IP Library Granted Patent US 9,245,730
Granted Patent B2
US 9,245,730 · App. 14/379,470 · Granted Jan 26, 2016

Apparatus and methods for generating electromagnetic radiation

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Quick Facts
Patent No.
US 9,245,730
App. No.
14/379,470
Granted
Jan 26, 2016
Kind
B2
Abstract

An apparatus for generating electromagnetic radiation includes an envelope, a vortex generator configured to generate a vortexing flow of liquid along an inside surface of the envelope, first and second electrodes within the envelope configured to generate a plasma arc therebetween, and an insulative housing associated surrounding at least a portion of an electrical connection to one of the electrodes. The apparatus further includes a shielding system configured to block electromagnetic radiation emitted by the arc to prevent the electromagnetic radiation from striking all inner surfaces of the insulative housing. The apparatus further includes a cooling system configured to cool the shielding system.

Claims (51)

1. An apparatus for generating electromagnetic radiation, the apparatus comprising:

a) an envelope;

b) a vortex generator configured to generate a vortexing flow of liquid along an inside surface of the envelope;

c) first and second electrodes within the envelope configured to generate a plasma arc therebetween;

d) an insulative housing surrounding at least a portion of an electrical connection to one of the electrodes;

e) a shielding system configured to block electromagnetic radiation emitted by the arc to prevent the electromagnetic radiation from striking all inner surfaces of the insulative housing; and

f) a cooling system configured to cool the shielding system.

2. The apparatus of claim 1 wherein the shielding system comprises an insulative shielding component having an opaque surface configured to block the electromagnetic radiation.

3. The apparatus of claim 2 wherein the insulative shielding component comprises a ceramic shielding component.

4. The apparatus of claim 2 wherein the cooling system comprises the vortex generator and wherein the vortex generator is configured to expose the opaque surface of the insulative shielding component to the vortexing flow of liquid.

5. The apparatus of claim 1 wherein the shielding system comprises an opaque portion of the envelope configured to block the electromagnetic radiation.

6. The apparatus of claim 5 wherein the opaque portion of the envelope comprises a portion of the envelope having an opaque coating on an inside surface thereof.

7. The apparatus of claim 5 wherein the opaque portion of the envelope is composed of opaque quartz.

8. The apparatus of claim 5 wherein the cooling system comprises the vortex generator and wherein the vortex generator is configured to expose the opaque portion of the envelope to the vortexing flow of liquid.

9. The apparatus of claim 1 wherein the shielding system comprises a conductive shielding component having an opaque surface configured to block the electromagnetic radiation.

10. The apparatus of claim 9 wherein the cooling system is configured to conductively cool the conductive shielding component.

11. The apparatus of claim 10 wherein the cooling system comprises a liquid cooled conductor in conductive contact with the conductive shielding component.

12. The apparatus of claim 1 wherein the shielding system is further configured to block the electromagnetic radiation from striking an O-ring seal.

13. The apparatus of claim 1 further comprising a heat-resistant O-ring seal configured to seal at least one component of the apparatus against the envelope.

14. The apparatus of claim 1 further comprising a second insulative housing surrounding at least a portion of the other one of the electrodes, and a second shielding system configured to block the electromagnetic radiation emitted by the arc to prevent the electromagnetic radiation from striking all inner surfaces of the second insulative housing, wherein the cooling system is configured to cool the second shielding system.

15. The apparatus of claim 1 wherein the shielding system further comprises a light-piping shielding component configured to prevent the electromagnetic radiation from axially exiting from an annular interior volume of the envelope.

16. The apparatus of claim 15 wherein the light-piping shielding component comprises an opaque washer abutting a distal end of the envelope.

17. The apparatus of claim 15 wherein the cooling system comprises the vortex generator and wherein the vortex generator is configured to expose the light-piping shielding component to the vortexing flow of liquid.

18. The apparatus of claim 1 , further comprising an external heat shield configured to heat-shield at least some of an outer surface of the insulative housing, wherein the cooling system is further configured to cool the external heat shield.

19. An apparatus for generating electromagnetic radiation, the apparatus comprising:

a) means for generating a vortexing flow of liquid along an inside surface of an envelope;

b) means for generating a plasma arc between first and second electrodes within the envelope;

c) means for blocking electromagnetic radiation emitted by the arc to prevent the electromagnetic radiation from striking all inner surfaces of an insulative housing surrounding at least a portion of an electrical connection to one of the electrodes; and

d) means for cooling the means for blocking.

20. A method of generating electromagnetic radiation, the method comprising:

a) generating a vortexing flow of liquid along an inside surface of an envelope;

b) generating a plasma arc between first and second electrodes within the envelope;

c) blocking electromagnetic radiation emitted by the arc with a shielding system to prevent the electromagnetic radiation from striking all inner surfaces of an insulative housing surrounding at least a portion of an electrical connection to one of the electrodes; and

d) cooling the shielding system.

21. The method of claim 20 wherein blocking comprises blocking the electromagnetic radiation with an opaque surface of an insulative shielding component of the shielding system.

22. The method of claim 21 wherein the insulative shielding component comprises a ceramic shielding component.

23. The method of claim 21 wherein cooling comprises exposing the opaque surface of the insulative shielding component to the vortexing flow of liquid.

24. The method of claim 20 wherein blocking comprises blocking the electromagnetic radiation with an opaque portion of the envelope.

25. The method of claim 24 wherein the opaque portion of the envelope comprises a portion of the envelope having an opaque coating on an inside surface thereof.

26. The method of claim 24 wherein the opaque portion of the envelope is composed of opaque quartz.

27. The method of claim 24 wherein cooling comprises exposing the opaque portion of the envelope to the vortexing flow of liquid.

28. The method of claim 20 wherein blocking comprises blocking the electromagnetic radiation with an opaque surface of a conductive shielding component of the shielding system.

29. The method of claim 28 wherein cooling comprises conductively cooling the conductive shielding component.

30. The method of claim 29 wherein conductively cooling comprises conducting heat energy between the conductive shielding component and a liquid cooled conductor.

31. The method of claim 20 wherein blocking further comprises blocking the electromagnetic radiation from striking an O-ring seal.

32. The method of claim 20 further comprising sealing at least one component against the envelope with a heat-resistant O-ring seal.

33. The method of claim 20 further comprising blocking the electromagnetic radiation emitted by the arc with a second shielding system to prevent the electromagnetic radiation from striking all inner surfaces of a second insulative housing surrounding at least a portion of the other one of the electrodes, and cooling the second shielding system.

34. The method of claim 20 wherein blocking further comprises blocking the electromagnetic radiation with a light-piping shielding component of the shielding system to prevent the electromagnetic radiation from axially exiting from an annular interior volume of the envelope.

35. The method of claim 34 wherein the light-piping shielding component comprises an opaque washer abutting a distal end of the envelope.

36. The method of claim 34 wherein cooling comprises exposing the light-piping shielding component to the vortexing flow of liquid.

37. The method of claim 20 further comprising heat-shielding at least some of an outer surface of the insulative housing with an external heat shield, and cooling the external heat shield.

Assignments (4)
RELEASE OF SECURITY INTEREST Recorded Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 30, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 050582/0796 →
SECURITY INTEREST Recorded Aug 27, 2018
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 046956/0348 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 18, 2014
From: KAMDAR, AMAR B.; CAMM, DAVID MALCOLM; BUMBULOVIC, MLADEN; LEMBESIS, PETER
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 033557/0260 →