Semiconductor device having a gap defined therein
In a particular embodiment, a method includes forming a first spacer structure on a dummy gate of a semiconductor device and forming a sacrificial spacer on the first spacer structure. The method also includes etching a structure of the semiconductor device to create an opening, removing the sacrificial spacer via the opening, and depositing a material to close to define a gap.
1. A semiconductor device comprising:
a gate;
a contact;
a spacer positioned between the gate and the contact; and
a source/drain region electrically coupled to the contact, wherein multiple surfaces of the spacer and a surface of the source/drain region defines a gap positioned between the gate and the contact, wherein the gap comprises an air gap or a vacuum gap,
wherein the spacer contacts the source/drain region, the gate and the source/drain region contact a substrate, and a height of the gap is less than a height of the gate.
2. The semiconductor device of claim 1 , wherein the gate, the contact, and the source/drain region are included in a fin field-effect transistor (FinFET) device.
3. The semiconductor device of claim 1 , wherein the gate, the contact, and the source/drain region are integrated into a mobile phone, a cellular phone, a portable computer, a radio, a satellite radio, a communication device, a portable music player, a portable digital video player, a navigation device, a personal digital assistant (PDA), a mobile location data unit, or a combination thereof.
4. The semiconductor device of claim 1 , wherein the gate, the contact, and the source/drain region are integrated into a set top box, an entertainment unit, a fixed location data unit, a desktop computer, a monitor, a computer monitor, a television, a tuner, a music player, a digital music player, a video player, a digital video player, a digital video disc (DVD) player, or a combination thereof.
5. The semiconductor device of claim 1 , wherein the contact is distinct from the source/drain region.
6. The semiconductor device of claim 1 , further comprising a dielectric material positioned between the contact and the gate, the dielectric material on the source/drain region.
7. The semiconductor device of claim 1 , further comprising the substrate in contact with the spacer.
8. The semiconductor device of claim 7 , wherein the substrate comprises silicon.
9. The semiconductor device of claim 1 , wherein the spacer comprises an oxide or a nitride.
10. The semiconductor device of claim 1 , wherein the spacer comprises silicon (Si), carbon (C), or boron (B).
11. The semiconductor device of claim 1 , further comprising the substrate, wherein the substrate further defines the gap, and wherein the spacer contacts the substrate.
12. The semiconductor device of claim 1 , wherein the spacer includes a first spacer structure and a second spacer structure, and wherein a first spacer material of the first spacer structure and a second spacer material of the second spacer structure are different materials.
13. The semiconductor device of claim 12 , further comprising the substrate, wherein the substrate, the first spacer structure, and the second spacer structure further define the gap.
14. An apparatus comprising:
means for activating a channel region of a semiconductor device, wherein the channel region is coupled to a source/drain region of the semiconductor device;
means for conducting current, the means for conducting coupled to the source/drain region; and
means for spacing, the means for spacing positioned between the means for activating and the means for conducting, wherein multiple surfaces of the means for spacing and a surface of the source/drain region defines a gap positioned between the means for activating and the means for conducting, wherein the gap comprises an air gap or a vacuum gap, wherein the means for spacing contacts the source/drain region, the means for activating the channel region and the source/drain region contact a substrate, and a height of the gap is less than a height of the means for activating the channel region.
15. The apparatus of claim 14 , wherein the means for activating the channel region and the means for conducting current are included in a fin field-effect transistor (FinFET) device.
16. The apparatus of claim 14 , wherein the means for activating the channel region and the means for conducting current are included in a mobile communication device.