IP Library Granted Patent US 9,236,511
Granted Patent B2
US 9,236,511 · App. 14/323,651 · Granted Jan 12, 2016

Fabrication of ionic liquid electrodeposited Cu—Sn—Zn—S—Se thin films and method of making

Inventor: Raghu Nath Bhattacharya (Littleton, CO)
Assignee: Alliance for Sustainable Energy, LLC
H01L31/03923C25D3/665C25D5/10C25D5/50C25D7/12H01L21/02422H01L21/02491H01L21/02551H01L21/02568H01L21/02614H01L21/02628H01L31/0326H01L31/03925H01L31/072C25D3/22C25D3/30C25D3/38Y02E10/50
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 9,236,511
App. No.
14/323,651
Granted
Jan 12, 2016
Kind
B2
Abstract

A semiconductor thin-film and method for producing a semiconductor thin-films comprising a metallic salt, an ionic compound in a non-aqueous solution mixed with a solvent and processing the stacked layer in chalcogen that results in a CZTS/CZTSS thin films that may be deposited on a substrate is disclosed.

Claims (21)

1. A method for producing a semiconductor thin-film comprising:

(a) electrodepositing, onto a substrate, from an aqueous bath into which a first metallic salt has been dissolved, a first layer comprising a first metal;

(b) electrodepositing, onto the first layer, a second layer comprising a second metal;

(c) electrodepositing, onto the second layer, from a non-aqueous ionic liquid into which a second metallic salt has been dissolved, a third layer comprising a third metal; and

(d) annealing the first, second and third layers in chalcogen.

2. The method of claim 1 , wherein the first metallic salt comprises at least one of stannous chloride (SnCl 2 ) or stannic chloride (SnCl 4 ).

3. The method of claim 1 , wherein the chalcogen comprises at least one of selenium, sulfur, telluride, or polonium.

4. The method of claim 1 , wherein the ionic liquid comprises at least one of sodium sulfate, sodium fluoride, potassium fluoride, potassium bifluoride, sodium bifluoride, sodium chloride, zinc chloride, or potassium chloride.

5. The method of claim 1 , wherein the ionic liquid comprises choline chloride (C 5 H 14 ClNO).

6. The method of claim 5 , wherein the ionic liquid further comprises ethylene glycol.

7. The method of claim 1 , wherein the second layer is electrodeposited from a sulfonate-based solution into which a third metallic salt has been dissolved.

8. The method of claim 7 , wherein the sulfonate-based solution comprises a surfactant.

9. The method of claim 7 , wherein the sulfonate comprises at least one of a mesylate, a triflate, a tosylate, or a besylate.

10. The method of claim 1 , wherein the first metal comprises copper.

11. The method of claim 1 , wherein the second metal comprises tin.

12. The method of claim 1 , wherein the third metal comprises zinc.

13. The method of claim 1 , wherein at least one of electrodepositing the first layer, electrodepositing the second layer, and electrodepositing the third layer comprises using a plating current density in the range of approximately 1 to 8 mA/cm 2 .

14. The method of claim 1 , wherein the substrate comprises at least one of glass, chromium, molybdenum, silicon, silicon dioxide, aluminum oxide, sapphire, germanium, an alloy of silicon and germanium, or an alloy of indium phosphide (InP).

15. The method of claim 1 , wherein the substrate comprises glass coated with a molybdenum film.

16. The method of claim 1 , wherein the ionic liquid has a pH in the range of approximately 1-5.

17. The method of claim 1 , wherein the second metallic salt comprises at least one of zinc sulfate or zinc chloride.

Assignments (2)
CONFIRMATORY LICENSE Recorded Aug 11, 2015
From: ALLIANCE FOR SUSTAINABLE ENERGY, LLC
To: ENERGY, UNITED STATES DEPARTMENT OF
Reel/Frame 036354/0569 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 28, 2014
From: BHATTACHARYA, RAGHU
To: ALLIANCE FOR SUSTAINABLE ENERGY, LLC
Reel/Frame 033403/0853 →
Continuity (3)
Division 13731841 · Dec 31, 2012
Provisional Application 61581962 · Dec 30, 2011
Related Publication 20140322859A1 · Oct 30, 2014