Semiconductor memory with sense amplifier
In an exemplary aspect, the present invention provides a semiconductor memory device including sense amplifiers that drive bit lines to which memory cells are connected, and driver transistors that supply a power supply to the sense amplifiers, wherein the sense amplifiers are arranged in rows and constitutes a first sense-amplifier row in which transistors of a first conductive type are arranged and a second sense-amplifier row in which transistors of a second conductive type are arranged, and the driver transistors constitutes at least one transistor row including a first driver transistor of the first conductive type corresponding to the first sense-amplifier row and a second driver transistor of the second conductive type corresponding to the second sense-amplifier row between the first sense-amplifier row and the second sense-amplifier row.
1. A semiconductor memory device, comprising:
a plurality of sense amplifiers, each of the sense amplifiers amplifying a difference in potential between a pair of bit lines, the sense amplifiers having a plurality of first transistors and a plurality of second transistors, the first transistors being formed in a first sense amplifier region and the second transistors being formed in a second amplifier region;
a plurality of sense amplifier drivers supplying a power supply to the sense amplifiers, each of the sense amplifier drivers having a first driver transistor and a second driver transistor, the first driver transistor having a different conductivity type from the second driver transistor, the first driver transistor and the second driver transistor being alternately arranged in a first direction (Y direction) between the first sense amplifier region and the second sense amplifier region, and
an element separation boundary arranged between the first driver transistor and the second driver transistor,
wherein the first driver transistor is formed in a first region between the first sense amplifier region and the second sense amplifier region,
wherein the second driver transistor is formed in a second region across a third region from the first region,
wherein in the third region, the element separation boundary is arranged in a second direction (X direction) which is different from the first direction.
2. The semiconductor memory device according to claim 1 , wherein in the first region, the element separation boundary is arranged in the first direction between the first driver transistor and the second sense amplifier region.
3. The semiconductor memory device according to claim 2 , wherein in the second region, the element separation boundary is arranged in the first direction between the second driver transistor and the first sense amplifier region.
4. The semiconductor memory device according to claim 1 , wherein the first transistors have the same conductivity type as the first driver transistor, and the second transistors have the same conductivity type as the second driver transistor.
5. The semiconductor memory device according to claim 1 , wherein the sense amplifier drivers further comprise a third driver transistor in the first region.
6. The semiconductor memory device according to claim 1 , wherein the first direction is parallel to the extending direction of word lines.
7. The semiconductor memory device according to claim 1 , wherein the second direction is parallel to the extending direction of bit lines.
8. A semiconductor memory device comprising:
first and second memory cell arrays having a plurality of memory cells arranged in matrix form, respectively;
a plurality of pair of bit lines coupled to a plurality of memory cells;
a plurality of sense amplifiers, each of the sense amplifiers amplifying a difference in potential between an associated one of the pair of bit lines;
a plurality of sense amplifier drivers, each of sense amplifier drivers having a first driver transistor and a second driver transistor, the first driver transistor having a first conductivity type and being coupled between the sense amplifiers and a first power supply voltage line, and the second driver transistor having a second conductivity type which is different from the first conductivity type and being coupled between the sense amplifiers and a second power supply voltage line, the first driver transistor and the second driver transistor being alternately arranged in a first direction perpendicular to the extending direction of the bit lines between the first and second memory cell arrays,
an element separation boundary arranged between the first driver transistor and the second driver transistor in a second direction which is different from the first direction.
9. The semiconductor memory device according to claim 8 , wherein the voltage level of the first power supply voltage line is different from the voltage level of the second power supply voltage line.
