Mass spectrometer
View Patent ↗An object of the present invention is to prevent lowering of introduction efficiency of ions and to reduce labor for a cleaning operation. In order to solve the above problems, the present invention provides a mass spectrometer where ion introduction hole of an electrode is divided into a first region, a second region, and a third region, a central axis direction of the ion introduction hole in both or either one of the first region and the third region is different from a flow direction axis of the ion inside the ion introduction hole in the second region, and axes of the ion introduction hole in the first region and the third region are in an eccentric position relationship.
1. A mass spectrometer, which introduces ions generated under atmospheric pressure into a vacuum chamber exhausted by vacuum exhausting means and analyzes a mass of the ion, comprising: an electrode, in which ion introduction hole introducing the ion into the vacuum chamber is opened, wherein
the ion introduction hole of the electrode is divided into a first region, a second region, and a third region,
a central axis direction of the ion introduction hole in both or either one of the first region and the third region is different from a flow direction axis of the ion inside the ion introduction hole in the second region,
the second region has no outlet other than outlets leading to the first region and the third region,
the electrode can be separated between the first region and the second region or between the third region and the second region or in a midway of the second region, and
axes of the ion introduction hole in the first region and the third region are in an eccentric position relationship.
2. The mass spectrometer according to claim 1 , wherein a hole diameter of the ion introduction hole in the third region is 1.5 mm or less.
3. The mass spectrometer according to claim 1 , wherein pressure inside the second region is within a range of 10,000 Pa or more to 50,000 Pa or less.
4. The mass spectrometer according to claim 1 , wherein a hole diameter of the ion introduction hole in the first region is 1 mm or less.
5. The mass spectrometer according to claim 1 , wherein a cross-sectional configuration of the ion introduction hole in both or either one of the first region and the third region is different from a cross-sectional configuration of the ion introduction hole in the second region.
6. The mass spectrometer according to claim 1 , wherein the first region has a plurality of ion introduction holes.
7. The mass spectrometer according to claim 1 , wherein the third region has a plurality of ion introduction holes.
8. The mass spectrometer according to claim 1 , further comprising an ion focus electrode focusing the ion, wherein the third region is disposed between the second region and the ion focus electrode.