Touch panel and touch panel-equipped display device
An arrangement of a touch panel is provided that prevents corrosion of the lines and improves reliability. A touch panel includes: a substrate ( 10 ); a sensor electrode located on the substrate ( 10 ) and formed of an oxide conductive film; a line ( 161 ) electrically connected with the sensor electrode; and a protection film ( 14 ) provided over the line ( 161 ). The protection film ( 14 ) includes: a first protection sub-film ( 141 ) formed of silicon nitride; a second protection sub-film ( 142 ) located on the first protection sub-film ( 141 ), formed of silicon nitride and having a lower refractive index than the first protection sub-film ( 141 ); and a third protection sub-film ( 143 ) located on the second protection sub-film ( 142 ), formed of silicon nitride and having a higher refractive index than the second protection sub-film ( 142 ), wherein the second protection sub-film ( 142 ) has a thickness that is no smaller than the total thickness of the first protection sub-film ( 141 ) and the third protection sub-film ( 143 ).
1. A touch panel comprising:
a substrate;
a sensor electrode located on the substrate and formed of an oxide conductive film;
a line electrically connected with the sensor electrode; and
a protection film provided over the line,
the protection film including:
a first protection sub-film formed of silicon nitride;
a second protection sub-film located on the first protection sub-film, formed of silicon nitride and having a lower refractive index than the first protection sub-film; and
a third protection sub-film located on the second protection sub-film, formed of silicon nitride and have a higher refractive index than the second protection sub-film, wherein
the second protection sub-film has a thickness that is no smaller than the total thickness of the first and third protection sub-films,
the film stress in the second protection sub-film is tensile, and
the film stress in the protection film taken as a whole is tensile.
2. The touch panel according to claim 1 , wherein the protection film is in contact with the sensor electrode.
3. The touch panel according to claim 1 , wherein:
the refractive index of the first protection sub-film is no lower than 1.805,
the refractive index of the second protection sub-film is lower than 1.805, and
the refractive index of the third protection sub-film is no lower than 1.805.
4. The touch panel according to claim 1 , wherein:
the thickness of the first protection sub-film is no greater than 100 nm, and
the thickness of the third protection sub-film is no greater than 100 nm.
5. A touch panel comprising:
a substrate;
a sensor electrode located on the substrate and formed of an oxide conductive film;
a line electrically connected with the sensor electrode; and
a protection film provided over the line,
the protection film including:
a first protection sub-film formed of silicon nitride;
a second protection sub-film located on the first protection sub-film, formed of silicon nitride and having a lower refractive index than the first protection sub-film; and
a third protection sub-film located on the second protection sub-film, formed of silicon nitride and have a higher refractive index than the second protection sub-film, wherein
the second protection sub-film has a thickness that is no smaller than the total thickness of the first and third protection sub-films,
the protection film further includes a fourth protection sub-film formed of silicon oxide,
the first protection sub-film is located on the fourth protection sub-film, and
the thickness of the second protection sub-film is no smaller than the total thickness of the first, third and fourth protection sub-films.
6. A touch panel comprising:
a substrate;
a sensor electrode located on the substrate and formed of an oxide conductive film;
a line electrically connected with the sensor electrode; and
a protection film provided over the line,
the protection film including:
a first protection sub-film formed of silicon nitride;
a second protection sub-film located on the first protection sub-film, formed of silicon nitride and having a lower refractive index than the first protection sub-film; and
a third protection sub-film located on the second protection sub-film, formed of silicon nitride and have a higher refractive index than the second protection sub-film, wherein
the second protection sub-film has a thickness that is no smaller than the total thickness of the first and third protection sub-films,
the sensor electrode includes a first electrode extending in one direction, and a second electrode extending in a direction that crosses the direction in which the first electrode extends,
the second electrode includes:
a plurality of insular electrodes; and
connecting portions connecting the insular electrodes, and
the protection film is located in a layer between the first electrode and the connecting portions.
7. The touch panel according to claim 1 , wherein the protection film is located in a layer that is more distant from the substrate than the sensor electrode is.
8. A touch panel-equipped display device comprising:
a liquid crystal display device; and
the touch panel according to claim 1 .