IP Library Granted Patent US 9,397,118
Granted Patent B2
US 9,397,118 · App. 14/318,846 · Granted Jul 19, 2016

Thin-film ambipolar logic

Inventors: Bahman Hekmatshoartabari (White Plains, NY); Ghavam G. Shahidi (Pound Ridge, NY)
Assignee: International Business Machines Corporation
H01L27/1222H01L21/2855H01L21/76251H01L27/1259H01L29/45H01L29/66742H01L29/66772H01L29/78654
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Quick Facts
Patent No.
US 9,397,118
App. No.
14/318,846
Granted
Jul 19, 2016
Kind
B2
Abstract

An ambipolar electronic device is disclosed. The device may include a field-effect transistor (FET), which may have a handle substrate layer, two contacts and an inorganic crystalline layer between the handle substrate layer and the contacts. The inorganic crystalline layer may have a doped channel region between the contacts. The FET may also have a dielectric layer between the contacts, attached to the inorganic crystalline layer, and a gate layer, attached to the dielectric layer. The FET may conduct current, in response to a first gate voltage applied to the gate layer, using electrons as a majority carrier, along the length of the channel region between the contacts. The FET may also conduct current, in response to a second gate voltage applied to the gate layer, using holes as a majority carrier, along the length of the channel region between the contacts.

Claims (35)

1. An ambipolar electronic device comprising:

a first FET (field-effect transistor) having:

a handle substrate layer;

a first contact;

a second contact;

an inorganic crystalline layer formed between a top surface of the handle substrate layer and the first and second contacts and having a channel region with a length extending between the first contact and the second contact;

a dielectric layer attached, between the first contact and the second contact, to a top surface of the inorganic crystalline layer; and

a gate layer, attached to a top surface of the dielectric layer;

wherein the first FET is configured to:

conduct current, in response to a first gate voltage applied to the gate layer and using electrons as a majority carrier, along the length of the channel region between the first contact and the second contact; and

conduct current, in response to a second gate voltage applied to the gate layer and using holes as a majority carrier, along the length of the channel region between the first contact and the second contact.

2. The electronic device of claim 1 , further comprising a buried insulator layer formed between the top surface of the handle substrate layer and the inorganic crystalline layer.

3. The electronic device of claim 1 , further comprising a metallic layer attached to a bottom surface of the handle substrate layer.

4. The electronic device of claim 1 , wherein a thickness of the inorganic crystalline layer is between 5 nm and 500 nm.

5. The electronic device of claim 1 , wherein the inorganic crystalline layer is one member of a group consisting of: predominantly silicon, predominantly germanium and predominantly silicon germanium.

6. The electronic device of claim 1 , wherein the first contact and the second contact include a metal with a work function within a range of +/−25% of an intrinsic Fermi energy in the channel region.

7. The electronic device of claim 6 , wherein the first contact and the second contact include a metal with a work function between 4.2 electron volts (eV) and 4.8 eV.

8. The electronic device of claim 6 , wherein the metal includes chromium.

9. The electronic device of claim 1 , wherein the dielectric layer has a dielectric constant between 3.9 and 25.

10. The electronic device of claim 1 , further comprising a second FET configured to provide ambipolar functionality in response to a gate voltage.

11. The electronic device of claim 10 , further comprising electrical connections that configure the first FET and the second FET as an inverter.

12. An ambipolar electronic device comprising:

a first FET (field-effect transistor) having:

a buried insulator layer attached to a top surface of handle substrate layer;

a first contact;

a second contact;

an inorganic crystalline layer formed between a top surface of the buried insulator layer and the first and second contacts and having a channel region with a length extending between the first contact and the second contact;

an insulating layer attached, between the first contact and the second contact, to a top surface of the inorganic crystalline layer;

a metallic layer formed below a bottom surface of the buried insulator layer;

wherein the first FET is configured to:

conduct current, in response to a first gate voltage applied to the metallic layer and using electrons as a majority carrier, along the length of the channel region between the first contact and the second contact; and

conduct current, in response to a second gate voltage applied to the metallic layer and using holes as a majority carrier, along the length of the channel region between the first contact and the second contact.

13. The electronic device of claim 12 , wherein the metallic layer is attached to a bottom surface of the handle substrate layer.

14. The electronic device of claim 12 , wherein the metallic layer is formed between a bottom surface of the buried insulator layer and the handle substrate layer.

15. The electronic device of claim 14 , wherein the metallic layer is patterned to overlap the channel region between the first contact and the second contact.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 26, 2020
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: ELPIS TECHNOLOGIES INC.
Reel/Frame 054528/0023 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 30, 2014
From: HEKMATSHOARTABARI, BAHMAN; SHAHIDI, GHAVAM G.
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 033208/0345 →
Continuity (1)
Related Publication 20150380440A1 · Dec 31, 2015