IP Library Granted Patent US 9,465,383
Granted Patent B2
US 9,465,383 · App. 14/311,856 · Granted Oct 11, 2016

Apparatus and method of using an imaging device for adjustment of at least one handling device for handling semiconductor components

Inventors: Hing Suen Siu (Kwai Chung, HK); Yu Sze Cheung (Kwai Chung, HK); Chi Wah Cheng (Tsing Yi, HK); Chung Yan Lau (Kwai Chung, HK)
Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
G05B19/4182G05B2219/39106G05B2219/40554G05B2219/45031G05B2219/45054Y02P90/083
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Quick Facts
Patent No.
US 9,465,383
App. No.
14/311,856
Granted
Oct 11, 2016
Kind
B2
Abstract

Disclosed is an apparatus for handling electronic components. The apparatus comprises: i) a rotary device and a plurality of pick heads arranged circumferentially around the rotary device, each pick head being operable to hold an electronic component; ii) a position-determining device for determining an arrangement of the electronic components as held by the respective pick heads; iii) a fiducial mark arranged in a position that is indicative of the arrangement of the electronic components, as determined by the position-determining device; iv) a first imaging device arranged relative to the fiducial mark; and v) at least one handling device for handling the electronic components. Specifically, the first imaging device is operable to capture at least one image comprising the fiducial mark and the at least one handling device so that a position of the at least one handling device is adjustable to align the at least one handling device with respect to the arrangement of the electronic components, based on an offset between the fiducial mark and the at least one handling device as derived from the at least one image captured by the first imaging device. A method of adjusting the position of at least one handling device of an apparatus for handling electronic components is also disclosed.

Claims (25)

1. An apparatus for handling electronic components, the apparatus comprising:

a rotary device and a plurality of pick heads arranged circumferentially around the rotary device, each pick head being operable to hold an electronic component;

a position-determining device for determining an arrangement of the electronic components as held by the respective pick heads;

a fiducial mark arranged in a position that is indicative of the arrangement of the electronic components, as determined by the position-determining device;

a first imaging device arranged relative to the fiducial mark; and

at least one handling device for handling the electronic components,

wherein the first imaging device is operable to capture at least one image comprising the fiducial mark and the at least one handling device so that a position of the at least one handling device is adjustable to align the at least one handling device with respect to the arrangement of the electronic components, based on an offset between the fiducial mark and the at least one handling device as derived from the at least one image captured by the first imaging device.

2. The apparatus of claim 1 , wherein the at least one handling device is motorized and is operable to automatically align with respect to the arrangement of the electronic components.

3. The apparatus of claim 1 , wherein the position-determining device is a precisor module which is operable to set the arrangement of the electronic components as held by the respective pick heads.

4. The apparatus of claim 1 , wherein the position-determining device is a second imaging device which is operable to determine the arrangement of the electronic components.

5. The apparatus of claim 4 , wherein the fiducial mark is movable to align with respect to an optical centre of the second imaging device.

6. The apparatus of claim 5 , wherein the first imaging device is movable to align an optical centre of the first imaging device with respect to the aligned fiducial mark.

7. The apparatus of claim 6 , wherein the at least one handling device is movable to align with respect to the optical centre of the first imaging device.

8. The apparatus of claim 1 , further comprising an optical device which is operable to transmit respective images of the fiducial mark and the at least one handling device to the first imaging device.

9. The apparatus of claim 8 , wherein the optical device is a device selected from a group consisting of: i) a beam-splitter; ii) a mirror; and iii) a prism.

10. A method of adjusting the position of at least one handling device of an apparatus for handling electronic components, the apparatus comprising a rotary device and a plurality of pick heads arranged circumferentially around the rotary device, the method comprising the steps of:

determining an arrangement of the electronic components as held by the respective pick heads using a position-determining device;

capturing at least one image comprising the fiducial mark and the at least one handling device using a first imaging device, wherein the fiducial mark is arranged in a position that is indicative of the arrangement of the electronic components, as determined by the position-determining device; and

adjusting the position of the at least one handling device to align the at least one handling device with respect to the arrangement of the electronic components, based on an offset between the fiducial mark and the at least one handling device as derived from the at least one image captured by the first imaging device.

11. The method of claim 10 , wherein the at least one handling device is motorized, and the step of adjusting the position of the least handling device is automatically performed.

12. The method of claim 10 , wherein the position-determining device is a second imaging device, and the method comprises the step of capturing respective images of the electronic components to determine the arrangement of the electronic components.

13. The method of claim 12 , further comprising the step of positioning the second imaging device such that an optical centre of the second imaging device is aligned with respect to the arrangement of the electronic components.

14. The method of claim 13 , further comprising the step of positioning the fiducial mark such that the fiducial mark is aligned with respect to the optical centre of the second imaging device.

15. The method of claim 14 , further comprising the step of positioning the first imaging device such that an optical centre of the first imaging device is aligned with respect to the aligned fiducial mark.

16. The method of claim 15 , wherein the step of adjusting the position of the at least one handling device comprises aligning the at least one handling device with respect to the optical centre of the first imaging device.

Assignments (2)
CHANGE OF NAME Recorded Jan 20, 2023
From: ASM TECHNOLOGY SINGAPORE PTE LTD
To: ASMPT SINGAPORE PTE. LTD.
Reel/Frame 062444/0830 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 23, 2014
From: SIU, HING SUEN; CHEUNG, YU SZE; CHENG, CHI WAH; LAU, CHUNG YAN
To: ASM TECHNOLOGY SINGAPORE PTE LTD
Reel/Frame 033158/0278 →
Continuity (3)
Provisional Application 61839922 · Jun 27, 2013
Provisional Application 61930744 · Jan 23, 2014
Related Publication 20150370244A1 · Dec 24, 2015