Thermal spray material
A thermal spray material comprising granules containing a rare earth oxyfluoride has a particle diameter of 1 to 150 μm at a cumulative volume of 50 vol % before ultrasonic dispersion and 10 μm or smaller after ultrasonic dispersion at 300 W for 15 minutes as determined by laser diffraction/scattering particle size distribution analysis. The particle diameter after ultrasonic dispersion is one-third or less of that before ultrasonic dispersion. The thermal spray material has an average aspect ratio of 2.0 or lower and a compressibility of 30% or less. When the granules further contain a rare earth fluoride, upon being analyzed by X-ray diffractometry using Cu-Kα or Cu-Kα1 radiation, S1/S2 is preferably ≧0.10. S1=intensity of the maximum peak assigned to the rare earth oxyfluoride. S2=intensity of the maximum peak assigned to the rare earth fluoride, both observed in a 2θ angle range of 20° to 40°.
1. A thermal spray material comprising:
granules containing a rare earth oxyfluoride and a rare earth fluoride,
the thermal spray material having
a cumulative volume particle diameter of 1 to 150 μm at a cumulative volume of 50 vol % before ultrasonic dispersion at 300 W for 15 minutes,
wherein the cumulative volume particle diameter is 10 μm or smaller, after the ultrasonic dispersion at 300 W for 15 minutes, as determined by laser diffraction/scattering particle size distribution analysis,
the cumulative volume particle diameter of the thermal spray material, after the ultrasonic dispersion at 300 W for 15 minutes, being one-third or less of the cumulative volume particle diameter of the thermal spray material before the ultrasonic dispersion at 300 W for 15 minutes,
the thermal spray material having an average aspect ratio of 2.0 or lower before the ultrasonic dispersion at 300 W for 15 minutes,
the thermal spray material having a compressibility of 30% or less before the ultrasonic dispersion at 300 W for 15 minutes, and
the thermal spray material having a fracture strength of 0.3 MPa to less than 10 MPa before the ultrasonic dispersion at 300 W for 15 minutes,
wherein, before the ultrasonic dispersion at 300 W for 15 minutes, upon being analyzed by X-ray diffractometry using Cu-Kα or Cu-Kα1 radiation, the thermal spray material has an S0 to S1 ratio of 0.10 or smaller, the S0 being an intensity of a maximum peak assigned to a rare earth oxide, and the S1 being an intensity of a maximum peak assigned to the rare earth oxyfluoride, both observed in a 2θ angle range of from 20° to 40°.
2. The thermal spray material according to claim 1 , wherein, before the ultrasonic dispersion at 300 W for 15 minutes, upon being analyzed by X-ray diffractometry using Cu-Kα or Cu-Kα1 radiation, the thermal spray material has an S1 to S2 ratio of 0.10 or greater, the S1 being the intensity of the maximum peak assigned to the rare earth oxyfluoride, and the S2 being an intensity of a maximum peak assigned to the rare earth fluoride, both observed in a 2θ angle range of from 20° to 40°.
3. The thermal spray material according to claim 2 , wherein the rare earth of the rare earth oxyfluoride, the rare earth of the rare earth fluoride, and the rare earth of the rare earth oxide are at least one selected from yttrium, samarium, gadolinium, dysprosium, erbium, and ytterbium.
4. The thermal spray material according to claim 3 , wherein the rare earth of the rare earth oxyfluoride, the rare earth of the rare earth fluoride, and the rare earth of the rare earth oxide are yttrium.
5. The thermal spray material according to claim 1 , wherein the rare earth of the rare earth oxyfluoride, the rare earth of the rare earth fluoride, and the rare earth of the rare earth oxide are at least one selected from yttrium, samarium, gadolinium, dysprosium, erbium, and ytterbium.
6. The thermal spray material according to claim 5 , wherein the rare earth of the rare earth oxyfluoride, the rare earth of the rare earth fluoride, and the rare earth of the rare earth oxide are yttrium.