Radical reactor with inverted orientation
A radical reactor including an elongated structure received within a chamber of a body of the radical reactor. Radicals are generated within a radical chamber formed in the elongated structure by applying a voltage signal across the elongated structure and an electrode extending within the radical chamber. The radicals generated in the radical chamber are routed via a discharge port of the elongated structure and a conduit formed in the body of the radical reactor onto the substrate. The discharge port and the conduit are not aligned so that irradiation generated in the radical chamber is not directed to the substrate.
1. A radical reactor for injecting radicals to a substrate, comprising:
a body formed with a cavity extending across the body and a conduit from the cavity to a surface of the body facing a substrate passing across the radical reactor; and
an elongated structure contained in the cavity, the elongated structure formed with a radical chamber for receiving gas through a passage in the elongated structure and generating radicals by disassociating the received gas,
wherein the radicals are discharged from the elongated structure into the cavity via a discharge port not aligned with the conduit of the body to prevent irradiation generated in the radical chamber from reaching the substrate.
2. The radical reactor of claim 1 , further comprising an electrode extending across a length of the elongated structure, a voltage signal applied across the elongated structure and the electrode to generate the radicals.
3. The radical reactor of claim 1 , wherein the conduit is configured to discharge the radicals onto the substrate from a first side of the radical reactor, and the discharge port is formed in the elongated structure to open towards a second side of the radical reactor opposite to the first side of the radical reactor.
4. The radical reactor of claim 3 , wherein the first side is a bottom of the radical reactor and the second side is a top of the radical reactor.
5. The radical reactor of claim 1 , wherein paths from the discharge port to the conduit are provided at both sides of the elongated structure.
6. The radical reactor of claim 1 , wherein the passage comprises a channel extending lengthwise across the elongated structure and perforations connecting the channel and the radical chamber.
7. The radical reactor of claim 1 , wherein the elongated structure is separate and removable from the body.
8. The radical reactor of claim 1 , wherein the elongated structure is integrated with the body.
9. A deposition apparatus comprising:
an injector for injecting gas onto a substrate; and
a radical reactor for injecting radicals onto the substrate, comprising:
a body formed with a cavity extending across the body and a conduit from the cavity to a surface of the body facing a substrate passing across the radical reactor, and
an elongated structure contained in the cavity, the elongated structure formed with a radical chamber for receiving gas through a passage in the elongated structure and generating radicals by disassociating the received gas,
wherein the radicals are discharged from the elongated structure into the cavity via a discharge port not aligned with the conduit of the body.
10. The deposition apparatus of claim 9 , wherein the radical reactor further comprises an electrode extending across a length of the elongated structure, a voltage signal applied across the elongated structure and the electrode to generate the radicals.
11. The deposition apparatus of claim 9 , wherein the conduit is configured to discharge the radicals onto the substrate from a first side of the radical reactor, and the discharge port is formed in the elongated structure to open towards a second side of the radical reactor opposite to the first side of the radical reactor.
12. The deposition apparatus of claim 11 , wherein the first side is a bottom of the radical reactor and the second side is a top of the radical reactor.
13. The deposition apparatus of claim 9 , wherein paths from the discharge port to the conduit are provided at both sides of the elongated structure.
14. The deposition apparatus of claim 9 , wherein the passage comprises a channel extending lengthwise across the elongated structure and perforations connecting the channel and the radical chamber.
15. The deposition apparatus of claim 9 , wherein the elongated structure is separate from and removable from the body.
16. The deposition apparatus of claim 9 , wherein the elongated structure is integrated with the body.