10. A dynamic random access memory in a semiconductor device on a chip, the dynamic random access memory comprising;
a plurality of word lines;
a plurality of pairs of bit lines;
a plurality of memory cells coupled to the plurality of word lines and the plurality of pairs of bit lines;
a plurality of sense circuits each comprising:
a first PMOS transistor having a drain coupled to one of the corresponding pair of the of bit lines, a source and a gate; and
a second PMOS transistor having a drain coupled to the other of the corresponding pair of the of bit lines, a source coupled to the source of the first PMOS transistor and a gate coupled to the drain of the first NMOS transistor;
a first NMOS transistor having a drain coupled to the drain of the first PMOS transistor, a gate coupled to the gate of the first PMOS transistor and a source; and
a second NMOS transistor having a drain coupled to the drain of the second PMOS transistor, a gate coupled to the gate of the second PMOS transistor and a source coupled to the source of the first PMOS transistor;
drivers each comprising:
a third PMOS transistor having a source-drain path coupled between a first power supply line and the source of the first PMOS transistor; and
a third NMOS transistor having a source-drain path coupled between the source of the first NMOS transistor (QN 1 ) and a second power supply line;
a first region where the first and second PMOS transistors are arranged in a first direction (Y direction) on the chip;
a second region where the first and second NMOS transistors are arranged in the first direction on the chip;
a third region between the first region and the second region and where the third PMOS and NMOS transistors are alternately arranged in the first direction; and
fourth regions between the third PMOS transistor and the NMOS transistor in the third region and where element separation boundaries are arranged.
11. A dynamic random access memory according to claim 10 ,
wherein the element separation boundaries are arranged in a second direction different from the first direction.
12. A dynamic random access memory in a semiconductor device on a chip, the dynamic random access memory comprising;
a plurality of word lines arranged in a first direction;
a plurality of pairs of bit lines;
a plurality of memory cells coupled to the plurality of word lines and the plurality of pairs of bit lines;
a plurality of sense circuits each comprising:
a first PMOS transistor having a drain coupled to one of the corresponding pair of the of bit lines, a source and a gate; and
a second PMOS transistor having a drain coupled to the other of the corresponding pair of the of bit lines, a source coupled to the source of the first PMOS transistor and a gate coupled to the drain of the first NMOS transistor;
a first NMOS transistor having a drain coupled to the drain of the first PMOS transistor, a gate coupled to the gate of the first PMOS transistor and a source; and
a second NMOS transistor having a drain coupled to the drain of the second PMOS transistor, a gate coupled to the gate of the second PMOS transistor and a source coupled to the source of the first PMOS transistor;
drivers each comprising:
a third PMOS transistor having a source-drain path coupled between a first power supply line and the source of the first PMOS transistor; and
a third NMOS transistor having a source-drain path coupled between the source of the first NMOS transistor and a second power supply line;
a first region where the first and second PMOS transistors are formed;
a second region where the first and second NMOS transistors are formed;
a third region where the third PMOS transistor is formed;
a fourth region where the third NMOS transistor is formed; and
an element separation boundary extending in a fifth region arranged between the third region and the fourth region; and
wherein the third, the fourth and the fifth regions are arranged in the first direction; and
wherein in the fifth region, the element separation boundary is arranged in a second direction intersecting with the first direction.
13. A dynamic random access memory according to claim 12 ,
wherein the bit lines are arranged in the second direction.
14. A dynamic random access memory according to claim 12 ,
wherein the first direction is perpendicular to the second direction.
15. A dynamic random access memory according to claim 12 ,
wherein the third, the fourth and the fifth regions are arranged between the first region and the second region.
16. A dynamic random access memory according to claim 15 ,
wherein the element separation boundary further extends between the first region and the third NMOS transistor.
17. A dynamic random access memory according to claim 15 ,
wherein the element separation boundary further extends between the first region and the third NMOS transistor and is arranged in the first direction perpendicular to the second direction.
18. A dynamic random access memory according to claim 15 ,
wherein the element separation boundary further extends between the second region and the third PMOS transistor.
19. A dynamic random access memory according to claim 15 ,
wherein the element separation boundary further extends between the second region and the third PMOS transistor and is arranged in the first direction perpendicular to the second direction.