Methods for fabricating micro-devices
The present invention provides methods utilizing current nano-technological processes for fabricating a range of micro-devices with significantly expanded capabilities, unique functionalities at microscopic levels, enhanced degree of flexibilities, reduced costs and improved performance in the fields of bioscience and medicine. Such fabricated micro-devices have significant improvements in many areas over the existing, conventional methods, which include, but are not limited to reduced overall costs, early disease detection, targeted drug delivery, targeted disease treatment and reduced degree of invasiveness in treatment. Compared with existing, conventional approaches, the said inventive approach disclosed in this patent application is much more microscopic, sensitive, accurate, precise, flexible and effective.
1. A method of fabricating a micro-device for biological and medical applications, wherein the method uses microelectronics processes and comprises the following steps:
providing a substrate material having a surface region;
adding a deposit material to the surface region of said substrate material;
patterning said deposit material using photolithography and/or etching processes to form at least a portion of recessed areas;
depositing material S onto the surface region of said deposit material and filling into said recessed areas;
polishing material S via chemical mechanical polishing (CMP) to remove material S from the top surface of said deposit material and leaving sufficient amount of material S in said recessed area coplanar with the top surface of said deposit material;
depositing material C onto the surfaces of material S and said deposit material;
patterning material C using photolithography and/or etching processes;
etching at least portions of existing material S to form a hollow container;
matching a device with nozzle and compound reservoir containing a desired compound;
forcing compound materials into said container through said nozzle; and,
etching said reservoir with a material to detach said reservoir from said nozzle to form a micro-device with micro-container filled with the desired compound.
2. A method of fabricating a micro-device for biological and medical applications, wherein the method uses microelectronics processes and comprises the following steps:
providing a substrate material having a surface region;
adding a deposit material to the surface region of said substrate material;
patterning said deposit material using photolithography and/or etching processes to form a portion of recessed areas;
depositing material S onto the surface region of said deposit material and filling said recessed areas;
polishing material S via CMP to remove material S from top surface of said deposit material and leaving sufficient amount of material S in said recessed area coplanar with the top surface of said deposit material;
depositing material C onto the surfaces of material S and said deposit material; patterning material C using photolithography and/or etching processes that are selective to material S;
etching material S that is selective to said substrate, said deposit material, and material C to form a hollow container;
filling container with a desired compound; and,
applying a film material to the surface of material C and the top portion of the filled micro-container containing said compound to form a micro-device filled with the desired compound.
3. The method of claim 2 , wherein said film material comprises a bio-degradable material.
4. The method of claim 2 , wherein said deposit material comprises polysilicon, silicon nitride, silicon oxynitride, or silicon carbide.
5. The method of claim 2 , wherein material S, material S 1 , material S 2 , and material S 3 each comprise silicon dioxide;
material C comprises polysilicon, silicon carbide, or silicon nitride; and
the wet etching is conducted in a diluted HF solution and vapor etching is conducted using oxygen containing vapor gas.
6. The method of claim 2 , further comprising the step of: (a) fabricating a CMOS or BiCMOS integrated circuit containing both memory and logic processing functions by using microelectronics processes on a desired substrate, or (b) fabricating at least one of the following components around the CMOS or BiCMOS integrated circuit using microelectronics processes: micro-container, micro-injector, signal receiver, signal transmitter, sensors, positioning device, and motorized propeller.