Method for fabricating thin-film transistor
A method for fabricating a thin-film transistor is described. A structure is provided, including a substrate transmitting an excimer laser light, a diffusion prevention film on the substrate, a gate electrode and a gate insulating film on the diffusion prevention film, and an oxide semiconductor layer on the gate insulating film. The structure is irradiated with an excimer laser light from the side of the substrate, so that two outer regions of the oxide semiconductor layer beside the region corresponding to the gate electrode are irradiated by the excimer laser light, with the gate electrode as a mask, to be reduced in resistance and thereby one of the two outer regions forms a source region and the other one forms a drain region. The diffusion prevention film includes a SiN:F film containing fluorine in a SiN film.
1. A method for fabricating a thin-film transistor, comprising:
providing a structure that comprises:
a substrate transmitting an excimer laser light;
a diffusion prevention film formed on the substrate, preventing diffusion of impurities from the substrate;
a gate electrode and a gate insulating film covering the gate electrode, formed on the diffusion prevention film; and
an oxide semiconductor layer formed on the gate insulating film, wherein
the diffusion prevention film comprises a fluorinated silicon nitride film containing fluorine in a silicon nitride film; and
irradiating, with an excimer laser light, the structure from the side of the substrate, so that two outer regions of the oxide semiconductor layer beside a region corresponding to the gate electrode are irradiated by the excimer laser light, with the gate electrode as a mask, to be reduced in resistance and thereby one of the two outer regions forms a source region and the other one forms a drain region.
2. The method of claim 1 , wherein the gate insulating film comprises a fluorinated silicon nitride film containing fluorine in a silicon nitride film.
3. The method of claim 1 , wherein the structure before being irradiated with the excimer laser light further has a protection film covering the oxide semiconductor layer, and the protection film comprises a fluorinated silicon nitride film containing fluorine in a silicon nitride film.
4. The method of claim 2 , wherein the structure before being irradiated with the excimer laser light further has a protection film covering the oxide semiconductor layer, and the protection film comprises a fluorinated silicon nitride film containing fluorine in a silicon nitride film.
5. The method of claim 1 , wherein a proportion of fluorine in the fluorinated silicon nitride film ranges from 10 at % to 25 at %.
6. The method of claim 2 , wherein a proportion of fluorine in the fluorinated silicon nitride film ranges from 10 at % to 25 at %.
7. The method of claim 3 , wherein a proportion of fluorine in the fluorinated silicon nitride film ranges from 10 at % to 25 at %.
8. The method of claim 4 , wherein a proportion of fluorine in the fluorinated silicon nitride film ranges from 10 at % to 25 at %.
9. A method for fabricating a thin-film transistor, comprising:
providing a structure that comprises:
a substrate transmitting an excimer laser light;
a gate electrode and a gate insulating film covering the gate electrode, formed on the substrate; and
an oxide semiconductor layer formed on the gate insulating film, wherein
the gate insulating film comprises a fluorinated silicon nitride film containing fluorine in a silicon nitride film; and
irradiating, with an excimer laser light, the structure from the side of the substrate, so that two outer regions of the oxide semiconductor layer beside a region corresponding to the gate electrode are irradiated by the excimer laser light, with the gate electrode as a mask, to be reduced in resistance and thereby one of the two outer regions forms a source region and the other one forms a drain region.
10. The method of claim 9 , wherein the structure before being irradiated with the excimer laser light further has a protection film covering on the oxide semiconductor layer, and the protection film is composed of a fluorinated silicon nitride film containing fluorine in a silicon nitride film.
11. The method of claim 9 , wherein a proportion of fluorine in the fluorinated silicon nitride film ranges from 10 at % to 25 at %.
12. The method of claim 10 , wherein a proportion of fluorine in the fluorinated silicon nitride film ranges from 10 at % to 25 at %.
13. A method for fabricating a thin-film transistor, comprising:
providing a structure that comprises:
a substrate;
an oxide semiconductor layer formed on the substrate;
a gate insulating film formed on the oxide semiconductor layer; and
a gate electrode formed on the gate insulating film, wherein
the gate insulating film comprises a fluorinated silicon nitride film containing fluorine in a silicon nitride film; and
irradiating, with an excimer laser light, the structure from the side of the gate electrode, so that two outer regions of the oxide semiconductor layer beside a region corresponding to the gate electrode are irradiated by the excimer laser light, with the gate electrode as a mask, to be reduced in resistance and thereby one of the two outer regions forms a source region and the other one forms a drain region.
14. The method of claim 13 , wherein the structure before being irradiated by the excimer laser light further has a protection film covering the gate electrode and the gate insulating film, and the protection film comprises a fluorinated silicon nitride film containing fluorine in a silicon nitride film.
15. The method of claim 13 , wherein the structure before being irradiated by the excimer laser light further has a diffusion prevention film formed between the substrate and the oxide semiconductor layer for preventing diffusion of impurities from the substrate, and the diffusion prevention film comprises a fluorinated silicon nitride film containing fluorine in a silicon nitride film.
16. The method of claim 14 , wherein the structure before being irradiated by the excimer laser light further has a diffusion prevention film formed between the substrate and the oxide semiconductor layer for preventing diffusion of impurities from the substrate, and the diffusion prevention film comprises a fluorinated silicon nitride film containing fluorine in a silicon nitride film.
17. The method of claim 13 , wherein a proportion of fluorine in the fluorinated silicon nitride film is 10 to 25 at %.
18. The method of claim 14 , wherein a proportion of fluorine in the fluorinated silicon nitride film is 10 to 25 at %.
19. The method of claim 15 , wherein a proportion of fluorine in the fluorinated silicon nitride film is 10 to 25 at %.
20. The method of claim 16 , wherein a proportion of fluorine in the fluorinated silicon nitride film is 10 to 25 at %.
21. The method of claim 1 , wherein the fluorinated silicon nitride film is formed with an inductively coupled plasma (ICP) CVD method.
22. The method of claim 9 , wherein the fluorinated silicon nitride film is formed with an inductively coupled plasma (ICP) CVD method.