Semiconductor device
A field plate electrode is repetitively disposed in a folded manner or a spiral shape in a direction along an edge of a first circuit region. A coupling transistor couples a first circuit to a second circuit lower in supply voltage than the first circuit. A second conductivity type region is disposed around the coupling transistor. A part of the field plate electrode partially overlaps with the second conductivity type region. The field plate electrode is electrically coupled to a drain electrode of the coupling transistor at a portion located on the first circuit region side from a center thereof in a width direction of the separation region. A ground potential or a power potential of the second circuit is applied to the field plate electrode at a portion located on the second conductivity type region side from the center.
1. A semiconductor device, comprising:
a substrate;
a first circuit region that is formed on the substrate in which a first circuit whose power potential is a first voltage is formed;
a separation region that surrounds the first circuit region;
a second circuit region that is formed on the substrate, and located outside of the separation region in a plan view, in which a second circuit whose power potential is a second voltage lower than the first voltage; and
a coupling transistor that is located in the separation region, couples the second circuit to the first circuit, and has a source and a drain of a first conductivity type,
wherein the separation region includes:
an element separation film formed on the substrate;
a field plate electrode that overlaps with the element separation film in a plan view, and is repetitively disposed in a folded manner or a spiral shape in a direction along an edge of the first circuit region;
a second conductivity type region that is disposed on the substrate, overlaps with the element separation film in a plan view, and is located around the coupling transistor; and
a first conductivity region that is located on a side opposite to the source or the drain of the coupling transistor through the second conductivity type region,
wherein a part of the field plate electrode overlaps with a part of the second conductivity type region, and
wherein the field plate electrode is electrically coupled to a drain electrode of the coupling transistor at a portion located on the first circuit region side from a center thereof in a width direction of the separation region, and coupled to a ground potential or the second circuit at a portion located on the second circuit region side from the center.
2. The semiconductor device according to claim 1 ,
wherein the field plate electrode is electrically coupled to a drain electrode of the coupling transistor in an innermost periphery thereof.
3. The semiconductor device according to claim 1 ,
wherein a power potential or a ground potential of the second circuit is applied to an outermost periphery of the field plate electrode.
4. The semiconductor device according to claim 1 ,
wherein a plurality of the coupling transistors are spaced away from each other along the first circuit region,
wherein the field plate electrode is disposed for each of the plurality of coupling transistors, and
wherein the first circuit region is surrounded by the plurality of field plate electrodes.
5. The semiconductor device according to claim 4 ,
wherein two of the field plate electrodes are coupled to each other in the outermost periphery thereof.
6. The semiconductor device according to claim 1 ,
wherein the field plate electrode repetitively crosses the second conductivity type region in a plan view.
7. The semiconductor device according to claim 6 ,
wherein an interval between an edge of the first circuit region and an innermost periphery of the field plate electrode is larger than an interval between the innermost periphery and a second innermost periphery of the field plate electrode.