Imaging element, method for manufacturing imaging element, pixel design method, and electronic apparatus with light collecting parts having plural projection and depression structures
An imaging element includes a plurality of pixels that are two-dimensionally arranged and each have a light receiving part including a photoelectric conversion element and a light collecting part that collects incident light toward the light receiving part. Each of the light collecting parts in the plurality of pixels includes an optical functional layer having, in a surface, a specific projection and depression structure depending on the pixel position.
1. An imaging element, comprising:
a plurality of pixels configured to be two-dimensionally arranged, the plurality of pixels comprising:
a first pixel, comprising:
a first photoelectric conversion element; and
a first light collecting part configured to collect incident light, wherein the first light collecting part comprises a first projection and depression structure; and
a second pixel, comprising:
a second photoelectric conversion element; and
a second light collecting part configured to collect the incident light, wherein the second light collecting part comprises a second projection and depression structure,
wherein a first scale of the first projection and depression structure is different from a second scale of the second projection and depression structure, and
wherein the first scale of the first projection and depression structure and the second scale of the second projection and depression structure for respective pixels of the plurality of pixels is based on a wavelength of the incident light.
2. The imaging element according to claim 1 , wherein
the first pixel is closer to a center of the plurality of pixels than the second pixel, and
the first scale of the first pixel is larger than the second scale of the second pixel.
3. The imaging element according to claim 1 , wherein an exit angle of a first light beam that passes through the first light collecting part is the same as an exit angle of a second light beam that passes through the second light collecting part.
4. The imaging element according to claim 1 , wherein the first light collecting part comprises a first lens, and the second light collecting part comprises a second lens.
5. The imaging element according to claim 4 , wherein
a surface of the first lens comprises the first projection and depression structure, and
a surface of the second lens comprises the second projection and depression structure.
6. The imaging element according to claim 4 , further comprising:
a first inner lens arranged between the first lens and the first photoelectric conversion element; and
a second inner lens arranged between the second lens and the second photoelectric conversion element.
7. The imaging element according to claim 6 , wherein
a surface of the first inner lens comprises the first projection and depression structure, and
a surface of the second inner lens comprises the second projection and depression structure.
8. The imaging element according to claim 4 , further comprising an antireflection film arranged between the first lens and the first photoelectric conversion element, and between the second lens and the second photoelectric conversion element.
9. The imaging element according to claim 8 , wherein a surface of the antireflection film comprises the first projection and depression structure and the second projection and depression structure.
10. The imaging element according to claim 4 , wherein
the first pixel is closer to a center of the plurality of pixels than the second pixel,
the first lens is shifted towards the center of the plurality of pixels by a first amount,
the second lens is shifted towards the center of the plurality of pixels by a second amount, and
the first amount is smaller than the second amount.
11. A method of manufacturing an imaging element, comprising:
forming a plurality of pixels to be two-dimensionally arranged, comprising:
forming a first pixel, comprising:
forming a first photoelectric conversion element; and
forming a first light collecting part comprising a first projection and depression structure and configured to collect incident light; and
forming a second pixel, comprising:
forming a second photoelectric conversion element; and
forming a second light collecting part comprising a second projection and depression structure and configured to collect the incident light,
wherein a first scale of the first projection and depression structure is different from a second scale of the second projection and depression structure, and
wherein the first scale of the first projection and depression structure and the second scale of the second projection and depression structure for respective pixels of the plurality of pixels is based on a wavelength of the incident light.
12. The method according to claim 11 , wherein
the first pixel is closer to a center of the plurality of pixels than the second pixel, and
the first scale of the first pixel is larger than the second scale of the second pixel.
13. The method according to claim 11 , wherein
an exit angle of a first light beam that passes through the first light collecting part is the same as an exit angle of a second light beam that passes through the second light collecting part.
14. The method according to claim 11 , wherein the first light collecting part comprises a first lens, and the second light collecting part comprises a second lens.
15. The method according to claim 14 , further comprising:
forming the first projection and depression structure in a surface of the first lens; and
forming the second projection and depression structure in a surface of the second lens.
16. The method according to claim 14 , further comprising:
forming a first inner lens between the first lens and the first photoelectric conversion element; and
forming a second inner lens between the second lens and the second photoelectric conversion element.
17. The method according to claim 16 , further comprising:
forming the first projection and depression structure in a surface of the first inner lens; and
forming the second projection and depression structure in a surface of the second inner lens.
18. The method according to claim 14 , further comprising
an antireflection film between the first lens and the first photoelectric conversion element, and between the second lens and the second photoelectric conversion element.
19. The method according to claim 18 , further comprising
forming the first projection and depression structure and the second projection and depression structure in a surface of the antireflection film.
20. The method according to claim 14 , wherein
the first pixel is closer to a center of the plurality of pixels than the second pixel,
the first lens is shifted towards the center of the plurality of pixels by a first amount,
the second lens is shifted towards the center of the plurality of pixels by a second amount, and
the first amount is smaller than the second amount.
21. The imaging element according to claim 1 , wherein the first scale and the second scale are set within a range smaller than about ⅕ th of the wavelength of the incident light.