Microelectronic assemblies with integrated circuits and interposers with cavities, and methods of manufacture
Semiconductor integrated circuits ( 110 ) or assemblies are disposed at least partially in cavities between two interposers ( 120 ). Conductive vias ( 204 M) pass through at least one of the interposers or at least through the interposer's substrate, and reach a semiconductor integrated circuit or an assembly. Other conductive vias ( 204 M. 1 ) pass at least partially through multiple interposers and are connected to conductive vias that reach, or are capacitively coupled to, a semiconductor IC or an assembly. Other features are also provided.
1. A method for fabricating a microelectronic assembly, the method comprising:
obtaining a first structure comprising:
a plurality of interposers overlying one another and comprising a first interposer and a second interposer, each of the first and second interposers comprising a first side facing the other one of the first and second interposers and comprising a second side opposite to the first side, wherein at least the first interposer comprises one or more first contact pads at its first side; and
one or more first modules attached to the first interposer between the first and second interposers, at least one first module comprising a semiconductor integrated circuit and comprising one or more contact pads electrically coupled to the integrated circuit and to at least one first contact pad; and
wherein at least one of the first and second interposers comprises one or more first cavities, and at least part of each first module is located in a respective first cavity; and
after obtaining the first structure, forming one or more first conductive vias each of which passes through at least part of at least one of the first and second interposers to reach at least one respective first cavity and to physically contact, or be capacitively coupled to, circuitry of at least one respective first module at least partially located in the respective first cavity.
2. The method of claim 1 wherein at least one first conductive via enters at least one respective first module.
3. The method of claim 1 wherein at least one first conductive via enters a semiconductor substrate of at least one semiconductor integrated circuit of at least one first module.
4. The method of claim 1 wherein at least one first conductive via passes through a semiconductor substrate of at least one semiconductor integrated circuit of at least one first module.
5. The method of claim 1 wherein at least one first conductive via passes through at least part of each of the first and second interposers and through the respective first cavity.
6. The method of claim 1 wherein at least one first conductive via passes through at least part of the second interposer and enters at least one respective first module.
7. The method of claim 1 further comprising, after forming the one or more first conductive vias, attaching a second module to the second interposer's second side to electrically couple circuitry in the second module to at least one first conductive via which passes through at least part of the second interposer to enter a first module and electrically couple circuitry in the first module to circuitry in the second module.
8. The method of claim 1 wherein each first conductive via is formed in a respective first hole formed after obtaining the first structure.
9. The method of claim 1 further comprising:
forming one or more second holes each of which passes at least partially through at least one of the first and second interposers;
forming thermally conductive material in each second hole, the thermally conductive material having a higher thermal conductivity than at least one of the first and second interposers' portions which contains at least part of the second hole, the thermally conductive material having no electrical functionality.
10. The method of claim 1 further comprising forming one or more second conductive vias each of which at least partially passes through a set of two or more of the interposers.
11. The method of claim 10 wherein at least one second conductive via is electrically coupled to first conductive vias passing through at least parts of at least two of the interposers of the set.
12. The method of claim 10 wherein at least one second conductive via is formed after obtaining the first structure.
13. The method of claim 1 wherein each interposer has a substrate, and each first conductive via passes through the respective interposer's substrate.
14. The method of claim 13 wherein each substrate is a semiconductor substrate.