Method of fabricating light-scattering substrate
A method of fabricating a light-scattering substrate, a light-scattering substrate fabricated by the same method, and an organic light-emitting device (OLED) including the same light-scattering substrate, in which a light-scattering layer of the light-scattering substrate can improve a light extraction efficiency. The method fabricates the light-scattering substrate by chemical vapor deposition, and includes loading a base substrate into a chamber, and forming a light-scattering layer on the base substrate by supplying a Ti source and an oxidizer including H 2 O into the chamber. In the process of forming the light-scattering layer, the mole ratio of the H 2 O with respect to the Ti is 10 or greater.
1. A method of fabricating a light-scattering substrate of an organic light emitting device, the method comprising:
loading a base substrate into a chamber; and
forming a light-scattering layer on the base substrate by chemical vapor deposition such that the light-scattering layer is disposed between the base substrate and an organic light-emitting layer of the organic light emitting device, by supplying a Ti source and an oxidizer including H 2 O into the chamber, thereby producing the light-scattering substrate of the organic light emitting device scattering light generated by the organic light emitting layer, while the light is emitted outward through the light scattering substrate,
wherein, in the process of forming the light-scattering layer, a mole ratio of the H 2 O with respect to the Ti is 10 or greater.
2. The method according to claim 1 , wherein the oxidizer further includes at least one selected from the group consisting of O 2 , O 3 and alcohol.
3. The method according to claim 1 , wherein the Ti source comprises Ti{OCH(CH 3 ) 2 } 4 or TiCl 4 .
4. The method according to claim 1 , wherein forming the light-scattering layer is carried out when a temperature of the base substrate ranges from 200 to 350° C.
5. The method according to claim 1 , wherein forming the light-scattering layer comprises forming TiO 2 particles and a TiO 2 thin film which bonds the TiO 2 particles to the base substrate.
6. The method according to claim 1 , further comprising forming a planarization layer on the light-scattering layer after forming the light-scattering layer.
7. The method according to claim 6 , wherein the planarization layer is made of one selected from the group consisting of SiO 2 , TiO 2 and polymer resin.