Superlattice structures and infrared detector devices incorporating the same
View Patent ↗Embodiments of strain-balanced superlattice infrared detector devices and their fabrication are disclosed. In one embodiment, an infrared detector device includes a first contact layer, and absorber superlattice region, a wider gap unipolar barrier region, and a second contact layer. The absorber superlattice region has a period defined by a first InAs layer, strain-balancing structure, a second InAs layer, and an InAsSb layer. The strain-balancing structure comprises an arbitrary alloy layer sequence containing at least one constituent element of aluminum or phosphor, e.g., InGaAs, AlInAs InAsP. In another embodiment, the absorber superlattice region has a period defined by a first InAs layer, first strain-balancing structure, a second InAs layer, a first GaSb layer, a second strain-balancing structure, and a second GaSb layer. The first strain-balancing structure includes at least one constituent element of aluminum or phosphor, e.g., InGaAs, AlInAs InAsP. The second strain-balancing structure includes GaInSb and GaSb.
1. An infrared detector device comprising:
a first contact layer;
an absorber superlattice region having a period defined by a first InAs layer, a strain-balancing structure, a second InAs layer, and an InAsSb layer, wherein the strain-balancing structure comprises an alloy sequence comprising at least one constituent element of aluminum and phosphorus;
a unipolar electron or hole barrier layer adjacent to the absorber superlattice region; and
a second contact layer adjacent to the unipolar electron or hole barrier layer.
2. The infrared detector device as claimed in claim 1 , wherein the strain-balancing structure comprises a first InGaAs layer, an AlInAs layer, and a second InGaAs layer.
3. The infrared detector device as claimed in claim 1 , wherein:
the absorber superlattice region is doped p-type; and
one or more layers of the absorber superlattice region comprise aluminum, wherein the aluminum provides for self passivation that prevents formation of an electrical short on sidewalls of the infrared detector device.
4. The infrared detector device as claimed in claim 1 , wherein:
the absorber superlattice region is doped p-type; and
the unipolar electron or hole barrier layer is a unipolar hole barrier layer that comprises aluminum, wherein the aluminum provides for self passivation that prevents formation of an electrical short on sidewalls of the infrared detector device.
5. The infrared detector device as claimed in claim 4 , wherein one or more layers of the absorber superlattice region comprises aluminum.
6. An infrared detector device comprising: a first contact layer; an absorber superlattice region, the absorber superlattice region having a period defined by a first InAs layer, a strain-balancing structure, a second InAs layer, and a GaSb layer, wherein the strain-balancing structure comprises a single strain-balancing layer or a sequence of strain-balancing layers; a unipolar electron or hole barrier layer adjacent to the absorber superlattice region, and a second contact layer adjacent to the unipolar electron or hole barrier layer.
7. The infrared detector device as claimed in claim 6 , wherein the GaSb layer comprises a first GaSb layer, a second GaSb layer, and a second strain balancing structure disposed between the first GaSb layer and the second GaSb layer.
8. The infrared detector device as claimed in claim 6 , wherein the second strain balancing structure comprises an sequence of GaInSb and GaSb layers.
9. The infrared detector device as claimed in claim 6 , wherein the strain-balancing structure comprises an alloy sequence comprising at least one of a constituent element of aluminum and phosphorus.
10. The infrared detector device as claimed in claim 9 , wherein the alloy sequence comprises at least one of InGaAs, AlInAs, and InAsP.
11. The infrared detector device as claimed in claim 6 , wherein:
the absorber superlattice region is doped p-type; and
one or more layers of the absorber superlattice region comprise aluminum, wherein the aluminum provides for self passivation that prevents formation of an electrical short on sidewalls of the infrared detector device.
12. The infrared detector device as claimed in claim 6 , wherein:
the absorber superlattice region is doped p-type; and
the unipolar electron or hole barrier layer is a unipolar hole barrier layer that comprises aluminum, wherein the aluminum provides for self passivation that prevents formation of an electrical short on sidewalls of the infrared detector device.
13. The infrared detector device as claimed in claim 12 , wherein one or more layers of the absorber superlattice region comprises aluminum.
14. An infrared detector device comprising:
a first contact layer;
an absorber superlattice region having a period defined by:
an AlInAs layer; and
two or more alternating InAsSb layers of an InAsSb y1 layer and an InAsSb y2 layer;
a unipolar electron or hole barrier layer adjacent to the absorber superlattice region, and
a second contact layer adjacent to the unipolar electron or hole barrier layer.
15. The infrared detector device as claimed in claim 14 , wherein y 1 is different from y 2 .
16. The infrared detector device of claim 14 , wherein the period of the absorber superlattice region is further defined by a first InAs layer adjacent to the AlInAs layer and a second InAs layer adjacent to the two or more alternating InAsSb layers.