Device isolation for III-V substrates
View Patent ↗Techniques for device isolation for III-V semiconductor substrates are provided. In one aspect, a method of fabricating a III-V semiconductor device is provided. The method includes the steps of: providing a substrate having an indium phosphide (InP)-ready layer; forming an iron (Fe)-doped InP layer on the InP-ready layer; forming an epitaxial III-V semiconductor material layer on the Fe-doped InP layer; and patterning the epitaxial III-V semiconductor material layer to form one or more active areas of the device. A III-V semiconductor device is also provided.
1. A III-V semiconductor device, comprising:
a substrate having an indium phosphide-ready layer;
an iron-doped indium phosphide layer on the indium phosphide-ready layer; and
an epitaxial III-V semiconductor material layer on the iron-doped indium phosphide layer, wherein the epitaxial III-V semiconductor material layer is patterned into one or more active areas of the device, and wherein the epitaxial III-V semiconductor material layer is patterned to form one or more mesas which comprise the one or more active areas of the device.
2. The device of claim 1 , further comprising:
a buffer layer on the iron-doped indium phosphide layer such that the buffer layer is present between the iron-doped indium phosphide layer and the epitaxial III-V semiconductor material layer.
3. The device of claim 2 , wherein the buffer layer comprises indium aluminum arsenide or intrinsic indium phosphide.
4. The device of claim 2 , wherein the buffer layer comprises an oxide insulator.
5. The device of claim 1 , wherein the substrate comprises a graded III-V buffer layer on a silicon substrate, wherein a portion of the graded III-V buffer layer is the indium phosphide-ready layer, and wherein the InP-ready layer comprises indium phosphide, indium gallium arsenide, or indium aluminum arsenide.
6. The device of claim 1 , wherein the epitaxial III-V semiconductor material layer comprises a material selected from the group consisting of aluminum gallium arsenide, aluminum gallium nitride, aluminum indium arsenide, aluminum nitride, gallium antimonide, gallium arsenide, gallium nitride, indium antimonide, indium arsenide, indium gallium arsenide, indium gallium nitride, indium nitride, indium phosphide, indium gallium arsenide phosphide and combinations comprising at least one of the foregoing materials.
7. The device of claim 1 , wherein the epitaxial III-V semiconductor material layer comprises indium gallium arsenide.