IP Library Granted Patent US 9,821,309
Granted Patent B2
US 9,821,309 · App. 14/409,617 · Granted Nov 21, 2017

Porous membrane apparatus, method, and applications

Inventor: Mandy B. Esch (Ithaca, NY)
Assignee: CORNELL UNIVERSITY
B01L3/502707C12M23/16C12M25/02C12M25/14G03F7/2022B01L2200/0647B01L2200/10B01L2200/12
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Quick Facts
Patent No.
US 9,821,309
App. No.
14/409,617
Granted
Nov 21, 2017
Kind
B2
Abstract

Microporous membranes formed in a microfluidic device, and methods of manufacture. A method comprises the steps of etching a plurality of pillars in a microfluidic chamber, applying a first polymer material layer, applying a photoresist layer, exposing the photoresist layer to radiation to cross-link it to the microfluidic chamber, masking the photoresist layer with a porous mask, exposing the top layer of the masked photoresist layer to radiation to form a porous membrane layer of cross-linked photoresist material, removing the non-exposed photoresist material from under the porous membrane layer, drying the porous membrane layer, and removing the first polymer material from under the porous membrane layer.

Claims (39)

1. A method of producing a three-dimensional porous membrane in a microfluidic chamber, the method comprising the steps of:

applying a photoresist material onto the microfluidic chamber to form a photoresist material layer, wherein the microfluidic chamber comprises a plurality of silicon pillars;

exposing a peripheral portion of the photoresist material layer to radiation, wherein exposing the photoresist material layer to radiation cross-links the exposed peripheral portion to the microfluidic chamber;

masking, using a mask comprising a plurality of pores formed therein, the photoresist material layer;

exposing a top layer of the masked photoresist material layer to radiation to form a porous membrane layer of cross-linked photoresist material;

removing non-exposed photoresist material from under the porous membrane layer;

air-drying the porous membrane layer such that the porous membrane layer adopts, as it dries, a three-dimensional shape corresponding to the plurality of silicon pillars; and

removing, via etching, the plurality of silicon pillars, wherein the air-dried porous membrane layer retains, after etching, the three-dimensional shape corresponding to the plurality of silicon pillars.

2. The method of claim 1 , further comprising the step of:

etching a portion of the microfluidic chamber to create the plurality of silicon pillars.

3. The method of claim 1 , further comprising the steps of:

applying a first polymer material onto the microfluidic chamber to form a first polymer layer.

4. The method of claim 3 , further comprising the step of removing the first polymer material.

5. The method of claim 1 , wherein the photoresist material is SU-8.

6. The method of claim 3 , wherein the steps of applying the first polymer material onto the etched microfluidic chamber and applying the photoresist material comprise spin coating.

7. The method of claim 1 , wherein the step of removing the non-exposed photoresist material from under the porous membrane layer comprises incubating in photoresist material developer.

8. The method of claim 2 , wherein said etching step comprises the steps of:

applying an initial photoresist material onto the microfluidic chamber to form an initial photoresist material layer;

exposing the initial photoresist material layer to radiation in a predetermined pillar array pattern;

etching the microfluidic chamber to create a plurality of silicon pillars corresponding to the predetermined pillar array pattern formed in the exposed initial photoresist material layer; and

removing all of the initial photoresist material.

9. The method of claim 1 , further comprising the steps of:

seeding the porous membrane layer with a plurality of cells; and

incubating the seeded porous membrane layer under conditions suitable to promote growth of said seeded cells.

10. The method of claim 9 , wherein said plurality of cells are Caco-2 cells.

11. A method of producing a porous membrane in a microfluidic chamber, the method comprising the steps of:

applying a photoresist material onto the microfluidic chamber to form a photoresist material layer;

exposing a peripheral portion of the photoresist material layer to radiation, wherein exposing the photoresist material layer to radiation cross-links the exposed peripheral portion to the microfluidic chamber;

masking, using a mask comprising a plurality of pores formed therein, the photoresist material layer;

exposing a top layer of the masked photoresist material layer to radiation to form a porous membrane layer of cross-linked photoresist material;

removing the non-exposed photoresist material from under the porous membrane layer;

drying the porous membrane layer such that the porous membrane layer adopts, as it dries, a three-dimensional shape corresponding to the plurality of silicon pillars; and

removing, via etching, the plurality of silicon pillars, wherein the dried porous membrane layer retains the three-dimensional shape corresponding to the plurality of silicon pillars after etching.

12. The method of claim 11 , wherein the photoresist material is SU-8.

13. The method of claim 11 , wherein the method further comprises, prior to said masking step, the step of:

exposing a central portion of the photoresist material layer to radiation, wherein a plurality of cross-linked support posts are created in said photoresist material layer.

14. The method of claim 11 , further comprising the step of:

seeding the porous membrane layer with a plurality of cells; and

incubating the seeded porous membrane layer under conditions suitable to promote growth of said seeded cells.

Assignments (3)
CONFIRMATORY LICENSE Recorded Mar 23, 2018
From: CORNELL UNIVERSITY
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 045541/0192 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 22, 2015
From: ESCH, MANDY B.
To: CORNELL UNIVERSITY
Reel/Frame 036149/0803 →
CONFIRMATORY LICENSE Recorded Feb 18, 2015
From: CORNELL UNIVERSITY
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 035023/0092 →
Continuity (2)
Provisional Application 61668224 · Jul 5, 2012
Related Publication 20150174573A1 · Jun 25, 2015