Structure and method for integrated circuit
The present disclosure provides many different embodiments of an IC device. The IC device includes a gate stack disposed over a surface of a substrate and a spacer disposed along a sidewall of the gate stack. The spacer has a tapered edge that faces the surface of the substrate while tapering toward the gate stack. Therefore the tapered edge has an angle with respect to the surface of the substrate.
1. An integrated circuit comprising:
a gate stack disposed over a surface of a substrate;
a spacer disposed along a sidewall of the gate stack, the spacer including:
an inclined edge that faces the surface while inclining toward the gate stack, wherein the inclined edge has an angle with respect to the surface of the substrate,
another edge that is substantially perpendicular to the surface of the substrate that physically contacts the inclined edge, wherein the another edge includes a portion that extends towards the surface of the substrate beyond the point of contact with the inclined edge,
an outer edge that is further away from the gate stack than any other edge of the spacer, the outer edge physically contacting the inclined edge such that the inclined edge extends from the outer edge to the another edge, wherein the outer edge is substantially perpendicular to the surface of the substrate, and
an inner edge that opposes the portion of the another edge such that the inner edge is closer to the gate stack than the another edge, the inner edge physically contacting the gate stack and the spacer being formed of the same material extending from the inner edge to the inclined edge; and
a first source/drain feature disposed in the substrate adjacent the gate stack, the first source/drain feature including a first semiconductor material that physically contacts the inclined edge and the another edge.
2. The device of claim 1 , wherein the angle is greater than about 10 degree.
3. The device of claim 1 , wherein the first source/drain feature is a raised source/drain feature.
4. The device of claim 1 , wherein the gate stack is a high-k/metal gate stack.
5. The device of claim 1 , further comprising:
a p-type field-effect transistor (PFET) region and an n-type field-effect transistor (NFET) region over the substrate;
the gate stack with the spacer in the PFET region; and
another gate stack with another spacer in the NFET region.
6. The device of claim 5 , further comprising a second source/drain feature disposed in the substrate adjacent the another gate stack, the second source/drain featuring including a second semiconductor material that is different than the first semiconductor material.
7. The device of claim 6 , wherein the first semiconductor material includes epitaxial silicon germanium (SiGe) and the second semiconductor material includes silicon phosphorous (SiP).
8. An integrated circuit comprising:
a substrate having a p-type field-effect transistor (PFET) region and an n-type field-effect transistor (NFET) region;
a first high-k/metal gate (HK/MG) stack protrudes above a surface of the substrate in a vertical direction in the PFET region;
a second HK/MG stack protrudes above a surface of the substrate in a vertical direction in the NFET region;
spacers along sidewalls of the first and second HK/MG stacks, having a slanted bottom edge towards the respective HK/MG stack, wherein the slanted bottom edge has an angle (θ) with respect to a horizontal surface of the substrate, wherein the spacer disposed along the first HK/MG stack includes:
another edge that is substantially perpendicular to the horizontal surface of the substrate that physically contacts the slanted bottom edge, wherein the another edge includes a portion that extends towards the horizontal surface of the substrate beyond the point of contact with the slanted bottom edge,
an outer edge that is further away from the first HK/MG stack than any other edge of the spacer, the outer edge physically contacting the slanted bottom edge such that the slanted bottom edge extends from the outer edge to the another edge, wherein the outer edge is substantially perpendicular to the horizontal surface of the substrate, and
an inner edge that opposes the portion of the another edge such that the inner edge is closer to the first HK/MG stack than the another edge, the inner edge physically contacting the first HK/MG stack and the spacer disposed along the first HK/MG stack being formed of the same material extending from the inner edge to the slanted bottom edge;
a first stressor feature adjacent to the first HK/MG stack, including underneath the slanted bottom edge of the spacer, the first stressor including a first semiconductor material that physically contacts the slanted bottom edge and the another edge; and
a second stressor feature adjacent to the second HK/MG stack, including underneath the slanted bottom edge of the spacer.
9. The device of claim 8 , wherein the angle (θ) is larger than about 10 degree.
10. The device of claim 8 , wherein a vertical difference from an outer edge to an inner edge at a bottom of the spacer is in a range of about 5 nm to about 10 nm.
11. The device of claim 8 , wherein the first semiconductor material includes epitaxial silicon germanium (SiGe) and the second stressor feature includes silicon phosphorous (SiP).
12. The method of claim 1 , wherein the another edge faces away from the gate stack.
13. The method of claim 8 , wherein the another edge faces away from the first HK/MG stack.