Back scattered electron detector
View Patent ↗It is an object of the present invention to provide a back scattered electron detector suitable for implementing a method for determining beforehand in which region of a sample an X-ray detector can obtain an accurate X-ray detection image and perform an appropriate analysis. A Coax-BSE detector which is a back scattered electron detector includes a BSE element, a support member that supports the BSE element, and a fixing member to fix the support member to the X-ray detector, in which the fixing member fixes the support member by clamping a side portion on the distal end side which is an X-ray receiving side of a housing that covers the X-ray detector.
1. A back scattered electron detector used together with an X-ray detector included in a charged particle beam apparatus, the charged particle beam apparatus including an another back scattered electron detector arranged between an electron source and a sample and, as seen from the sample, the another back scattered electron detector being arranged on same side as the X-ray detector at a different angle than the X-ray detector, comprising:
a reflected electron detection element;
a support member that supports the reflected electron detection element; and
a fixing member for fixing the support member to the X-ray detector, wherein the fixing member fixes the support member by clamping a side portion on a distal end side, which is an X-ray receiving side, of a housing that covers the X-ray detector.
2. The back scattered electron detector according to claim 1 , wherein the support member is configured so as to be detachably attached to the fixing member.
3. The back scattered electron detector according to claim 1 , further comprising a conductor for transmitting a reflected electron signal outputted from the reflected electron detection element,
wherein one end of the conductor is connected to the reflected electron detection element so that the conductor extends toward a rear end side which is the X-ray detection element side of the housing, and the other end side is connectable to a feedthrough of the charged particle beam apparatus.
4. The back scattered electron detector according to claim 3 , wherein the conductor is a coil.
5. A charged particle beam apparatus comprising:
an X-ray detector;
a first back scattered electron detector arranged between an electron source and a sample and, as seen from the sample, the first back scattered electron detector being arranged on same side as the X-ray detector at a different angle than the X-ray detector;
a second back scattered electron detector used together with the X-ray detector, the second back scattered electron detector being mounted on a distal end, which is an X-ray receiving side, of a housing that covers the X-ray detector, and includes:
a reflected electron detection element;
a support member that supports the reflected electron detection element; and
a fixing member for fixing the support member to the X-ray detector, wherein the fixing member fixes the support member by clamping a side portion on the distal end side, of the housing,
wherein the X-ray detector detects an X-ray signal and the second back scattered electron detector detects a reflected electron signal.
6. The charged particle beam apparatus according to claim 5 , wherein an amount of reflected electron signal per pixel in a back scattered electron image is analyzed using a back scattered electron image obtained based on the reflected electron signal to determine detection efficiency of the X-ray signal.
7. The charged particle beam apparatus according to claim 5 , wherein the support member is configured so as to be detachably attached to the fixing member.
8. The charged particle beam apparatus according to claim 5 , further including a conductor for transmitting a reflected electron signal outputted from the reflected electron detection element,
wherein one end of the conductor is connected to the reflected electron detection element so that the conductor extends toward a rear end side which is the X-ray detection element side of the housing, and the other end side is connectable to a feedthrough of the charged particle beam apparatus.
9. The charged particle beam apparatus according to claim 8 , wherein the conductor is a coil.