IP Library Granted Patent US 9,590,127
Granted Patent B2
US 9,590,127 · App. 14/335,095 · Granted Mar 7, 2017

Dual conversion gain image sensor cell

Inventor: Francois Roy (Seyssins, FR)
Assignee: STMicroelectronics (Crolles 2) SAS
H01L31/103H01L27/14612H01L27/14643H04N5/378
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Quick Facts
Patent No.
US 9,590,127
App. No.
14/335,095
Granted
Mar 7, 2017
Kind
B2
Abstract

An image sensor cell formed inside and on top of a substrate of a first conductivity type, including: a read region of the second conductivity type; and, adjacent to the read region, a storage region of the first conductivity type topped with a first insulated gate electrode. The first electrode is arranged to receive, in a first operating mode, a first voltage causing the inversion of the conductivity type of the storage region, so that the storage region behaves as an extension of the read region, and, in a second operating mode, a second voltage causing no inversion of the storage region.

Claims (52)

1. An image sensor cell, comprising:

a read region formed in a semiconductor substrate of a first conductively type, the read region being of a second conductivity type;

a photodiode that includes an accumulation region of the second conductivity type in the semiconductor substrate;

a transfer region of the semiconductor substrate separating the read region from the accumulation region;

a storage region of the first conductivity type adjacent to the read region;

a first insulated gate electrode formed on top of the storage region;

a second insulated gate electrode formed on top of the transfer region;

wherein said first insulated gate electrode is arranged to receive, in a first operating mode, a first voltage sufficient to cause an inversion of the conductivity type of the storage region and cause the storage region to behave as an extension of the read region, and, in a second operating mode, a second voltage insufficient to cause inversion of the storage region;

wherein the read region is configured to be charged to a voltage responsive to a reset signal and, after termination of the reset signal, the second insulated gate electrode is configured to receive an active transfer signal that causes inversion of the transfer region so that photogenerated charges in the accumulation region are transferred from the accumulation region through the transfer region to the read region and to the storage region responsive to the first insulated gate electrode receiving the first voltage and are transferred from the accumulation region through the transfer region to the read region responsive to the first insulated gate electrode receiving the second voltage;

wherein an output signal from the image sensor cell is based on the voltage on the read region after termination of the reset signal and prior to receiving the active transfer signal, and wherein the output signal is further based on a voltage on the read region after termination of the active transfer signal and while either the first voltage or the second voltage is received on the first insulated gate electrode;

wherein the output signal is further based on a first value of the voltage on the read region after termination of the reset signal and prior to receiving the active transfer signal when the second voltage is received on the first insulated gate electrode and is based on a second value of the voltage on the read region after termination of the reset signal and prior to receiving the active transfer signal when the first voltage is received on the first insulated gate electrode; and

wherein the output signal is further based on a first voltage on the read region after termination of the active transfer signal and while the first voltage is received on the first insulated gate electrode and the output signal is based on a second voltage on the read region after termination of the active transfer signal and while the second voltage is received on the first insulated gate electrode.

2. The image sensor cell of claim 1 , wherein the second voltage is such that, in the second operating mode, the storage region contains no photogenerated charges.

3. The image sensor cell of claim 1 , wherein the only region of the second conductivity type immediately adjacent to said storage region is the read region.

4. The image sensor cell of claim 1 , wherein the accumulation region and the read region coincide with each other or are adjacent to each other.

5. The image sensor cell of claim 1 , further comprising a reset transistor coupling the read region to a node configured to read a reset voltage.

6. The image sensor cell of claim 1 , further comprising:

an output track; and

a read stage coupling the read region to the output track.

7. An image sensor, comprising:

a plurality of image sensor cells, each image sensor cell including:

a read region formed in a semiconductor substrate of a first conductively type, the read region being of a second conductivity type;

a photodiode that includes an accumulation region of the second conductivity type in the semiconductor substrate;

a transfer region of the semiconductor substrate separating the read region from the accumulation region;

a storage region of the first conductivity type adjacent to the read region; and

a first insulated gate electrode formed on top of the storage region;

a second insulated gate electrode formed on top of the transfer region;

wherein said first insulated gate electrode is arranged to receive, in a first operating mode, a first voltage sufficient to cause an inversion of the conductivity type of the storage region and cause the storage region to behave as an extension of the read region, and, in a second operating mode, a second voltage insufficient to cause inversion of the storage region;

