control lines each connected to third terminals of the switching devices within one or more rows or columns, and (iii) an array of non-linear devices for selecting of a gate control line based on the gate control signals, wherein the programmable material comprises an organic programmable material.

19. An addressable storage matrix comprising:

a plurality or rows;

a plurality of columns intersecting the plurality of rows;

a plurality of memory cells each disposed proximate an intersection of a row and a column, wherein (i) each memory cell comprises a storage element and a switching device, (ii) each storage element comprises a programmable material, and (iii) each switching device comprises a three-terminal or four-terminal non-linear device (a) having a first contact, a second contact, and a third contact disposed between the first and second contacts, (b) having an avalanche switching voltage threshold controlled via voltage applied to the third contact, and (c) exhibiting a first current level or a second current level, different from the first current level, in response to a voltage, applied between the first and second contacts, greater than the avalanche switching voltage threshold; and

a gate control decoder comprising (i) a plurality of gate control inputs, the plurality of gate control inputs configured to accept gate control signals for applying a voltage to third contacts of a plurality of switching devices simultaneously to alter the avalanche switching voltage threshold, (ii) a plurality of gate control lines each connected to third terminals of the switching devices within one or more rows or columns, and (iii) an array of non-linear devices for selecting of a gate control line based on the gate control signals, wherein the programmable material comprises a nano-material.

20. An addressable storage matrix comprising:

a plurality or rows;

a plurality of columns intersecting the plurality of rows;

a plurality of memory cells each disposed proximate an intersection of a row and a column, wherein (i) each memory cell comprises a storage element and a switching device, (ii) each storage element comprises a programmable material, and (iii) each switching device comprises a three-terminal or four-terminal non-linear device (a) having a first contact, a second contact, and a third contact disposed between the first and second contacts, (b) having an avalanche switching voltage threshold controlled via voltage applied to the third contact, and (c) exhibiting a first current level or a second current level, different from the first current level, in response to a voltage, applied between the first and second contacts, greater than the avalanche switching voltage threshold; and

a gate control decoder comprising (i) a plurality of gate control inputs, the plurality of gate control inputs configured to accept gate control signals for applying a voltage to third contacts of a plurality of switching devices simultaneously to alter the avalanche switching voltage threshold, (ii) a plurality of gate control lines each connected to third terminals of the switching devices within one or more rows or columns, and (iii) an array of non-linear devices for selecting of a gate control line based on the gate control signals, wherein the storage matrix is disposed within a removable package interchangeable among a plurality of different systems configured to access data within the storage matrix.

Assignments (11)
PATENT COLLATERAL AGREEMENT - A&R LOAN AGREEMENT Recorded Aug 21, 2023
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 064715/0001 →
PATENT COLLATERAL AGREEMENT - DDTL LOAN AGREEMENT Recorded Aug 21, 2023
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 067045/0156 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 24, 2018
From: HGST, INC.
To: WESTERN DIGITAL TECHNOLOGIES, INC.
Reel/Frame 046939/0587 →
RELEASE OF SECURITY INTEREST Recorded Aug 16, 2016
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: HGST, INC.
Reel/Frame 039689/0950 →
SECURITY AGREEMENT Recorded Jul 19, 2016
From: HGST, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 039389/0684 →
CORRECTIVE ASSIGNMENT TO CORRECT THE NAME AND ADDRESS OF THE ASSIGNEE PREVIOUSLY RECORDED ON REEL 035748 FRAME 0909. ASSIGNOR(S) HEREBY CONFIRMS THE NAME AND ADDRESS OF THE ASSIGNEE SI HGST, INC.,3403 YERBA BUENA ROAD,SAN JOSE, CA 95135. Recorded Jun 2, 2015
From: CONTOUR SEMICONDUCTOR, INC.
To: HGST, INC.
Reel/Frame 035831/0594 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 21, 2015
From: CONTOUR SEMICONDUCTOR, INC.
To: HGST NETHERLANDS B.V.
Reel/Frame 035748/0909 →
RELEASE OF SECURITY INTEREST Recorded Jun 24, 2014
From: AMERICAN CAPITAL, LTD.
To: CONTOUR SEMICONDUCTOR, INC.
Reel/Frame 033225/0330 →
SECURITY INTEREST Recorded Jun 20, 2014
From: CONTOUR SEMICONDUCTOR, INC.
To: AMERICAN CAPITAL, LTD.; STILL RIVER FUND III, LIMITED PARTNERSHIP; SARAH G. KURZON 2001 REVOCABLE TRUST; OVONYX, INC.; PERRIN, DONALD; RUNNING DEER FOUNDATION; RUNNING DEER TRUST
Reel/Frame 033204/0428 →
SECURITY INTEREST Recorded May 30, 2014
From: CONTOUR SEMICONDUCTOR, INC.
To: AMERICAN CAPITAL, LTD.
Reel/Frame 033063/0617 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 29, 2014
From: SHEPARD, DANIEL R.
To: CONTOUR SEMICONDUCTOR, INC.
Reel/Frame 032983/0767 →