IP Library Granted Patent US 9,040,907
Granted Patent B2
US 9,040,907 · App. 14/354,227 · Granted May 26, 2015

Method and apparatus for tuning an electrostatic ion trap

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Quick Facts
Patent No.
US 9,040,907
App. No.
14/354,227
Granted
May 26, 2015
Kind
B2
Abstract

An apparatus includes an electrostatic ion trap and electronics configured to measure parameters of the ion trap and configured to adjust ion trap settings based on the measured parameters. A method of tuning the electrostatic ion trap includes, under automatic electronic control, measuring parameters of the ion trap and adjusting ion trap settings based on the measured parameters.

Claims (48)

1. A method of tuning an electrostatic ion trap, the method comprising, under automatic electronic control:

i) measuring parameters of the ion trap, the trap including an ion source having an electron source;

ii) adjusting ion trap settings based on the measured parameters; and

iii) employing the ion trap settings and producing test spectra from a test gas at a specified pressure.

2. The method of claim 1 , wherein adjusting ion trap settings includes adjusting electron source settings.

3. The method of claim 1 , wherein measuring parameters of the ion trap further includes measuring an amount of ions being formed by collisions between electrons and a specified pressure of a test gas as a function of an electron source repeller bias.

4. The method of claim 3 , wherein adjusting ion trap settings further includes increasing the amount of ions being formed at an electron source filament current.

5. The method of claim 3 , further comprising setting the electron source repeller potential bias to a setting that yields a maximum baseline ion current at an electron source filament current.

6. The method of claim 3 , wherein increasing the amount of ions being formed includes increasing the amount of ions to a maximum of the amount of ions being formed at an electron source filament current.

7. The method of claim 1 , wherein measuring parameters of the ion trap includes measuring an ion initial potential energy distribution (IPED) within the trap at a specified pressure of a test gas.

8. The method of claim 7 , wherein measuring the IPED includes measuring an IPED onset value.

9. The method of claim 7 , wherein the trap further includes an ion exit gate having an ion exit gate potential bias, and wherein adjusting ion trap settings further includes providing relative adjustment between the ion initial potential energy distribution (IPED) and the ion exit gate potential bias.

10. The method of claim 9 , wherein providing relative adjustment between the IPED and the ion exit gate potential bias includes setting the ion exit gate potential bias based on an IPED onset value.

11. The method of claim 10 , wherein providing relative adjustment between the IPED onset value and the ion exit gate potential bias further includes setting an electron multiplier shield potential bias based on the IPED onset value.

12. The method of claim 9 , wherein providing relative adjustment between the IPED and the ion exit gate potential bias includes adjusting an electron source repeller potential bias and an electron source filament bias to yield a specified IPED onset value.

13. The method of claim 1 , wherein measuring parameters of the ion trap includes measuring a minimum amount of applied RF excitation required to detect an ion signal of a specific ion mass.

14. The method of claim 13 , further including setting the RF excitation to an operational RF excitation setting that yields a specified peak ratio.

15. The method of claim 13 , wherein measuring parameters of the ion trap further includes measuring the ion signal as a function of applied RF excitation.

16. The method of claim 1 , wherein measuring parameters of the ion trap includes measuring an ion initial potential energy distribution (IPED) onset value and measuring an ion excited potential energy distribution (EPED) onset value at a test RF excitation setting.

17. The method of claim 16 , further including setting the test RF excitation setting to an operational RF excitation setting that yields a specified difference between the EPED and IPED onset values.

18. The method of claim 16 , further including setting the test RF excitation setting to an operational RF excitation setting that yields a specified spectral resolution.

19. The method of claim 16 , further including setting the test RF excitation setting to an operational RF excitation setting that yields a specified dynamic range.

20. The method of claim 16 , further including setting the test RF excitation setting to an operational RF excitation setting that yields a specified peak ratio of specified peaks in test spectra.

21. An apparatus comprising:

i) an electrostatic ion trap, the trap including an ion source having an electron source; and

ii) electronics configured to measure parameters of the ion trap and configured to adjust ion trap settings based on the measured parameters and configured to employ the ion trap settings to produce test spectra from a test gas at a specified pressure.

