Semiconductor device, method of manufacturing semiconductor device, solid-state imaging unit, and electronic apparatus
A semiconductor device includes, in order on a substrate, an organic semiconductor layer, an inorganic film, and a protective film. The inorganic film and the protective film each have a peripheral edge portion that is formed in an outer region compared to a peripheral edge portion of the organic semiconductor layer.
1. A semiconductor device comprising:
in order on a substrate,
an organic semiconductor layer;
an inorganic film; and
a protective film,
the inorganic film and the protective film each having a peripheral edge portion that is formed in an outer region compared to a peripheral edge portion of the organic semiconductor layer, and
wherein an end portion of the inorganic film has a tapered portion.
2. The semiconductor device according to claim 1 , comprising:
in order on the substrate,
a first electrode;
the organic semiconductor layer; and
a second electrode serving as the inorganic film,
the organic semiconductor layer having a photoelectric conversion function.
3. The semiconductor device according to claim 2 , further comprising:
a contact hole provided in a region, in the protective film, opposing the second electrode and not opposing the organic semiconductor layer; and
a contact metal layer electrically connected to the second electrode via the contact hole.
4. The semiconductor device according to claim 2 , wherein
a contact metal layer is provided covering the end portion of the second electrode.
5. The semiconductor device according to claim 1 , wherein the protective film is a single-layer film configured of one of silicon nitride, silicon oxide, and silicon oxynitride, or is a laminated film configured of two or more of the silicon nitride, silicon oxide, and silicon oxynitride.
6. The semiconductor device according to claim 2 , wherein the first electrode and the second electrode are each configured of a transparent electrically-conductive film.
7. A solid-state imaging unit comprising pixels each including one or a plurality of organic photoelectric conversion sections,
the one or the plurality of organic photoelectric conversion sections each including, in order on a substrate, a first electrode, an organic semiconductor layer having a photoelectric conversion function, a second electrode, and a protective film,
the second electrode and the protective film each having a peripheral edge portion that is formed in an outer region compared to a peripheral edge portion of the organic semiconductor layer, and
wherein an end portion of the second electrode has a tapered portion.
8. The solid-state imaging unit according to claim 7 , further comprising:
a contact hole provided in a region, in the protective film, opposing the second electrode and not opposing the organic semiconductor layer; and
a contact metal layer electrically connected to the second electrode via the contact hole.
9. The solid-state imaging unit according to claim 7 , wherein
a contact metal layer is provided covering the end portion of the second electrode.
10. The solid-state imaging unit according to claim 7 , wherein, in each of the pixels, the one or the plurality of organic photoelectric conversion sections and one or a plurality of inorganic photoelectric conversion sections are laminated, the one or the plurality of inorganic photoelectric conversion sections each performing photoelectric conversion in a wavelength range different from a wavelength range of the one or the plurality of organic photoelectric conversion sections.
11. The solid-state imaging unit according to claim 10 , wherein
the one or the plurality of inorganic photoelectric conversion sections are formed to be embedded in a semiconductor substrate, and
the one or the plurality of organic photoelectric conversion sections are formed on a first face side of the semiconductor substrate.
12. The solid-state imaging unit according to claim 11 , wherein a multi-layered wiring layer is formed on a second face side of the semiconductor substrate.
13. The solid-state imaging unit according to claim 11 , wherein
the one of the one or the plurality of organic photoelectric conversion sections performs photoelectric conversion of green light, and
a first inorganic photoelectric conversion section of the one or the plurality of inorganic photoelectric conversion sections performing photoelectric conversion of blue light and a second inorganic photoelectric conversion section of the one or the plurality of inorganic photoelectric conversion sections performing photoelectric conversion of red light are laminated in the semiconductor substrate.
14. An electronic apparatus with a solid-state imaging unit, the solid-state imaging unit comprising pixels each including one or a plurality of organic photoelectric conversion sections,
the one or the plurality of organic photoelectric conversion sections each including, in order on a substrate, a first electrode, an organic semiconductor layer having a photoelectric conversion function, a second electrode, and a protective film,
the second electrode and the protective film each having a peripheral edge portion that is formed in an outer region compared to a peripheral edge portion of the organic semiconductor layer, and
wherein an end portion of the second electrode has a tapered portion.