wherein the read region is configured to be charged to a voltage responsive to a reset pulse and, after termination of the reset pulse, the second insulated gate electrode is configured to receive a transfer pulse that causes inversion of the transfer region so that photo-generated charges in the accumulation region are transferred from the accumulation region through the transfer region to the read region and to the storage region responsive to the first insulated gate electrode receiving the first voltage and are transferred from the accumulation region through the transfer region to the read region responsive to the first insulated gate electrode receiving the second voltage;

wherein an output signal from the image sensor cell is based on the voltage on the read region after termination of the reset pulse and prior to receiving the transfer pulse, and wherein the output signal is further based on a voltage on the read region after termination of the transfer pulse and while either the first voltage or the second voltage is received on the first insulated gate electrode;

wherein the output signal from the image sensor cell is based on the voltage that is sensed on the read region after termination of the reset pulse and prior to receiving the transfer pulse while the second voltage is received on the first insulated gate electrode and wherein the output signal is further based on the voltage on the read region that is sensed after termination of the transfer pulse and while the second voltage is received on the first insulated gate electrode; and

wherein the first voltage is received on the first insulated gate electrode between the sensing of the voltage on the read region prior to receiving the transfer pulse and the sensing of the voltage on the read region after the termination of the transfer pulse.

8. The image sensor of claim 7 , wherein the second voltage is such that, in the second operating mode, the storage region contains no photogenerated charges.

9. The image sensor of claim 7 , wherein the only region of the second conductivity type immediately adjacent to said storage region is the read region.

10. The image sensor of claim 7 , wherein the accumulation region and the read region of each cell coincide with each other or are adjacent to each other.

11. The image sensor of claim 7 , wherein each cell includes a reset transistor coupling the read region of the cell to a node configured to read a reset voltage.

12. The image sensor of claim 7 , wherein each cell includes:

an output track; and

a read stage coupling the read region of the cell to the output track.

13. A method, comprising:

resetting a voltage of a read region of an image sensor cell that includes a storage region of a first conductivity type adjacent to the read region and a first insulated gate electrode formed on top of the storage region, the read region and storage region being formed in a semiconductor substrate of the first conductivity type, the read region being of a second conductivity type;

sensing a reference voltage of the read region after the resetting;

transferring photogenerated charge in an accumulation region of the second conductivity type in the semiconductor substrate to the read region after sensing the reference voltage;

isolating the accumulation region from the read region to terminate the transfer of photogenerated charge from the accumulation region to the read region;

sensing a voltage of the read region after the transferring;

applying a first voltage to said first insulated gate electrode in a first operating mode, the applying the first voltage causing an inversion of the conductivity type of the storage region and causing the storage region to behave as an extension of the read region;

applying a second voltage to said first insulated gate electrode in a second operating mode, the second voltage being insufficient to cause inversion of the storage region;

generating an output signal based upon the reference voltage, the voltage on the read region after isolating the accumulation region from the read region, and the first or second voltage applied to the first insulated gate electrode;

wherein sensing the reference voltage of the read region after the resetting includes sensing the reference voltage when the second voltage is applied to the first insulated gate electrode;

wherein sensing the voltage of the read region after the transferring includes sensing the voltage when the second voltage is applied to the first insulated gate electrode; and

applying the first voltage to the first insulated gate electrode between sensing the reference voltage and sensing the voltage of the read region.

14. The method of claim 13 , wherein the cell includes a transfer region of the first conductivity type separating the read region from the accumulation region through which the photogenerated charges are transferred from the accumulation region to the read region, and a second insulated gate electrode positioned on the transfer region, and wherein transferring photogenerated charge in an accumulation region to the read region comprises controlling said second insulated gate electrode to transfer photogenerated charges from the accumulation region to the read region prior to sensing the voltage of the read region and wherein isolating the accumulation region from the read region comprises controlling said second insulated gate electrode to terminate the transfer of photogenerated charges from the accumulation region to the read region.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 11, 2022
From: STMICROELECTRONICS (CROLLES 2) SAS
To: STMICROELECTRONICS INTERNATIONAL N.V.
Reel/Frame 060784/0143 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 6, 2015
From: ROY, FRANCOIS
To: STMICROELECTRONICS (CROLLES 2) SAS
Reel/Frame 036270/0810 →
Priority Claims (1)
FR 13 57064 · Jul 18, 2013 · national
Continuity (1)
Related Publication 20150021459A1 · Jan 22, 2015