Fluid ejection chip including hydrophilic and hydrophopic surfaces and methods of forming the same
View Patent ↗A fluid ejection chip and associated methods of forming are disclosed. According to an exemplary embodiment, the fluid ejection chip comprises a substrate, a flow feature layer, and a nozzle layer. The flow feature layer is disposed over the substrate and has an exposed hydrophilic surface layer with an ink contact angle of about 80 degrees. The nozzle layer is disposed over the flow feature layer and has a thickness of about 4 microns to about 8 microns and an exposed hydrophobic surface layer having an ink contact angle of about 115 degrees.
1. A method of coating a fluid ejection chip, the fluid ejection chip comprising a substrate, a flow feature layer disposed over the substrate, and a nozzle layer comprising one or more nozzles disposed over the flow feature layer, the method comprising:
forming a first layer over the fluid ejection chip;
forming a second layer over the first layer;
applying, after forming the second layer, a first masking layer in substantially planar abutment with a top surface of the nozzle layer to form a covered surface of the fluid ejection chip that is covered by the first masking layer and to form exposed surfaces of the fluid election chip;
forming hydrophilic layer at the exposed surfaces of the fluid election chip;
reacting the hydrophilic layer with the second layer to form a uniform layer that encapsulates portions of the fluid ejection chip at the exposed surfaces;
removing the first masking layer after the reacting; and
forming, after forming the hydrophilic layer, a hydrophobic layer at one or more portions of the top surface of the nozzle layer.
2. The method of claim 1 , wherein the hydrophilic layer is a self-assembled monolayer.
3. The method of claim 1 , wherein the step of forming the first layer comprises at least one of chemical vapor deposition (CVD), sputtering, spin coating, plasma deposition, atomic deposition, or physical vapor deposition (PVD).
4. The method of claim 1 , wherein the hydrophilic layer comprises a silane material.
5. The method of claim 1 , wherein the step of forming the second layer comprises at least one of chemical vapor deposition (CVD), sputtering, spin coating, plasma deposition, atomic deposition, or physical vapor deposition (PVD).
6. The method of claim 1 , further comprising the step of applying a second masking layer to a bottom surface of the substrate following removal of the first masking layer.
7. The method of claim 6 , further comprising the step of removing the second masking layer after formation of the hydrophobic layer.
8. The method of claim 1 , wherein the step of removing the first masking layer results in exposure of a portion of the nozzle layer that is devoid of the hydrophilic layer.