Semiconductor device having groove-shaped via-hole
View Patent ↗The semiconductor device has insulating films 40, 42 formed over a substrate 10 ; an interconnection 58 buried in at least a surface side of the insulating films 40, 42 ; insulating films 60, 62 formed on the insulating film 42 and including a hole-shaped via-hole 60 and a groove-shaped via-hole 66 a having a pattern bent at a right angle; and buried conductors 70, 72 a buried in the hole-shaped via-hole 60 and the groove-shaped via-hole 66 a . A groove-shaped via-hole 66 a is formed to have a width which is smaller than a width of the hole-shaped via-hole 66 . Defective filling of the buried conductor and the cracking of the inter-layer insulating film can be prevented. Steps on the conductor plug can be reduced. Accordingly, defective contact with the upper interconnection layer and the problems taking place in forming films can be prevented.
1. A semiconductor device comprising:
a substrate;
a first conductive layer formed above the substrate;
a first guard ring which includes a first conductor formed in a first groove-shaped via-hole in a first insulating film, the first conductor being connected to the substrate; and
a second guard ring which includes a second conductor formed in a second groove-shaped via-hole in the first insulating film, the second conductor being connected to the substrate;
wherein:
the second guard ring is surrounded by the first guard ring in a plan view;
the first conductor and the second conductor are connected to the first conductive layer;
the first guard ring is connected to a first aluminum pattern; and
each of the first groove-shaped via-hole and the second groove-shaped via-hole includes a pattern bent twice each time at an inner angle of larger than 90 degrees at each of four corners of the device in a plan view.
2. The semiconductor device according to claim 1 ,
wherein the first insulating film includes a silicon oxycarbide film.
3. The semiconductor device according to claim 1 ,
wherein the first insulating film includes a PSG film.
4. The semiconductor device according to claim 1 , further comprising a second insulating film, which includes a silicon oxycarbide film, formed above the first insulating film.
5. The semiconductor device according to claim 1 , wherein the first conductor and the second conductor include a tungsten film and a titanium nitride film.
6. The semiconductor device according to claim 4 , further comprising a third insulating film, which includes a silicon oxycarbide film, formed above the second insulating film.
7. The semiconductor device according to claim 1 , further comprising a second insulating film formed above the first insulating film,
wherein
the first conductive layer is formed in the second insulating film.
8. The semiconductor device according to claim 1 , wherein the first insulating film includes silicon and oxygen.
9. The semiconductor device according to claim 1 , wherein the first conductive layer includes copper.
10. The semiconductor device according to claim 9 , wherein
the first conductive layer includes tantalum.
11. The semiconductor device according to claim 1 , further comprising
a third guard ring formed above the substrate, and
a fourth guard ring formed above the substrate,
wherein
the third guard ring includes a third conductor formed in a third groove-shaped via-hole in the first insulating film,
the fourth guard ring includes a fourth conductor formed in a fourth groove-shaped via-hole in the first insulating film,
the third conductor is connected to the first conductive layer, and
the fourth conductor is connected to the first conductive layer.
12. The semiconductor device according to claim 11 , further comprising a second aluminum pattern formed above the substrate, wherein
the third guard ring is connected to the second aluminum pattern.
13. The semiconductor device according to claim 12 , wherein
the third groove-shaped via-hole include a pattern bent twice each time at an inner angle of larger than 90 degrees at each of the four corners of the device in a plan view.
14. The semiconductor device according to claim 11 , wherein
the first conductor, the second conductor, the third conductor and the fourth conductor include tungsten,
the first insulating film includes silicon and oxygen, and
the first conductive layer includes copper.
15. The semiconductor device according to claim 14 , wherein
the first conductor, the second conductor, the third conductor and the fourth conductor include titanium nitride, and
the first conductive layer includes tantalum.
16. The semiconductor device according to claim 1 , wherein the first conductive layer includes damascene structure.
17. The semiconductor device according to claim 11 , wherein the first conductive layer includes damascene structure.
18. The semiconductor device according to claim 1 , wherein
the first conductor, the second conductor and the first conductive layer are formed in the first insulating film.
19. The semiconductor device according to claim 11 , wherein
the first conductor, the second conductor, the third conductor, the fourth conductor and the first conductive layer are formed in the first insulating film.
20. The semiconductor device according to claim 19 , wherein
the first conductor, the second conductor, the third conductor, the fourth conductor and the first conductive layer include copper.