Solid-state imaging element and method of manufacturing the same
Provided are a solid-state imaging element which can be simply manufactured and can control movement of electric charges in an accumulation region with a high degree of accuracy, and a method of manufacturing the same. A solid-state imaging element ( 1 a ) includes a substrate ( 11 ) having a first conductivity type; an accumulation region ( 12 ) having a second conductivity type and provided in the substrate ( 11 ); a read-out region ( 13 ) for receiving the transferred electric charges accumulated in the accumulation region ( 12 ); and a transfer section ( 14 ) for transferring the electric charges from the accumulation region ( 12 ) to the read-out region ( 13 ). An impurity concentration modulation region 121 having a locally high concentration of an impurity having the second conductivity type, or having a locally low concentration of an impurity having the first conductivity type is formed in a part of the accumulation region ( 12 ). An area of the impurity concentration modulation region ( 121 ) per unit distance with respect to the transfer section ( 14 ), or a density of the discretely provided impurity concentration modulation region ( 121 ) increases with decreasing distance to the transfer section ( 14 ).
1. A solid-state imaging element comprising:
a substrate having a first conductivity type;
an accumulation region having a second conductivity type, opposite to the first conductivity type, in the substrate that accumulates electric charges generated by a photoelectric conversion;
a read-out region having the second conductivity type in the substrate that receives transferred electric charges accumulated in the accumulation region; and
a transfer section above a region between the accumulation region and the read-out region in the substrate that transfers the electric charges from the accumulation region to the read-out region, wherein
a plurality of impurity concentration modulation regions having a locally higher concentration of an impurity having the second conductivity type than a peripheral region, or having a locally lower concentration of an impurity having the first conductivity type than the peripheral region, are in the accumulation region,
the peripheral region is in the accumulation region, and
the plurality of the impurity concentration modulation regions extend parallel to a first direction away from the transfer section in a plane parallel to a surface of the substrate and, the closer a portion of the peripheral region in an outline region sandwiched by two adjacent impurity concentration modulation regions included in the plurality of the impurity concentration modulation regions is to a center line, the narrower a width of the portion of the peripheral region sandwiched by the two adjacent impurity concentration modulation regions is, the outline region being surrounded by an outline enclosing the plurality of the impurity concentration modulation regions, and the center line being parallel to the first direction and passing through a center of the transfer section.
2. The solid-state imaging element according to claim 1 , wherein a width of the outline region surrounded by the outline enclosing the plurality of the impurity concentration modulation regions increases toward the transfer section, in the plane parallel to the surface of the substrate.
3. The solid-state imaging element according to claim 2 , wherein the width of the outline region continuously increases toward the transfer section in the plane parallel to the surface of the substrate.
4. The solid-state imaging element according to claim 3 , wherein the width of the outline region linearly or exponentially increases toward the transfer section in the plane parallel to the surface of the substrate.
5. The solid-state imaging element according to claim 1 , wherein,
in the case where the concentration of the impurity having the second conductivity type is locally higher in the impurity concentration modulation regions than the peripheral region, the concentration of the impurity having the second conductivity type is uniform in the impurity concentration modulation regions, and
in the case where the concentration of the impurity having the first conductivity type is locally lower in the impurity concentration modulation regions than the peripheral region, the concentration of the impurity having the first conductivity type is uniform in the accumulation region other than the impurity concentration modulation regions.