22. The apparatus of claim 21 , wherein the electron source includes:

an entry slit assembly, including an entry plate having an entry plate potential bias;

a filament; and

a repeller that forms a beam of electrons from the filament and directs the electrons through the entry slit, the repeller having an extension located between the filament and the entry plate, the repeller shielding the filament from the entry plate potential.

23. The apparatus of claim 21 , wherein the electron source includes an entry slit assembly having an electrostatic lens located between the filament and the entry slit, the electrostatic lens collimating an electron beam from the filament through the entry slit.

24. The apparatus of claim 21 , wherein the electron source includes a unified electron source and entry slit assembly.

25. The apparatus of claim 21 , wherein adjusting ion trap settings includes adjusting electron source settings.

26. The apparatus of claim 21 , wherein the electronics are further configured to measure an amount of ions being formed by collisions between electrons and a specified pressure of a test gas and further configured to adjust electron source settings to increase the amount of ions being formed at an electron source filament current.

27. The apparatus of claim 26 , wherein increasing the amount of ions being formed includes increasing the amount of ions to a maximum of the amount of ions being formed at an electron source filament current.

28. The apparatus of claim 26 , wherein the electronics are further configured to set an electron source repeller potential bias to a setting that yields a maximum baseline ion current at an electron source filament current.

29. The apparatus of claim 21 , wherein the trap further includes an ion exit gate having an ion exit gate potential bias, and wherein the electronics are further configured to provide a relative adjustment between an ion initial potential energy distribution (IPED) and the ion exit gate potential bias.

30. The apparatus of claim 29 , wherein providing relative adjustment between the IPED and the ion exit gate potential bias includes setting the ion exit gate potential bias based on an IPED onset value.

31. The apparatus of claim 30 , wherein providing relative adjustment between the IPED and the ion exit gate potential bias further includes setting an electron multiplier shield potential bias based on the IPED onset value.

32. The apparatus of claim 29 , wherein providing relative adjustment between the IPED and the ion exit gate potential bias includes measuring an IPED onset value and adjusting an electron source repeller potential bias and an filament bias to yield a specified IPED onset value.

33. The apparatus of claim 21 , wherein the electronics are further configured to measure a minimum amount of applied RF excitation required to detect an ion signal of a specific ion mass.

34. The apparatus of claim 33 , wherein the electronics are further configured to set the RF excitation to an operational RF excitation setting that yields a specified peak ratio.

35. The apparatus of claim 33 , wherein the electronics are further configured to measure the ion signal as a function of applied RF excitation.

36. The apparatus of claim 21 , wherein measuring parameters of the ion trap includes measuring an ion initial potential energy distribution (IPED) onset value and an ion excited potential energy distribution (EPED) onset value at a test RF excitation setting.

37. The apparatus of claim 36 , wherein the electronics are further configured to set the test RF excitation setting to an operational RF excitation setting that yields a specified difference between the EPED and IPED onset values.

38. The apparatus of claim 36 , wherein the electronics are further configured to set the test RF excitation setting to an operational RF excitation setting that yields a specified spectral resolution.

39. The apparatus of claim 36 , wherein the electronics are further configured to set the test RF excitation setting to an operational RF excitation setting that yields a specified dynamic range.

40. The apparatus of claim 36 , wherein the electronics are further configured to set the test RF excitation setting to an operational RF excitation setting that yields a specified peak ratio of specified peaks in test spectra.

Assignments (9)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
SECURITY INTEREST Recorded Aug 19, 2022
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 061572/0069 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
RELEASE OF SECURITY INTEREST Recorded Feb 1, 2019
From: DEUTSCHE BANK AG NEW YORK BRANCH
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
Reel/Frame 048226/0095 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH
Reel/Frame 038663/0265 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC; BARCLAYS BANK PLC
Reel/Frame 038663/0139 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 28, 2014
From: BRUCKER, GERARDO A.; RATHBONE, G. JEFFERY; HORVATH, BRIAN J.; SWINNEY, TIMOTHY C.; BLOUCH, STEPHEN C.; MCCARTHY, JEFFREY G.; PIWONKA-CORLE, TIMOTHY R.
To: BROOKS AUTOMATION, INC.
Reel/Frame 032768/0436 →