Ionization gauge for high pressure operation
View Patent ↗An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.
1. An ionization gauge to measure pressure comprising:
an extended anode structure comprising a grid extending along a longitudinal axis, the grid defining an ionization volume within the grid in which electrons impact gas molecules and atoms, opposite ends of the grid defining opposite ends of the ionization volume;
a hot cathode electron source that emits electrons into the ionization volume, the electron source being positioned at one of the opposite ends of the ionization volume; and
an ion collector electrode to collect ions formed by collisions between the electrons, emitted by the hot cathode electron source, and gas molecules and atoms, to provide a gas pressure output, the ion collector electrode extending through the ionization volume within the grid along an ion collector axis substantially parallel to the longitudinal axis of the grid, the ion collector axis extending through the opposite ends of the ionization volume.
2. The ionization gauge of claim 1 , wherein the grid is a cylindrical grid.
3. A method of measuring pressure with an ionization gauge comprising:
emitting electrons from a hot cathode electron source positioned at one of opposite ends of an ionization volume, the electrons colliding with gas molecules and atoms inside an extended anode structure comprising a cylindrical grid that defines the ionization volume within the grid, the cylindrical grid extending along a longitudinal axis, opposite ends of the cylindrical grid defining opposite ends of the ionization volume; and
collecting ions formed by collisions between the electrons, emitted by the hot cathode electron source, and gas molecules and atoms on an ion collector electrode to provide a gas pressure output, the ion collector electrode extending through the ionization volume within the grid along an ion collector axis substantially parallel to the longitudinal axis of the grid, the ion collector axis extending through the opposite ends of the ionization volume.
4. The method of claim 3 , wherein the pressure is in a range of between about 10 −1 Torr and about 10 −4 Torr.