Electric field gap device and manufacturing method
View Patent ↗Substrate material is oxidized around side walls of a set of channels. A shielding structure means there is more oxide growth at the top than the bottom with the result that the non-oxidized substrate material area between the channels forms a tapered shape with a pointed tip at the top. These pointed substrate areas are then used to form cathodes.
1. A method of forming an electric field gap structure, comprising:
providing a silicon substrate;
etching cathode channels into the substrate, the cathode channels being defined in part by sidewall surfaces;
lining the top surface of the substrate and the sidewall surfaces of the cathode channels with a lining dielectric layer, wherein the lining dielectric layer leaves the cathode channels open;
after the lining, forming shielding regions on the sidewall surfaces of the cathode channels but leaving an unshielded portion at the top of the cathode channels, wherein the shielding regions leave the cathode channels open;
oxidising the substrate at the unshielded portion of the cathode channels so that oxidation occurs at the top of the cathode channels such that an amount of original silicon of the silicon substrate between tops of adjacent cathode channels is narrowed to form pointed non-oxidised substrate regions between the cathode channels;
etching away the layers at and above the pointed substrate regions;
providing a cathode contact over each pointed substrate region;
forming a sacrificial layer over the cathode contacts;
providing an anode metal layer over the sacrificial layer;
etching the sacrificial layer to form a cavity between the cathode contacts and the anode metal layer.
2. A method as claimed in claim 1 , comprising forming a first dielectric layer over the substrate before etching the cathode channels through the first dielectric layer and into the substrate.
3. A method as claimed in claim 2 , wherein the first dielectric layer comprises a plurality of sub-layers.
4. A method as claimed in claim 2 , wherein the first dielectric layer comprises silicon nitride.
5. A method as claimed in claim 1 , wherein the lining dielectric layer comprises a thin layer of silicon dioxide, and the shielding regions comprise a thin layer of silicon nitride.
6. A method as claimed in claim 1 , wherein the sacrificial layer comprises silicon dioxide or TEOS.
7. A method as claimed in claim 1 , further comprising forming a capping layer over the anode metal layer which covers sacrificial etch holes in the anode metal layer.
8. A method as claimed in claim 1 , wherein the thickness of the sacrificial layer over the cathode contacts is selected to correspond to the desired anode-cathode gap.
9. A method as claimed in claim 1 , wherein oxidising the substrate at the unshielded portion of the cathode channel comprises using a LOCOS process.
10. A method as claimed in claim 1 , wherein the cathode channels define a substrate area between the channels, in the form of an array of pillars or stripes on which the cathode contacts are to be formed.
11. An electric field gap structure, comprising:
a silicon substrate;
cathode channels extending into the substrate, wherein the tops of the channel side walls comprises oxidised substrate material, such that tapered non-oxidised substrate regions are present between adjacent channels, wherein each tapered non-oxidised substrate region has a top, wherein the top of each tapered non-oxidised substrate region comprises a pointed cathode contact area coated with a cathode metal;
silicon nitride side wall portions on the side walls of the cathode channels, wherein the oxidised substrate material comprises silicon dioxide portions which are between the silicon nitride side wall portions and the tapered non-oxidised substrate regions and which are wider at the top than at the bottom of the channels;
a cavity above the pointed cathode contacts; and
an anode metal layer over the cavity layer.
12. A structure as claimed in claim 11 , comprising a lining dielectric layer over the substrate and extending into the channels.
13. A structure as claimed in claim 11 , wherein the anode metal layer has sacrificial etch holes, and the structure further comprises a capping layer over the anode metal layer which covers the sacrificial etch holes.
14. A structure as claimed in claim 11 , further comprising a cathode contact to the substrate formed at an area outside the area where the cathodes are formed.